公开(公告)号：EP1139376B1

公开(公告)日：2010-05-19

申请号：EP01302674.5

申请日：2001-03-22

申请人： CANON KABUSHIKI KAISHA

发明人： Kaneko, Tetsuya ,  Nakata, Kohei ,  Miyazaki, Toshihiko

IPC分类号： H01J9/18 ,  H01J9/38 ,  H01J9/48

CPC分类号： H01J9/241 ,  H01J9/24 ,  H01J9/46 ,  H01J9/48 ,  H01J2209/017 ,  H01J2209/26 ,  H01J2209/385 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8655 ,  H01J2329/866

公开(公告)号：EP1695369A4

公开(公告)日：2009-11-04

申请号：EP04813789

申请日：2004-12-09

申请人： SEMEQUIP INC

发明人： HORSKY THOMAS N ,  MILGATE ROBERT W III ,  SACCO GEORGE P JR ,  JACOBSON DALE CONRAD ,  KRULL WADE ALLEN

IPC分类号： H01J7/24 ,  H01J20060101 ,  H01J37/08 ,  H01J37/317

CPC分类号： H01J37/3171 ,  C23C14/48 ,  C23C14/564 ,  H01J9/38 ,  H01J27/02 ,  H01J27/024 ,  H01J37/08 ,  H01J2209/017 ,  H01J2237/006 ,  H01J2237/022 ,  Y10T137/0357 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761 ,  Y10T137/85954 ,  Y10T137/85978 ,  Y10T137/85986 ,  Y10T137/86002

公开(公告)号：EP1695038A4

公开(公告)日：2009-05-20

申请号：EP04813385

申请日：2004-12-09

申请人： SEMEQUIP INC

发明人： HORSKY THOMAS N ,  MILGATE ROBERT W III

IPC分类号： A01G13/06 ,  C23C16/00 ,  C23C16/448 ,  C23C16/52 ,  H01J20060101 ,  H01J7/24 ,  H01J37/08 ,  H01J37/317

CPC分类号： H01J37/3171 ,  C23C14/48 ,  C23C14/564 ,  H01J9/38 ,  H01J27/02 ,  H01J27/024 ,  H01J37/08 ,  H01J2209/017 ,  H01J2237/006 ,  H01J2237/022 ,  Y10T137/0357 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761 ,  Y10T137/85954 ,  Y10T137/85978 ,  Y10T137/85986 ,  Y10T137/86002

摘要： A vapor delivery system comprises a combination of a heated vaporizer for the solid material operable at sub atmospheric pressure and a vapor delivery passage from the vaporizer to the vacuum chamber, the vapor delivery passage including a throttle valve followed by a vapor conduit, a pressure gauge that is responsive to sub atmospheric pressure being located between the throttle valve and the vapor conduit, surfaces of the vapor delivery passage that are exposed to the sublimed vapor, including such surfaces of the throttle valve, the pressure gauge and the vapor conduit, being adapted to be held at temperature above the condensation temperature of the solid material, and a closed-loop control system incorporating the pressure gauge being constructed to vary the conductance of the throttle valve to control the sub atmospheric pressure of the vapor downstream of the throttle valve in response to the output of the pressure gauge, flow of vapor to the vacuum chamber thereby being determined by pressure of the vapor in the region of the passage between the throttling valve and the vapor conduit.

公开(公告)号：EP1269507A2

公开(公告)日：2003-01-02

申请号：EP01908641.2

申请日：2001-01-16

申请人： MOTOROLA, INC.

