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    MULTILAYER SINTERED CERAMIC BODY AND METHOD OF MAKING
    1.
    发明申请
    MULTILAYER SINTERED CERAMIC BODY AND METHOD OF MAKING 审中-公开

    公开(公告)号：WO2022081700A1

    公开(公告)日：2022-04-21

    申请号：PCT/US2021/054773

    申请日：2021-10-13

    Applicant: HERAEUS CONAMIC NORTH AMERICA LLC

    Inventor： WALKER, Luke ,  DONELON, Matthew, Joseph ,  WAGHMARE, Saurabh ,  THOMPSON, Lillian

    IPC: B32B18/00 ,  C04B35/119 ,  C04B35/44 ,  C04B35/645 ,  C04B38/00 ,  H01J37/32 ,  C04B35/626

    Abstract: Disclosed is a multilayer sintered ceramic body comprising at least one first layer comprising at least one crystalline phase of YAG, wherein the at least one first layer has at least one surface; and at least one second layer comprising alumina and at least one of stabilized zirconia and partially stabilized zirconia, wherein the at least one surface of the at least one first layer comprises pores wherein the pores have a maximum size of from 0.1 to 5 um as measured by SEM, and wherein each of the at least one first layer and the at least one second layer has a coefficient of thermal expansion (CTE), wherein the CTE of the at least one first layer and the CTE of the at least one second layer differ from 0 to 0.6 x 10-6/°C as measured in accordance with ASTM E228-17. Methods of making are also disclosed.

    ZIRCONIA TOUGHENED ALUMINA CERAMIC SINTERED BODIES
    3.
    发明申请
    ZIRCONIA TOUGHENED ALUMINA CERAMIC SINTERED BODIES 审中-公开

    公开(公告)号：WO2022115175A1

    公开(公告)日：2022-06-02

    申请号：PCT/US2021/054947

    申请日：2021-10-14

    Applicant: HERAEUS CONAMIC NORTH AMERICA LLC

    Inventor： WALKER, Luke ,  DONELON, Matthew, Joseph

    IPC: C04B35/119 ,  C04B35/626 ,  C04B35/645

    Abstract: A sintered ceramic body having at least one surface, the sintered ceramic body comprising: a first crystalline phase comprising A12O3 and from 8 vol.% to 20 vol.% of a second crystalline phase comprising ZrO2, wherein the first crystalline phase is a continuous matrix and the second crystalline phase is dispersed in the continuous matrix, wherein the sintered ceramic body has pores wherein the pores have a maximum pore size of from 0.1 to 5 μm as measured by SEM, wherein sintered ceramic body exhibits a coefficient of thermal expansion of from 6.899 to 9.630 x 10-6/°C across a temperature range of from 25-200 °C to 25-1400 °C as measured in accordance with ASTM E228-17, wherein the sintered ceramic body has a relative density of from 99% to 100% and has a density variation of from 0.2 to less than 5% across a greatest dimension, wherein the greatest dimension is from 200 to 625 mm, and wherein Si is either not present in the sintered ceramic body or it is present in the sintered ceramic body in an amount of 100 ppm or less..

    YTTRIA-ZIRCONIA SINTERED CERAMICS FOR PLASMA RESISTANT MATERIALS
    5.
    发明申请
    YTTRIA-ZIRCONIA SINTERED CERAMICS FOR PLASMA RESISTANT MATERIALS 审中-公开

    公开(公告)号：WO2023283536A1

    公开(公告)日：2023-01-12

    申请号：PCT/US2022/073375

    申请日：2022-07-01

    Applicant: HERAEUS CONAMIC NORTH AMERICA LLC

    Inventor： WALKER, Luke ,  DONELON, Matthew Joseph

    IPC: C04B35/505 ,  C04B35/645 ,  C04B35/626 ,  C04B38/00 ,  H01J37/32

    Abstract: Disclosed is a ceramic sintered body comprising yttrium oxide and zirconium oxide wherein the ceramic sintered body comprises not less than 75 mol % to not greater than 95 mol % yttrium oxide and not less than 5 mol % to not greater than 25 mol % zirconium oxide, wherein the ceramic sintered body comprises porosity in an amount of less than 2% by volume, wherein a density of the ceramic sintered body does not vary by more than 2% relative to theoretical density across a greatest dimension. The ceramic sintered body has a grain size of from 0.4 to less than 2 um as measured according to ASTM E1 12-2010. The ceramic sintered body may be machined into plasma resistant components for use in plasma processing chambers. Methods of making are also disclosed.

    MULTILAYER SINTERED CERAMIC BODY
    9.
    发明申请
    MULTILAYER SINTERED CERAMIC BODY 审中-公开

    公开(公告)号：WO2022133180A1

    公开(公告)日：2022-06-23

    申请号：PCT/US2021/063973

    申请日：2021-12-17

    Applicant: HERAEUS CONAMIC NORTH AMERICA LLC

    Inventor： WALKER, Luke ,  DONELON, Matthew, Joseph ,  WAGHMARE, Saurabh ,  THOMPSON, Lillan

    IPC: B32B18/00 ,  C04B35/111 ,  C04B35/119 ,  C04B35/44 ,  C04B35/486 ,  C04B35/645

    Abstract: Disclosed herein is a multilayer sintered ceramic body comprising at least one first layer comprising poly crystalline YAG, wherein the at least one first layer comprising poly crystalline YAG comprises pores wherein the pores have a maximum size of from 0.1 to 5 μm, at least one second layer comprising alumina and zirconia wherein the zirconia comprises at least one of stabilized and partially stabilized zirconia, and at least one third layer comprising at least one of YAG, alumina, and zirconia, wherein an absolute value of the difference in coefficient of thermal expansion (CTE) between the at least one first, second and third layers is from 0 to 0.75 x 10-6/°C as measured in accordance with ASTM E228-17, wherein the at least one first, second and third layers form a unitary, multilayer sintered ceramic body. Methods of making are also disclosed.

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