公开(公告)号：EP3117449B1

公开(公告)日：2020-08-12

申请号：EP15762097.2

申请日：2015-02-16

申请人： Applied Materials, Inc.

发明人： BINNS, Simon Nicholas ,  WEST, Brian T. ,  SCHAUER, Ronald Vern ,  JOHNSON, Roger M. ,  COX, Michael S.

IPC分类号： H01L21/02 ,  H01L21/203 ,  H01J37/32 ,  H01J37/34

公开(公告)号：EP3117449A1

公开(公告)日：2017-01-18

申请号：EP15762097.2

申请日：2015-02-16

申请人： Applied Materials, Inc.

发明人： BINNS, Simon Nicholas ,  WEST, Brian T. ,  SCHAUER, Ronald Vern ,  JOHNSON, Roger M. ,  COX, Michael S.

IPC分类号： H01L21/02 ,  H01L21/203

摘要： A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.

摘要翻译： 处理室包括室主体，其具有设置在其上的室盖组件，耦合到室盖组件的一个或多个监控设备以及与室盖组件相邻设置的一个或多个与一个或多个监视设备通信的天线 。

公开(公告)号：EP3376341B1

公开(公告)日：2020-08-12

申请号：EP18165450.0

申请日：2013-02-20

申请人： Applied Materials, Inc.

发明人： SCHAUER, Ronald Vern ,  COVINGTON, Mark Roger ,  KUMARASWAMI, Suresh ,  PURI, Amitabh

IPC分类号： G06F1/26 ,  G06F13/10

公开(公告)号：EP3376341A1

公开(公告)日：2018-09-19

申请号：EP18165450.0

申请日：2013-02-20

申请人： Applied Materials, Inc.

发明人： SCHAUER, Ronald Vern ,  COVINGTON, Mark Roger ,  KUMARASWAMI, Suresh ,  PURI, Amitabh

IPC分类号： G06F1/26

摘要： Power supply system (600) supplies power to a semiconductor processing system (200). AC power (610) is converted to DC. The DC current is provided to the semiconductor processing system and also charges a back-up battery (615). Current parameters, parameters of a fan (625) or other parameters are monitored. In case of power dropout, the battery supplies the power to the semiconductor processing system.

公开(公告)号：EP2817720B1

公开(公告)日：2018-04-04

申请号：EP13751134.1

申请日：2013-02-20

申请人： Applied Materials, Inc.

发明人： SCHAUER, Ronald Vern ,  COVINGTON, Mark Roger ,  KUMARASWAMI, Suresh ,  PURI, Amitabh

IPC分类号： G06F13/10 ,  H01L21/67 ,  G06F9/44

CPC分类号： G05B19/02 ,  G06F1/263 ,  G06F13/105 ,  H02J4/00

摘要： Power supply system (600) supplies power to a semiconductor processing system (200). AC power (610) is converted to DC. The DC current is provided to the semiconductor processing system and also charges a back-up battery (615). Current parameters, parameters of a fan (625) or other parameters are monitored. In case of power dropout, the battery supplies the power to the semiconductor processing system.

公开(公告)号：EP2817720A1

公开(公告)日：2014-12-31

申请号：EP13751134.1

申请日：2013-02-20

申请人： Applied Materials, Inc.

发明人： SCHAUER, Ronald Vern ,  COVINGTON, Mark Roger ,  KUMARASWAMI, Suresh ,  PURI, Amitabh

IPC分类号： G06F13/14 ,  G06F9/44

CPC分类号： G05B19/02 ,  G06F13/105 ,  H02J4/00

摘要： Embodiments of the invention are directed toward systems and methods that execute legacy semiconductor applications using a non-legacy controller. In some embodiments a hardware abstraction layer and/or an emulator can be used to provide communication between a non-legacy operating system and legacy components including legacy applications. In some embodiments various methods and/or devices can be used to emulate and/or translate communications between legacy and non-legacy components.