According to one aspect of the present disclosure, an apparatus (10, 20) for manufacturing a composite film (104) is provided. The composite film (104) includes a first film (101), at least one deposited layer (101a) and at least one second film (102, 103) having a lamination layer. The apparatus (10, 20) includes a vacuum chamber (400), a deposition apparatus (200) for depositing the at least one deposited layer (101a) on the first film (101), and a laminating apparatus (300) for laminating the at least one second film (102, 103) to the first film (101) such that the lamination layer of the at least one second film faces the at least one deposited layer (101a), wherein the deposition apparatus (200) and the laminating apparatus (300) are provided within the vacuum chamber (400). According to a further aspect of the present disclosure, a method (30) for manufacturing a composite film is provided, including providing (32) a first film, depositing (33) at least one deposited layer on the first film, providing (34) at least one second film having a lamination layer, and laminating (36) the at least one second film to the first film such that the lamination layer of the at least one second film faces the at least one deposited layer, wherein the depositing (33) and the laminating (36) are performed in the same vacuum chamber. According to a further aspect of the present disclosure, a composite film manufactured by the apparatus and using the method according to aspects of the present disclosure is provided.