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公开(公告)号：EP1412434A1
公开(公告)日：2004-04-28
申请号：EP02750218.6
申请日：2002-07-16
发明人： BOISVERT, Ronald , BUJALSKI, Duane , SU, Kai
IPC分类号： C09D4/00 , H01L21/316 , C09D183/04 , C08L83/04
CPC分类号： H01L21/3122 , C08G77/04 , C08L83/04 , C09D4/00 , C09D183/04 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , Y10T428/249969 , Y10T428/24999 , Y10T428/31663
摘要： This invention pertains to a siloxane resin composition comprising R1SiO3/2 siloxane units and (R2O)bSiO(4-b)/2 siloxane units wherein R1 is an alkyl group having 1 to 5 carbons; R2 is a branched alkyl group having 3 to 30 carbons, b is from 1 to 3. The siloxane resin contains a molar ratio of R1SiO3/2 units to (R2O)bSiO(4-b)/2 units of 1:99 to 99:1. The siloxane resin is useful to make insoluble porous resins and insoluble porous coatings. Heating a substrate coated with the siloxane resin at a sufficient temperature effects removal of the R2O groups to form an an insoluble porous coating having a a dielectric constant in the range of 2.1 to 3, a porosity in the range of 2 to 40 volume percent and a modulus in the range of 1.9 to 20 GPa.
摘要翻译： 本发明涉及含有R 1 SiO 3/2硅氧烷单元和（R 2 O）b SiO（4-b）/ 2硅氧烷单元的硅氧烷树脂组合物，其中R 1是具有1至5个碳原子的烷基; R 2为碳数3〜30的支链烷基，b为1〜3。硅氧烷树脂含有R 1 SiO 3/2单元与（R 2 O）b SiO（4-b）/ 2单元的摩尔比为1:99〜99 ：1。 硅氧烷树脂可用于制备不溶性多孔树脂和不溶性多孔涂层。 在足够的温度下加热涂覆有硅氧烷树脂的基材会除去R 2 O基团以形成介电常数在2.1至3范围内，孔隙率在2至40体积％范围内的不溶性多孔涂层和 模量在1.9至20GPa范围内。
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公开(公告)号：EP1442071B1
公开(公告)日：2011-03-23
申请号：EP02776148.5
申请日：2002-10-04
IPC分类号： C08G77/12 , C09D183/04 , H01L21/312
CPC分类号： C08L83/04 , C08G77/06 , C08G77/12 , C08G77/16 , C08G77/70 , C09D183/04 , H01L21/02126 , H01L21/02282 , H01L21/3122 , H01L21/76801 , Y10T428/24917
摘要： Silicone resins comprising 5 to 50 mole% of (PhSiO3-x)/2(OH)x) units and 50 to 95 mole% (HSiO(3-x)/2(OH)x), where Ph is a phenyl group, x has a value of 0, 1 or 2 and wherein the cured silicone resin has a critical surface free energy of 30 dynes/cm or higher. These resins are useful as etch stop layers for organic dielectric materials having a critical surface free energy of 40 dynes/cm or higher.
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公开(公告)号：EP1442071A1
公开(公告)日：2004-08-04
申请号：EP02776148.5
申请日：2002-10-04
IPC分类号： C08G77/12 , C09D183/04 , H01L21/312
CPC分类号： C08L83/04 , C08G77/06 , C08G77/12 , C08G77/16 , C08G77/70 , C09D183/04 , H01L21/02126 , H01L21/02282 , H01L21/3122 , H01L21/76801 , Y10T428/24917
摘要： Silicone resins comprising 5 to 50 mole% of (PhSiO3-x)/2(OH)x) units and 50 to 95 mole% (HSiO(3-x)/2(OH)x), where Ph is a phenyl group, x has a value of 0, 1 or 2 and wherein the cured silicone resin has a critical surface free energy of 30 dynes/cm or higher. These resins are useful as etch stop layers for organic dielectric materials having a critical surface free energy of 40 dynes/cm or higher.
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公开(公告)号：EP1412435A2
公开(公告)日：2004-04-28
申请号：EP02756227.1
申请日：2002-06-18
发明人： ALBAUGH, John , BOISVERT, Ronald , BUJALSKI, Duane , CHEVALIER, Pierre , EGUCHI, Katsuya , KING, Russell , OU, Duan-Li , SU, Kai
IPC分类号： C09D4/00
CPC分类号： H01L21/31695 , C08G77/12 , C08G77/16 , C08G77/18 , C08G77/24 , C08L83/04 , C09D4/00 , C09D183/04 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/3122 , C08G77/04
摘要： This invention pertains to a siloxane resin composition comprising R1SiO3/2 siloxane units R2SiO3/2 siloxane units and (R3O)bSiO(4-b)/2 siloxane units wherein R1 is an alkyl group having 1 to 5 carbons, hydrogen, or mixtures thereof; R2 is a monovalent organic group having 6 to 30 carbons; R3 is a branched alkyl group having 3 to 30 carbons, b is from 1 to 3; and the siloxane resin contains from 2.5 to 85 mole percent R1SiO3/2 units, 2.5 to 50 mole percent R2SiO3/2 units and 5 to 95 mole percent (R3O)bSiO(4-b)/2 units. The siloxane resin is useful to make insoluble porous resin and insoluble porous resin and insoluble porous coatings. Heating a substrate coated with the siloxane resin at a sufficient temperature effects removal of the R?2 and R3¿O groups to form an insoluble insoluble porous coating having a porosity of 1 to 60 volume percent and a dielectric constant in the range of 1.5 to 3.0.
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公开(公告)号：EP2046893A2
公开(公告)日：2009-04-15
申请号：EP07836185.4
申请日：2007-07-23
发明人： BOISVERT, Ronald , BUJALSKI, Duane , LI, Zhongtao , SU, Kai
IPC分类号： C08L83/04 , C08L85/04 , C09D185/04 , H01B3/46 , H01L21/312
CPC分类号： H01B3/46 , C08G77/56 , C08G77/58 , C09D183/14 , H01L21/02126 , H01L21/02216 , H01L21/02282 , H01L21/02337 , H01L21/3124
摘要： A silicone resin containing boron, aluminum, and/or titanium, and having silicon-bonded branched alkoxy groups; a silicone composition containing a silicone resin; and a method of preparing a coated substrate comprising applying a silicone composition on a substrate to form a film and pyrolyzing the silicone resin of the film.
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公开(公告)号：EP1412434B1
公开(公告)日：2008-07-02
申请号：EP02750218.6
申请日：2002-07-16
发明人： BOISVERT, Ronald , BUJALSKI, Duane , SU, Kai
IPC分类号： C09D4/00 , H01L21/316 , C09D183/04 , C08L83/04
CPC分类号： H01L21/3122 , C08G77/04 , C08L83/04 , C09D4/00 , C09D183/04 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/31695 , Y10T428/249969 , Y10T428/24999 , Y10T428/31663
摘要： This invention pertains to a siloxane resin composition comprising R1SiO3/2 siloxane units and (R2O)bSiO(4-b)/2 siloxane units wherein R1 is an alkyl group having 1 to 5 carbons; R2 is a branched alkyl group having 3 to 30 carbons, b is from 1 to 3. The siloxane resin contains a molar ratio of R1SiO3/2 units to (R2O)bSiO(4-b)/2 units of 1:99 to 99:1. The siloxane resin is useful to make insoluble porous resins and insoluble porous coatings. Heating a substrate coated with the siloxane resin at a sufficient temperature effects removal of the R2O groups to form an an insoluble porous coating having a a dielectric constant in the range of 2.1 to 3, a porosity in the range of 2 to 40 volume percent and a modulus in the range of 1.9 to 20 GPa.
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