Invention Application
- Patent Title: HIGH POWER BROADBAND LIGHT SOURCE
- Patent Title (中): 高功率宽带光源
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Application No.: PCT/US2015/022498Application Date: 2015-03-25
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Publication No.: WO2015148671A1Publication Date: 2015-10-01
- Inventor: CHIMMALGI, Anant , YADAV, Rahul , SHCHEMELININ, Anatoly , BEZEL, Ilya , DERSTINE, Matthew
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: Legal Department One Technology Drive, Milpitas Milpitas, California 95035 US
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: Legal Department One Technology Drive, Milpitas Milpitas, California 95035 US
- Agency: MCANDREWS, Kevin et al.
- Priority: US61/970,061 20140325; US14/667,235 20150324
- Main IPC: H01S3/063
- IPC: H01S3/063 ; G02B6/26
Abstract:
A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.
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