Invention Application
WO2017100130A1 LASER SUSTAINED PLASMA LIGHT SOURCE WITH GRADED ABSORPTION FEATURES
审中-公开
具有渐变吸收特性的激光持续等离子光源
- Patent Title: LASER SUSTAINED PLASMA LIGHT SOURCE WITH GRADED ABSORPTION FEATURES
- Patent Title (中): 具有渐变吸收特性的激光持续等离子光源
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Application No.: PCT/US2016/064980Application Date: 2016-12-05
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Publication No.: WO2017100130A1Publication Date: 2017-06-15
- Inventor: BEZEL, Ilya , SHCHEMELININ, Anatoly , GROSS, Kenneth P. , PANZER, Matthew , CHIMMALGI, Anant , WILSON, Lauren , WITTENBERG, Joshua
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Agency: MCANDREWS, Kevin et al.
- Priority: US62/263,663 20151206; US15/360,397 20161123
- Main IPC: H01J61/30
- IPC: H01J61/30
Abstract:
A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
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