Invention Application
WO2006127886A3 SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS A LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE
审中-公开
用于实现作为线束形成的激光与衬底上沉积的膜之间的相互作用的系统和方法
- Patent Title: SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS A LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE
- Patent Title (中): 用于实现作为线束形成的激光与衬底上沉积的膜之间的相互作用的系统和方法
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Application No.: PCT/US2006020215Application Date: 2006-05-25
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Publication No.: WO2006127886A3Publication Date: 2009-04-16
- Inventor: DAS PALASH P , HOFFMANN THOMAS , SANDSTROM RICHARD L , BOUCKY OTTO , STUMPP ERNST , MATZKOVITS BERTHOLD , HOELL MICHAEL , WALTHER JOERG , BRENNER KURT , GRUPP GUENTER
- Applicant: CYMER INC , ZEISS IND MESSTECHNIK GMBH , DAS PALASH P , HOFFMANN THOMAS , SANDSTROM RICHARD L , BOUCKY OTTO , STUMPP ERNST , MATZKOVITS BERTHOLD , HOELL MICHAEL , WALTHER JOERG , BRENNER KURT , GRUPP GUENTER
- Assignee: CYMER INC,ZEISS IND MESSTECHNIK GMBH,DAS PALASH P,HOFFMANN THOMAS,SANDSTROM RICHARD L,BOUCKY OTTO,STUMPP ERNST,MATZKOVITS BERTHOLD,HOELL MICHAEL,WALTHER JOERG,BRENNER KURT,GRUPP GUENTER
- Current Assignee: CYMER INC,ZEISS IND MESSTECHNIK GMBH,DAS PALASH P,HOFFMANN THOMAS,SANDSTROM RICHARD L,BOUCKY OTTO,STUMPP ERNST,MATZKOVITS BERTHOLD,HOELL MICHAEL,WALTHER JOERG,BRENNER KURT,GRUPP GUENTER
- Priority: US13817505 2005-05-26
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
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