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公开(公告)号:EP1220303A4
公开(公告)日:2003-04-02
申请号:EP00935530
申请日:2000-06-02
申请人: IBIDEN CO LTD
发明人: FURUKAWA MASAKAZU
CPC分类号: H01L21/67115 , H01L21/67103 , H05B3/143 , H05B3/74
摘要: A hot plate unit (1) short in heater temperature rising time and free from dusting, comprising a casing (2), a ceramic plate body (9) disposed at an opening part, and a heater (3) including a heating element (10) installed on the plate body, wherein a radiant heat reflector (4) is arranged between the casing and the heater.
摘要翻译: 热板单元(1)具有减少的加热器温度上升时间并且不产生灰尘。 热板单元包括具有开口部分的壳体(2) 布置在所述开口部分上并包括由陶瓷制成的板状构件(9)和布置在所述板状构件上的发热元件(10)的加热器(3) 以及插入在壳体和加热器之间的辐射热反射部件(4)。
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公开(公告)号:EP1130627A4
公开(公告)日:2001-11-14
申请号:EP00944434
申请日:2000-07-17
申请人: IBIDEN CO LTD
发明人: FURUKAWA MASAKAZU , ITO YASUTAKA
IPC分类号: H01L21/027 , H01L21/00 , H05B3/20
CPC分类号: H01L21/67103
摘要: A hot plate unit (1) capable of uniformly cooling a hot plate in a short time, comprising a hot plate (3) having heating elements (10) and a casing (2) supporting the hot plate, wherein the hot plate and the casing forms an internal space S1, and two flow-in ports (17) and two underside opening parts (31) are formed in a bottom wall (2a) of the casing.
摘要翻译: 能够在短时间内均匀地冷却热板的热板单元。 热板单元(1)包括热板(3),其包括加热元件(10)和支撑热板的壳体(2)。 热板和壳体定义了内部空间S1。 在壳体的底壁(2a)中形成有两个进气口(17)和两个下开口部分(31)。
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公开(公告)号:EP1175127A4
公开(公告)日:2004-08-18
申请号:EP00976349
申请日:2000-11-20
申请人: IBIDEN CO LTD
CPC分类号: H05B1/0233 , H01L21/67248 , H05B3/143 , H05B3/265 , H05B3/283
摘要: A ceramic heater for uniformly heating such objects as silicon wafers, wherein a heat generator is formed on the surface or the inside of a ceramic plate, characterized in that a bottom-closed hole is formed which extends from the back to the front of a heating surface for heating an object, the bottom of the bottom-closed hole being located relatively closer to the heating surface than to the heat generator, the bottom-closed hole being provided with a temperature measuring element.
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