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公开(公告)号:EP2593592B1
公开(公告)日:2018-05-16
申请号:EP11745502.2
申请日:2011-07-13
发明人: MÖLLER, Patrik , FREDENBERG, Mikael , UTTERBÄCK, Tomas , SANTOS, Antonio , CHAUVET, Jean-Michel , ROSÉN, Daniel , SVENSSON, Stefan
CPC分类号: H01L21/67092 , C25D1/003 , C25D1/20 , C25D5/02 , C25D7/123 , C25D17/12 , H01L21/683
摘要: Methods for separating a master electrode (101, 201) and a substrate (102, 202) in an ECPR process after printing are disclosed. The master electrode (101, 201) or the substrate (102, 202) is arranged on a first chuck (103, 104, 203, 204) and the other one of said master electrode (101, 201) and the substrate (102, 202) is arranged on a second chuck (103, 104, 203, 204. The master electrode (101, 201) and substrate (102, 202) have a planar interaction area during plating.
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2.LEVELING OF MASTER ELECTRODE AND SUBSTRATE IN ECPR, AND A CHUCK THEREFOR 有权
标题翻译: ECPR中的主电极和衬底的调平以及为此而设计的夹头公开(公告)号:EP2593585B1
公开(公告)日:2017-08-30
申请号:EP11745503.0
申请日:2011-07-13
发明人: UTTERBÄCK, Tomas , SVENSSON, Stefan , LINDGREN, Lennart , MÖLLER, Patrik , CHAUVET, Jean-Michel , SANTOS, Antonio , CAVAZZA, Gilbert
IPC分类号: C25D1/00 , C25D7/12 , C25D17/06 , H01L21/687
CPC分类号: H01L21/68735 , C25D1/00 , C25D7/123 , C25D17/06
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公开(公告)号:EP2593587B1
公开(公告)日:2016-09-07
申请号:EP11748301.6
申请日:2011-07-13
发明人: MÖLLER, Patrik , LINDGREN, Lennart , SVENSSON, Stefan , CHAUVET, Jean-Michel , SANTOS, Antonio , FREDENBERG, Mikael
CPC分类号: C25D7/123 , C25D17/001 , C25D17/06 , C25D17/12 , C25D17/14
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4.METHOD FOR RINSING AND/OR DRYING AN ECPR CHAMBER, AND CHUCKS AND CHUCK ASSEMBLIES THEREFORE 有权
标题翻译: 方法进行洗涤和/或干燥ECPR室,卡盘和Chuck安排THEREFOR公开(公告)号:EP2593591B1
公开(公告)日:2016-06-08
申请号:EP11738426.3
申请日:2011-07-13
发明人: MÖLLER, Patrik , LINDGREN, Lennart , SVENSSON, Stefan , CHAUVET, Jean-Michel , SANTOS, Antonio , FREDENBERG, Mikael
IPC分类号: C25D19/00 , H01L21/00 , C25D21/08 , H01L21/67 , C25D5/02 , C25D7/12 , H01L21/288 , C25D17/00 , C25D17/06 , C25D17/10
CPC分类号: H01L21/67051 , C25D5/02 , C25D7/123 , C25D17/001 , C25D17/004 , C25D17/06 , C25D17/10 , C25D21/08 , H01L21/67028 , H01L21/67034
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5.DEVICE, SYSTEM AND METHOD FOR USE IN MACHINES FOR ELECTROCHEMICAL PATTERN REPLICATION 有权
标题翻译: VORRICHTUNG,SYSTEM UND VERFAHRENFÜRMASCHINENFÜRELEKTROCHEMISCHE STRUKTURREPLIKATION公开(公告)号:EP2593584B1
公开(公告)日:2017-04-19
申请号:EP11743802.8
申请日:2011-07-13
发明人: MÖLLER, Patrik , FREDENBERG, Mikael , UTTERBÄCK, Tomas , SVENSSON, Stefan , SANTOS, Antonio , CHAUVET, Jean-Michel , ROSÉN, Daniel , WIWEN-NILSSON, Peter , LINDGREN, Lennart , CAVAZZA, Gilbert , RAYNAUD, Nicolas
CPC分类号: C25D1/00 , C25D5/02 , C25D7/123 , C25D17/001 , C25D17/005 , C25D17/008 , C25D17/06 , C25D17/12 , C25D21/12
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