发明申请
- 专利标题： METHOD FOR PROCESSING A SURFACE
- 专利标题（中）： 处理表面的方法
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申请号： PCT/US2014/027925申请日： 2014-03-14
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公开(公告)号： WO2014152836A1公开(公告)日： 2014-09-25
- 发明人: DRUZ, Boris, L. , KANAROV, Viktor , HAYES, Alan, V. , ROQUE, Mario, B.
- 申请人： VEECO INSTRUMENTS, INC.
- 申请人地址： 1 Terminal Drive Plainview, NY 11803 US
- 专利权人： VEECO INSTRUMENTS, INC.
- 当前专利权人： VEECO INSTRUMENTS, INC.
- 当前专利权人地址： 1 Terminal Drive Plainview, NY 11803 US
- 代理机构： HUMPHREY, Thomas, W. et al.
- 优先权： US13/802,828 20130314
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; C23C14/22
摘要：
Method and apparatus for processing a substrate (44) with an energetic particle beam (42). Features (66) on the substrate (44) are oriented relative to the energetic particle beam (42) and the substrate is scanned through the energetic particle beam (42). The substrate is periodically indexed about its azimuthal axis of symmetry (122), while shielded from exposure to the energetic particle beam (42), to reorient the features relative to the major dimension of the beam. When the substrate is shielded, the energetic particle particle beam is turned off.
IPC分类:
