Invention Application
- Patent Title: PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE BODY
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Application No.: PCT/US2020/060918Application Date: 2020-11-17
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Publication No.: WO2021141676A2Publication Date: 2021-07-15
- Inventor: WALKER, Luke , BISTA, Saurav , DONELON, Matthew, Joseph , KENNEDY, Steven, Roger
- Applicant: HERAEUS CONAMIC NORTH AMERICA LLC
- Applicant Address: 301 N. Roosevelt Avenue
- Assignee: HERAEUS CONAMIC NORTH AMERICA LLC
- Current Assignee: HERAEUS CONAMIC NORTH AMERICA LLC
- Current Assignee Address: 301 N. Roosevelt Avenue
- Agency: ROSSI, Joseph, D. et al.
- Priority: US62/936,821 2019-11-18
- Main IPC: C04B35/44
- IPC: C04B35/44 ; C04B35/626 ; C04B35/645 ; C04B38/00 ; H01J37/32 ; C04B2235/3217 ; C04B2235/3222 ; C04B2235/3225 ; C04B2235/3244 ; C04B2235/5409 ; C04B2235/5436 ; C04B2235/5445 ; C04B2235/5463 ; C04B2235/6562 ; C04B2235/6565 ; C04B2235/6567 ; C04B2235/6581 ; C04B2235/662 ; C04B2235/666 ; C04B2235/72 ; C04B2235/728 ; C04B2235/764 ; C04B2235/77 ; C04B2235/775 ; C04B2235/782 ; C04B2235/785 ; C04B2235/786 ; C04B2235/80 ; C04B2235/95 ; C04B2235/96 ; C04B2235/9607 ; C04B2235/963 ; C04B35/6261 ; C04B35/6263 ; C04B35/62675 ; C04B38/0054 ; H01J37/32467 ; H01J37/32495
Abstract:
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 µm. A method of making the sintered ceramic body is also disclosed.
Information query
