Invention Application
- Patent Title: SYSTEMS AND METHODS FOR PROCESSING VAPOR
- Patent Title (中): 用于处理蒸汽的系统和方法
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Application No.: PCT/US2012049146Application Date: 2012-08-01
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Publication No.: WO2013022669A2Publication Date: 2013-02-14
- Inventor: LYONS CHRISTOPHER S , ENGLE KENT T , VANHOOSE STEVEN R , SPAWN TERENCE D , PIEPER JOSEPH M , ANDERSON EDWARD J , STOSS WALTER
- Applicant: 3M INNOVATIVE PROPERTIES CO , LYONS CHRISTOPHER S , ENGLE KENT T , VANHOOSE STEVEN R , SPAWN TERENCE D , PIEPER JOSEPH M , ANDERSON EDWARD J , STOSS WALTER
- Assignee: 3M INNOVATIVE PROPERTIES CO,LYONS CHRISTOPHER S,ENGLE KENT T,VANHOOSE STEVEN R,SPAWN TERENCE D,PIEPER JOSEPH M,ANDERSON EDWARD J,STOSS WALTER
- Current Assignee: 3M INNOVATIVE PROPERTIES CO,LYONS CHRISTOPHER S,ENGLE KENT T,VANHOOSE STEVEN R,SPAWN TERENCE D,PIEPER JOSEPH M,ANDERSON EDWARD J,STOSS WALTER
- Priority: US201161515399 2011-08-05
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/448
Abstract:
A system for processing vapor. The system includes a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit. The system further includes a first vapor control valve disposed in the bypass conduit, a second vapor control valve disposed in the feed conduit, a first vacuum chamber fluidically coupled to the bypass conduit, and a second vacuum chamber fluidically coupled to the feed conduit.
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