发明人： JASKIE, James, E. ,  TALIN, Albert, Alec ,  VON ALLMEN, Paul ,  COLL, Bernard, F. ,  TOBIN, Kathleen, Anne

IPC分类号： H01J1/304 ,  H01J9/02

CPC分类号： H01J9/025 ,  H01J2209/017 ,  H01J2209/0226

摘要： A method for operating a field emission device (100) having an electron emitter (115) includes the steps of providing an emitter-enhancing electrode (117) proximate to electron emitter (115), causing emitter-enhancing electrode (117) to emit electrons, and causing the electrons emitted by emitter-enhancing electrode (117) to be received by electron emitter (115). A method for fabricating a field emission device (100) includes the steps of forming a layer (126) of dielectric material, forming emitter-enhancing electrode (117) on layer (126) of dielectric material, forming an enhanced-emission structure (131) in emitter-enhancing electrode (117), removing a portion of layer (126) of dielectric material proximate to enhanced-emission structure (131) to form a well (114, 158), and forming electron emitter (115) within well (114, 158).

公开(公告)号：EP0222949B1

公开(公告)日：1990-03-14

申请号：EP85308750.0

申请日：1985-12-02

申请人： SONY CORPORATION

发明人： Lee, Robert Anthony

IPC分类号： H01J9/38 ,  B08B3/12 ,  C03C23/00 ,  C09K11/01

CPC分类号： H01J9/38 ,  B08B3/12 ,  C09K11/01 ,  H01J2209/017 ,  Y02W30/72

公开(公告)号：EP1695369A2

公开(公告)日：2006-08-30

申请号：EP04813789.7

申请日：2004-12-09

申请人： Semequip, Inc.

发明人： HORSKY, Thomas, N. ,  MILGATE, Robert, W., III ,  SACCO, George, P., Jr. ,  JACOBSON, Dale, Conrad ,  KRULL, Wade, Allen

IPC分类号： H01J7/24

CPC分类号： H01J37/3171 ,  C23C14/48 ,  C23C14/564 ,  H01J9/38 ,  H01J27/02 ,  H01J27/024 ,  H01J37/08 ,  H01J2209/017 ,  H01J2237/006 ,  H01J2237/022 ,  Y10T137/0357 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761 ,  Y10T137/85954 ,  Y10T137/85978 ,  Y10T137/85986 ,  Y10T137/86002

摘要： The service lifetime of an ion source (400) is enhanced or prolonged by the source having provisions for ire-situ etch cleaning of the ion source (400) and of an extraction electrode (405), using reactive halogen gases (F1, F2), and by having features that extend the service duration between cleanings. The latter include accurate vapor flow control, accurate focusing of the ion beam optics, and thermal control of the extraction electrode that prevents formation of deposits or prevents electrode destruction. An apparatus comprised of an ion source for generating dopant ions for semiconductor wafer processing is coupled to a remote plasma source which delivers F or Cl ions to the first ion source for the purpose of cleaning deposits in the first ion source and the extraction electrode. These methods and apparatus enable long equipment uptime when running condensable feed gases such as sublimated vapor sources, and are particularly applicable for use with so-called cold ion sources. Methods and apparatus are described which enable long equipment uptime when decaborane and octadecarborane are used as feed materials, as well as when vaporized elemental arsenic and phosphorus are used, and which serve to enhance beam stability during ion implantation.

公开(公告)号：EP1695038A2

公开(公告)日：2006-08-30

申请号：EP04813385.4

申请日：2004-12-09

申请人： Semequip, Inc.

发明人： HORSKY, Thomas, N. ,  MILGATE, Robert, W., III.

IPC分类号： G01F1/00

CPC分类号： H01J37/3171 ,  C23C14/48 ,  C23C14/564 ,  H01J9/38 ,  H01J27/02 ,  H01J27/024 ,  H01J37/08 ,  H01J2209/017 ,  H01J2237/006 ,  H01J2237/022 ,  Y10T137/0357 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761 ,  Y10T137/85954 ,  Y10T137/85978 ,  Y10T137/85986 ,  Y10T137/86002

