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公开(公告)号:WO2013022669A3
公开(公告)日:2013-02-14
申请号:PCT/US2012/049146
申请日:2012-08-01
Applicant: 3M INNOVATIVE PROPERTIES COMPANY , LYONS, Christopher S. , ENGLE, Kent T. , VANHOOSE, Steven R. , SPAWN, Terence D. , PIEPER, Joseph M. , ANDERSON, Edward J. , STOSS, Walter
Inventor: LYONS, Christopher S. , ENGLE, Kent T. , VANHOOSE, Steven R. , SPAWN, Terence D. , PIEPER, Joseph M. , ANDERSON, Edward J. , STOSS, Walter
IPC: C23C16/44 , C23C16/448
Abstract: A system for processing vapor. The system includes a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit. The system further includes a first vapor control valve disposed in the bypass conduit, a second vapor control valve disposed in the feed conduit, a first vacuum chamber fluidically coupled to the bypass conduit, and a second vacuum chamber fluidically coupled to the feed conduit.
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公开(公告)号:WO2013022669A2
公开(公告)日:2013-02-14
申请号:PCT/US2012049146
申请日:2012-08-01
Applicant: 3M INNOVATIVE PROPERTIES CO , LYONS CHRISTOPHER S , ENGLE KENT T , VANHOOSE STEVEN R , SPAWN TERENCE D , PIEPER JOSEPH M , ANDERSON EDWARD J , STOSS WALTER
Inventor: LYONS CHRISTOPHER S , ENGLE KENT T , VANHOOSE STEVEN R , SPAWN TERENCE D , PIEPER JOSEPH M , ANDERSON EDWARD J , STOSS WALTER
IPC: C23C16/44 , C23C16/448
CPC classification number: C23C16/45561 , B01D3/10 , B05D1/60 , C23C14/12 , C23C14/228 , C23C14/24 , C23C14/544 , C23C14/562 , C23C14/58 , C23C14/5806 , C23C14/582 , C23C16/50
Abstract: A system for processing vapor. The system includes a vapor source for producing a vapor and an outlet conduit coupled to the vapor source for carrying the vapor from the vapor source. Downstream of the vapor source the outlet conduit separates into a vapor bypass conduit and a vapor feed conduit. The system further includes a first vapor control valve disposed in the bypass conduit, a second vapor control valve disposed in the feed conduit, a first vacuum chamber fluidically coupled to the bypass conduit, and a second vacuum chamber fluidically coupled to the feed conduit.
Abstract translation: 蒸汽处理系统 该系统包括用于产生蒸汽的蒸汽源和与蒸汽源耦合的出口导管,用于承载来自蒸汽源的蒸气。 在蒸汽源的下游,出口导管分离成蒸气旁路管道和蒸气供给导管。 该系统还包括设置在旁路管道中的第一蒸汽控制阀,设置在进料管道中的第二蒸气控制阀,与流体耦合到旁路管道的第一真空室,以及与进料管道流体耦合的第二真空室。
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