Invention Application
- Patent Title: GROUP III HEMT AND CAPACITOR THAT SHARE STRUCTURAL FEATURES
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Application No.: PCT/US2021/013160Application Date: 2021-01-13
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Publication No.: WO2021146229A1Publication Date: 2021-07-22
- Inventor: JONES, Evan , FISHER, Jeremy
- Applicant: CREE, INC.
- Applicant Address: 4600 Silicon Drive
- Assignee: CREE, INC.
- Current Assignee: CREE, INC.
- Current Assignee Address: 4600 Silicon Drive
- Agency: GREEN, III, Edward H.
- Priority: US16/741,835 2020-01-14
- Main IPC: H01L21/8252
- IPC: H01L21/8252 ; H01L27/06 ; H01L27/07 ; H01L49/02 ; H01L29/20 ; H01L27/0605 ; H01L27/0629 ; H01L27/0733 ; H01L28/40 ; H01L29/2003 ; H01L29/402 ; H01L29/452 ; H01L29/7783 ; H01L29/7786 ; H01L29/92
Abstract:
A High Mobility Electron Transistor, HEMT, (10) and a capacitor (14, 18, 20, 22, 24) co-formed on an integrated circuit share at least one structural feature, thereby tightly integrating the two components. In one embodiment, the shared feature may be a 2DEG channel of the HEMT (10), which also functions in lieu of a base metal layer of a conventional capacitor (12). In another embodiment, a dialectic layer of the capacitor (14, 18, 20, 22, 24) may be formed in a passivation step of forming the HEMT (10). In another embodiment, a metal contact of the HEMT (10) (e.g., source, gate, or drain contact) comprises a metal layer or contact of the capacitor (22). In these embodiments, one or more processing steps required to form a conventional capacitor (12) are obviated by exploiting one or more processing steps already performed in fabrication of the HEMT (10).
Information query
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