Invention Application
- Patent Title: MICRO PICK UP ARRAY WITH COMPLIANT CONTACT
- Patent Title (中): MICRO抓取阵列与合规联系人
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Application No.: PCT/US2014/039300Application Date: 2014-05-23
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Publication No.: WO2014197221A1Publication Date: 2014-12-11
- Inventor: BIBL, Andreas , GOLDA, Dariusz
- Applicant: LUXVUE TECHNOLOGY CORPORATION
- Applicant Address: 1705 Wyatt Drive Santa Clara, California 95054 US
- Assignee: LUXVUE TECHNOLOGY CORPORATION
- Current Assignee: LUXVUE TECHNOLOGY CORPORATION
- Current Assignee Address: 1705 Wyatt Drive Santa Clara, California 95054 US
- Agency: SCHELLER, James C. et al.
- Priority: US13/909,892 20130604
- Main IPC: B81C99/00
- IPC: B81C99/00 ; H01L21/67 ; H01L23/00 ; H01L21/683 ; B25J15/00 ; H01L21/768
Abstract:
Micro pick up arrays for transferring micro devices from a carrier substrate are disclosed. In an embodiment, a micro pick up array (104) includes a compliant contact (108) for delivering an operating voltage from a voltage source to an array of electrostatic transfer heads (114). The compliant contact is moveable relative to a base substrate (214) of the micro pick up array.
Information query
