公开(公告)号：WO2015148671A1

公开(公告)日：2015-10-01

申请号：PCT/US2015/022498

申请日：2015-03-25

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  YADAV, Rahul ,  SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  DERSTINE, Matthew

IPC: H01S3/063 ,  G02B6/26

CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

Abstract translation: 用于产生高功率宽带光的系统包括多个光持续等离子体光源。 光源中的每一个包括泵送源，用于容纳气体并被配置为从泵浦源接收泵浦照明的气体容纳结构和抛物面反射器元件，抛物面反射器元件被布置成收集所产生的宽度辐射的至少一部分 等离子体并形成准直宽带辐射输出。 该系统还包括一组光学元件，其被配置为将来自多个光持久等离子体光源的抛物面反射器元件的准直宽带输出组合成聚集的宽带光束。

公开(公告)号：WO2015089424A1

公开(公告)日：2015-06-18

申请号：PCT/US2014/070063

申请日：2014-12-12

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  TORKAMAN, Amir

IPC: H05H1/24 ,  H05H1/48

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J61/52 ,  H01J65/04

Abstract: A plasma cell for forming light-sustained plasma includes a transmission element configured to contain a volume of gas, a first terminal flange disposed at or near an opening of the transmission element, a second terminal flange disposed at or near another opening of the transmission element, a floating flange disposed between the first or second terminal flange and the transmission element. The floating flange is movable to compensate for thermal expansion of the transmission element. Further, the floating flange is configured to enclose the internal volume of the transmission element to contain a volume of gas within the transmission element. The transmission element is configured to receive illumination from an illumination source in order to generate plasma within the volume of gas. The transmission element is transparent to a portion of the illumination from the illumination source and a portion of broadband radiation emitted by the plasma.

Abstract translation: 用于形成光持久等离子体的等离子体单元包括被配置为容纳一定体积的气体的传输元件，设置在传动元件的开口处或附近的第一端子凸缘，设置在传动元件的另一个开口处或附近的第二端子凸缘 设置在第一或第二端子凸缘与传动元件之间的浮动凸缘。 浮动凸缘可移动以补偿传动元件的热膨胀。 此外，浮动凸缘被构造成包围传动元件的内部容积以容纳传动元件内的一定体积的气体。 传输元件被配置为从照明源接收照明，以在气体体积内产生等离子体。 传输元件对于来自照明源的照明的一部分和由等离子体发射的宽带辐射的一部分是透明的。

公开(公告)号：WO2014025442A1

公开(公告)日：2014-02-13

申请号：PCT/US2013/041875

申请日：2013-05-20

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  PANZER, Matthew Alan

IPC: H01L21/66

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸气作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

公开(公告)号：WO2014004621A1

公开(公告)日：2014-01-03

申请号：PCT/US2013/047811

申请日：2013-06-26

Applicant: KLA-TENCOR CORPORATION

Inventor： SHCHEMELININ, Anatoly ,  BEZEL, Ilya

IPC: H01J65/04

CPC classification number: H01J37/32055 ,  H01J61/04 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/28 ,  H01J65/04

Abstract: A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.

Abstract translation: 激光持续等离子体光源包括等离子体灯泡，其包含由等离子体灯泡内的电流驱动的工作气体流。 带电粒子被引入等离子体灯泡的工作气体中。 维持在不同电压水平的电极布置驱动带电粒子通过工作气体。 带电粒子在工作气体内的移动导致工作气体通过夹带而沿带电粒子的移动方向流动。 所产生的工作气体流量增加等离子体周围的对流并且增加激光到等离子体相互作用。 可以通过控制存在于每个电极上的电压来稳定和控制等离子体灯泡内的工作气体流。 通过等离子体的工作气体的更稳定的流动有助于在等离子体灯泡内更稳定的等离子体形状和位置。

公开(公告)号：WO2016209995A1

公开(公告)日：2016-12-29

申请号：PCT/US2016/038812

申请日：2016-06-22

Applicant: KLA-TENCOR CORPORATION

Inventor： DERSTINE, Matthew ,  BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SHIFRIN, Eugene

IPC: H01S3/095 ,  H05H1/24 ,  H01S3/131

CPC classification number: H05G2/008

Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.