摘要： A vapor delivery system comprises a combination of a heated vaporizer for the solid material operable at sub atmospheric pressure and a vapor delivery passage from the vaporizer to the vacuum chamber, the vapor delivery passage including a throttle valve followed by a vapor conduit, a pressure gauge that is responsive to sub atmospheric pressure being located between the throttle valve and the vapor conduit, surfaces of the vapor delivery passage that are exposed to the sublimed vapor, including such surfaces of the throttle valve, the pressure gauge and the vapor conduit, being adapted to be held at temperature above the condensation temperature of the solid material, and a closed-loop control system incorporating the pressure gauge being constructed to vary the conductance of the throttle valve to control the sub atmospheric pressure of the vapor downstream of the throttle valve in response to the output of the pressure gauge, flow of vapor to the vacuum chamber thereby being determined by pressure of the vapor in the region of the passage between the throttling valve and the vapor conduit.

公开(公告)号：EP0817231A2

公开(公告)日：1998-01-07

申请号：EP97110866.7

申请日：1997-07-01

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Nikaido, Masaru ,  Hirahara, Sachiko ,  Okudo, Yukio ,  Hirosawa, Daizi ,  Takezawa, Hiroharu

IPC分类号： H01J9/14

CPC分类号： H01J9/142 ,  H01J2209/017

摘要： A shadow mask manufacturing method comprising the cleaning step performs rapid cleaning by spraying a cleaning solution, which is inert with respect to the band-like thin metal plate, upon upper and lower surfaces of the band-like thin metal plate and thereby generating cavitation near the surfaces of the band-like thin metal plate by using cavitation jet means, while regulating a position of the band-like thin metal plate and preventing the cleaning solution from leaking in a direction opposite to the conveyance direction of the band-like thin metal plate by using a first leakage-preventing seal unit provided upstream the cavitation jet means.

摘要翻译： 荫罩制造方法，包括清洗步骤通过喷洒的清洗溶液进行快速清洗，所有这一切是惰性的相对于所述带状金属薄板，在所述带状金属薄板的上，下表面，并由此产生接近汽蚀 采用气穴喷射方式，同时调节所述带状金属薄板的位置，并从相反的方向泄漏到带状薄金属的输送方向防止清洁溶液中的所述带状金属薄板的表面 通过使用上游气穴喷射装置提供的第一防漏密封部板。

公开(公告)号：EP2027601A4

公开(公告)日：2011-04-20

申请号：EP07798405

申请日：2007-06-12

申请人： SEMEQUIP INC

发明人： HORSKY THOMAS N ,  MILGATE ROBERT W ,  SACCO GEORGE P ,  KRULL WADE ALLEN

IPC分类号： H01J27/00 ,  H01J20060101 ,  H01J7/24 ,  H01J37/08 ,  H01J37/317

CPC分类号： H01J37/08 ,  C23C14/48 ,  C23C14/564 ,  H01J9/38 ,  H01J27/024 ,  H01J37/3171 ,  H01J2209/017 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/0812 ,  H01J2237/083 ,  H01J2237/31701 ,  H01L21/265

公开(公告)号：EP1139376A3

公开(公告)日：2004-03-17

申请号：EP01302674.5

申请日：2001-03-22

申请人： CANON KABUSHIKI KAISHA

发明人： Kaneko, Tetsuya ,  Nakata, Kohei ,  Miyazaki, Toshihiko

IPC分类号： H01J9/18 ,  H01J9/38 ,  H01J9/48

CPC分类号： H01J9/241 ,  H01J9/24 ,  H01J9/46 ,  H01J9/48 ,  H01J2209/017 ,  H01J2209/26 ,  H01J2209/385 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/8655 ,  H01J2329/866

摘要： An image display appratus is manufactured by processing a panel member through a plurality of chambers including ones for a bake processing and a getter processing. The getter processng is performed at a temperature lower than a temperature of the panel member subjected to the bake processing, to prevent degrading of a getter film.

摘要翻译： 图像显示装置通过处理包括用于烘烤处理和吸气处理的多个室的面板构件来制造。 吸气剂处理在比烘烤处理的面板构件的温度低的温度下进行，以防止吸气剂膜的劣化。