Invention Application
- Patent Title: IMPROVED RETAINING RING DESIGN
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Application No.: PCT/US2021/046760Application Date: 2021-08-19
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Publication No.: WO2022040459A1Publication Date: 2022-02-24
- Inventor: KHANNA, Aniruddh Jagdish , REDFIELD, Daniel , CHATOW, Ehud , MASON, Kenneth , TURNER, Steven , BAJAJ, Rajeev , RYNNE, Kieran Joseph , GOPALAN, Periya G.
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: 3050 BOWERS AVENUE
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: 3050 BOWERS AVENUE
- Agency: PATTERSON, B. Todd et al.
- Priority: US63/068,957 2020-08-21
- Main IPC: B24B37/32
- IPC: B24B37/32 ; B24B37/10 ; H01L21/67
Abstract:
The present disclosure relates to retaining rings that include tunable chemical, material and structural properties, improved structural and fluid transport configurations and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a retaining ring with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure provide an advanced retaining ring that has discrete features and geometries, formed from at least two different materials that are formed from one or more polymers. The layers and/or regions of the advanced retaining ring may include a composite material structure, such as a polymer that contains at least one filler, such as metals, semimetal oxides, carbides, nitrides and/or polymer particles.
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