公开(公告)号：EP1506448A2

公开(公告)日：2005-02-16

申请号：EP03752770.2

申请日：2003-05-20

申请人： Carl Zeiss SMS GmbH

发明人： STEINER, Reinhard ,  RUDOLF, Klaus ,  BRUNNER, Robert ,  BISCHOFF, Jörg ,  TRAEGER, Stefan ,  KOWARSCHIK, Richard ,  ZÖLLNER, Friedrich ,  ECKARDT, Peter ,  DARSCHT, Maxim ,  DOBSCHAL, Hans-Jürgen

IPC分类号： G02B27/48

CPC分类号： G02B27/48

摘要： The invention relates to an optical system for homogenizing an at least partially coherent light field, especially one emitted by a laser, preferably by an excimer laser. The optical system according to the invention essentially comprises an optical cycle, at least one coupling element for coupling a light field into the optical cycle and at least one decoupling element. The light field (1) or a portion of said light field (1) coupled into the cycle repeatedly passes the optical cycle, thereby at least partially deforming the wave front of the light field (1). Portions of the light field (1) are coupled out when they have passed the optical cycle once or several times. The light field (1) is coupled into the optical cycle with a predetermined wave front. During the repeated passage of the optical cycle, portions of the light field (1) whose wave fronts deviate from one another are coupled out of the cycle. If the laser radiation is pulsed, the distances across which the individual portions of the light field travel are longer than the temporal coherence length.

公开(公告)号：EP1543373A2

公开(公告)日：2005-06-22

申请号：EP03785604.4

申请日：2003-09-22

申请人： Carl Zeiss SMS GmbH

发明人： BISCHOFF, Jörg ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  ERDMANN, Lars ,  STEINER, Reinhard

IPC分类号： G02B27/48

CPC分类号： G02B27/106 ,  G02B21/06 ,  G02B27/123 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145

摘要： The invention relates to an lighting device comprising a beam multiplication device (1) which divides a coherent beam (18) into a plurality of partial beams (20, 21) and combines said partial beams to form a bundle of rays (26) once they have followed paths having different optical lengths, the partial beams (27, 28, 29, 30) diverging in said bundle of rays. Said lighting device also comprises a micro-optical system (3) which is arranged downstream from the beam multiplication device (1) and comprises a plurality of optical elements (19) arranged in a grid-type manner. Said bundle of rays (26) hits the micro-optical system (3), and the partial beams (27, 28, 29, 30) of the bundle of rays (26) thus hit each optical element (19) at different angles, in such a way that a plurality of illumination partial beams (M1, M2, M3, M4) irradiate from each optical element (19) in different diffusion directions and can be used to illuminate an object field (31).

公开(公告)号：EP1430354A2

公开(公告)日：2004-06-23

申请号：EP02800132.9

申请日：2002-09-27

申请人： Carl Zeiss SMS GmbH

发明人： ERDMANN, Lars ,  STEINER, Reinhard ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  BISCHOFF, Jörg

IPC分类号： G02B27/44 ,  G02B27/48

CPC分类号： G02B27/4244 ,  G02B27/425 ,  G02B27/48

摘要： The invention relates to a lighting system comprising a coherence reducer (1) which is provided with a mirror (2). Said coherence reducer introduces different phase shifts into a supplied coherent beam cluster (10) by means of the mirror (2), according to the position in the beam cross-section, and produces an illumination beam cluster (11). The inventive system also comprises an illuminating optical arrangement which is arranged downstream from the coherence reducer (1) and is used to illuminate an object field. Said optical arrangement comprises a micro-optical arrangement (4; 19) having a plurality of optical elements (9; 20) which are arranged in the form of a raster, and an imaging optical arrangement (5) which is arranged downstream from the micro-optical arrangement (4; 19). According to the invention, the mirror comprises an element (2) having a surface which is divided into a plurality of parallel partial surfaces (8) which are staggered in the perpendicular direction in relation to their surface. The supplied beam cluster (10) is reflected off the partial surfaces (8) of the mirror in such a way that partial illumination beam clusters (11) project from the partial surfaces (8) of the mirror, together forming the illumination beam cluster having the different phase shifts.

公开(公告)号：EP1543373B1

公开(公告)日：2006-06-28

申请号：EP03785604.4

申请日：2003-09-22

申请人： Carl Zeiss SMS GmbH

发明人： BISCHOFF, Jörg ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  ERDMANN, Lars ,  STEINER, Reinhard

IPC分类号： G02B27/48

CPC分类号： G02B27/106 ,  G02B21/06 ,  G02B27/123 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145

摘要： The invention relates to an lighting device comprising a beam multiplication device (1) which divides a coherent beam (18) into a plurality of partial beams (20, 21) and combines said partial beams to form a bundle of rays (26) once they have followed paths having different optical lengths, the partial beams (27, 28, 29, 30) diverging in said bundle of rays. Said lighting device also comprises a micro-optical system (3) which is arranged downstream from the beam multiplication device (1) and comprises a plurality of optical elements (19) arranged in a grid-type manner. Said bundle of rays (26) hits the micro-optical system (3), and the partial beams (27, 28, 29, 30) of the bundle of rays (26) thus hit each optical element (19) at different angles, in such a way that a plurality of illumination partial beams (M1, M2, M3, M4) irradiate from each optical element (19) in different diffusion directions and can be used to illuminate an object field (31).