专利检索 ap:("Semequip, Inc.") AND inv:"SACCO, George, P." 第 1 页

1.

发明公开
METHOD AND APPARATUS FOR EXTRACTING IONS FROM AN ION SOURCE FOR USE IN ION IMPLANTATION 审中-公开
标题翻译：方法和设备从离子源用以进行离子注入离子提取

公开(公告)号：EP2027601A2

公开(公告)日：2009-02-25

申请号：EP07798405.2

申请日：2007-06-12

申请人： Semequip, Inc.

发明人： HORSKY, Thomas, N. , MILGATE, Robert, W. , SACCO, George, P. , KRULL, Wade, Allen

IPC分类号： H01L27/00

CPC分类号： H01J37/08 , C23C14/48 , C23C14/564 , H01J9/38 , H01J27/024 , H01J37/3171 , H01J2209/017 , H01J2237/006 , H01J2237/022 , H01J2237/0812 , H01J2237/083 , H01J2237/31701 , H01L21/265

摘要： Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.