Invention Application
WO2017120370A1 FEATURE SELECTION AND AUTOMATED PROCESS WINDOW MONITORING THROUGH OUTLIER DETECTION
审中-公开
特征选择和自动化过程窗口监视通过OUTLIER DETECTION
- Patent Title: FEATURE SELECTION AND AUTOMATED PROCESS WINDOW MONITORING THROUGH OUTLIER DETECTION
- Patent Title (中): 特征选择和自动化过程窗口监视通过OUTLIER DETECTION
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Application No.: PCT/US2017/012382Application Date: 2017-01-05
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Publication No.: WO2017120370A1Publication Date: 2017-07-13
- Inventor: GHADAR, Shabnam , JAHANBIN, Sina , VAJARIA, Himanshu , RIES, Bradley
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Agency: McANDREWS, Kevin et al.
- Priority: US62/275,700 20160106; US15/248,523 20160826
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/67
Abstract:
Feature extraction and classification is used for process window monitoring. A classifier, based on combinations of metrics of masked die images and including a set of significant combinations of one or more segment masks, metrics, and wafer images, is capable of detecting a process non-compliance. A process status can be determined using a classifier based on calculated metrics. The classifier may learn from nominal data.
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