公开(公告)号：WO2006025737A1

公开(公告)日：2006-03-09

申请号：PCT/NL2005/000630

申请日：2005-08-31

Applicant: Technische Universiteit Delft ,  ZANDBERGEN, Hendrik Willem ,  TICHELAAR, Frans David ,  ALKEMADE, Paulus Franciscus Augustinus

Inventor： ZANDBERGEN, Hendrik Willem ,  TICHELAAR, Frans David ,  ALKEMADE, Paulus Franciscus Augustinus

IPC: H01J37/31 ,  B81B1/00 ,  B23K15/08

CPC classification number: B82Y30/00 ,  B23K15/0006 ,  B23K15/0013 ,  B23K15/002 ,  B23K15/0026 ,  B23K15/08 ,  B23K15/10 ,  B23K2201/16 ,  H01J37/31

Abstract: A method for the formation of nanometer-scale electrodes, wherein strip of electrically conductive material, in particular metal, is provided with a longitudinal direction, a width direction and a thickness direction and then, with the aid of an electron beam, a groove is provided in a top surface of the strip, in the width direction of the strip, with a nanometer- scale width in the longitudinal direction of the strip.

Abstract translation: 一种用于形成纳米级电极的方法，其中导电材料（特别是金属）带被设置有纵向，宽度方向和厚度方向，然后借助于电子束，凹槽是 设置在条带的宽度方向上的条带的顶表面中，沿条带的纵向方向具有纳米级的宽度。