Invention Application
- Patent Title: SIC SOLID MATERIAL, METHOD AND DEVICE FOR PRODUCING A SIC SOLID MATERIAL
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Application No.: PCT/EP2021/085493Application Date: 2021-12-13
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Publication No.: WO2022123080A2Publication Date: 2022-06-16
- Inventor: CRÖSSMANN, Ivo , SCHAAFF, Friedrich , TIEFEL, Hilmar Richard , CERAN, Kagan
- Applicant: ZADIENT TECHNOLOGIES SAS
- Applicant Address: 354 Voie Magellan
- Assignee: ZADIENT TECHNOLOGIES SAS
- Current Assignee: ZADIENT TECHNOLOGIES SAS
- Current Assignee Address: 354 Voie Magellan
- Agency: KEHL, ASCHERL, LIEBHOFF & ETTMAYR PATENTANWÄLTE * PARTNERSCHAFT MBB
- Priority: DE10 2020 215 755.3 2020-12-11
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B29/36 ; C30B23/02 ; C30B23/00 ; C30B25/08 ; C30B25/14 ; C30B25/18 ; C23C16/32 ; C01B32/956 ; C23C16/325 ; C23C16/4404 ; C23C16/4411 ; C23C16/4412 ; C23C16/46
Abstract:
The present invention relates to a method for producing a preferably elongated SiC solid, in particular of polytype 3C. The method according to the invention preferably comprises at least the following steps: Introducing at least a first source gas into a process chamber, said first source gas comprising Si; introducing at least one second source gas into the process chamber, the second source gas comprising C; electrically energizing at least one separator element disposed in the process chamber to heat the separator element; setting a deposition rate of more than 200µm/h, wherein a pressure in the process chamber of more than 1 bar is generated by the introduction of the first source gas and/or the second source gas, and wherein the surface of the deposition element is heated to a temperature in the range between 1300°C and 1800°C.
Public/Granted literature
- WO2022123080A1 METHOD AND DEVICE FOR PRODUCING A SIC SOLID MATERIAL Public/Granted day:2022-06-16
Information query
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