Abstract translation: 用于产生激光持续宽带光的系统包括被配置为产生泵浦光束的泵浦源，用于容纳气体的气体容纳结构和多通光学组件。 多遍光学组件包括一个或多个光学元件，其被配置为执行泵送光束通过气体的一部分的多次通过以维持宽带发光等离子体。 一个或多个光学元件被布置成收集透射通过等离子体的泵送光束的未吸收部分，并将所收集的未吸收的泵送光束部分引导回到气体的该部分中。

公开(公告)号：WO2016145221A1

公开(公告)日：2016-09-15

申请号：PCT/US2016/021816

申请日：2016-03-10

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SHIFRIN, Eugene ,  PANZER, Matthew

IPC: H01J37/32

CPC classification number: H01J65/04 ,  H05G2/008

Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

Abstract translation: 用于通过光持续等离子体形成产生宽带光的光学系统包括腔室，照明源，一组聚焦光学器件和一组收集光学器件。 室被配置为在第一相中包含缓冲材料和第二相中的等离子体形成材料。 照明源产生连续波泵照明。 该组聚焦光学器件将连续波泵浦照明通过缓冲材料聚焦到缓冲材料和等离子体形成材料之间的界面上，以便通过激发至少等离子体形成材料产生等离子体。 该组收集光学器件接收从等离子体发出的宽带辐射。

公开(公告)号：WO2015023886A1

公开(公告)日：2015-02-19

申请号：PCT/US2014/051138

申请日：2014-08-14

Applicant: KLA-TENCOR CORPORATION

Inventor： SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  PANZER, Matthew ,  SHIFRIN, Eugene

IPC: H01J65/04

CPC classification number: G02B27/1006

Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

Abstract translation: 用于分离等离子体泵浦光和收集的宽带光的系统包括被配置为产生包括至少第一波长的泵浦照明的泵浦源，用于容纳一定体积气体的气体容纳元件，被配置为将来自泵浦源的泵浦照明 进入气体体积以在气体体积内产生等离子体，其中等离子体发射包括至少第二波长的宽带辐射和位于收集器的反射表面和泵浦源之间的照明分离棱镜元件，并布置成在空间上分离 所述泵浦照明包括第一波长和发射的宽带辐射，其包括从等离子体发射的至少第二波长。

公开(公告)号：WO2014193987A1

公开(公告)日：2014-12-04

申请号：PCT/US2014/039840

申请日：2014-05-28

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  DERSTINE, Matthew

IPC: H01J61/30

CPC classification number: H05H1/24 ,  H01J61/30 ,  H01J65/04 ,  H05G2/003 ,  H05G2/008

Abstract: A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The plasma cell also includes a top flow control element disposed above the plasma generation, which includes an internal channel configured to direct a plume of the plasma upward, and a bottom flow control element disposed below the plasma generation region, which includes an internal channel configured to direct gas upward toward the plasma generation region. The top flow control element and the bottom flow control element are arranged within the transmission element to form one or more gas return channels for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

Abstract translation: 用于控制对流的等离子体单元包括被配置为从照明源接收照明的传输元件，以便在气体体积的等离子体产生区域内产生等离子体。 等离子体单元还包括设置在等离子体产生之上的顶部流量控制元件，其包括被配置为引导等离子体羽流向上的内部通道，以及设置在等离子体产生区域下方的底部流量控制元件，其包括配置在内部通道 以将气体向上引导到等离子体产生区域。 顶部流量控制元件和底部流量控制元件布置在传动元件内以形成用于将气体从等离子体产生区域上方的区域传送到等离子体产生区域下方的区域的一个或多个气体返回通道。

公开(公告)号：WO2017058790A1

公开(公告)日：2017-04-06

申请号：PCT/US2016/053952

申请日：2016-09-27

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  OH, Sebaek ,  WITTENBURG, Joshua ,  WILSON, Lauren ,  YADAV, Rahul ,  BEZEL, Ilya ,  NAVONE, Mike ,  SHCHEMELININ, Anatoly

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  G01N23/04 ,  G02B6/0005 ,  G02B6/0006 ,  G02B6/0008 ,  G02B6/02042 ,  G02B6/028 ,  G02B6/4215 ,  G02B27/141

Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.

Abstract translation: 公开了一种照明泵浦源。 照明泵浦源包括被配置为产生一组激光束的一组电源，其中该组激光束中的至少一些被配置为包括具有不同波长的照明。 照明泵浦源还包括光纤。 照明泵浦源还包括一个或多个光学元件，所述一个或多个光学元件被配置为将来自至少一些激光束的照明耦合到光纤的一个或多个区域。

公开(公告)号：WO2015149022A1

公开(公告)日：2015-10-01

申请号：PCT/US2015/023177

申请日：2015-03-27

Applicant: KLA-TENCOR CORPORATION

Inventor： WILSON, Lauren ,  CHIMMALGI, Anant ,  BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  DERSTINE, Matthew ,  DELGADO, Gildardo

IPC: H01J65/04

CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

Abstract translation: 开放式等离子体灯包括空腔部分。 空腔部分的气体输入和气体输出被布置成使气体流过空腔部分。 等离子体灯还包括气体供应组件，其流体地耦合到空腔部分的气体输入并且被配置为将气体供应到空腔部分的内部容积。 等离子体灯还包括流体耦合到空腔部分的气体输出的喷嘴组件。 喷嘴组件和空腔部分布置成使得一定体积的气体从泵浦源接收泵送照明，其中持续等离子体发射宽带辐射。 喷嘴组件被配置成建立从空腔部分内到空腔部分外部的区域的对流气流，使得通过气流将一部分持续等离子体从空腔部分移除。