摘要:
The invention relates to bodies, coated by a SiC hard material layer or by a layer system comprising at least one SiC hard material layer, and to a method for producing said type of coated bodies. The aim of the invention is to supply bodies with SiC layers that have a particle-free, non-porous structure, a high degree of hardness, low brittleness, high bond strength, good oxidation resistance and a high resistance to crack growth. According to the invention, the bodies are coated by a SiC layer or a multi-layer coating system comprising at least one SiC layer, wherein the SiC layer comprises nano-crystalline 3C-SiC comprising halogen or a mixed layer comprising nano-crystalline 3C-SiC comprising halogen and amorphous SiC or nano-crystalline 3C-SiC comprising halogen and amorphous carbon. The coating of said bodies is carried out in a thermal CVD process, wherein a gas mixture comprising H 2 and/or one or more inert gases, one or more of the halogen polysilanes of the formulae Si n X 2n , Si n X 2n+2 , Si n X y H z , wherein X is the halogen and n ≥ 2 and one or more hydrocarbons is used. Alternatively according to the invention a gas mixture comprising one or more substituted halogen polysilanes having organic substitutes R of the general formulae Si n X y R z or Si n H x X y R z is used in H 2 and/or one or more inert gases, wherein X is the halogen and n ≥ 2, z > 0, y ≥ 1. The stoichiometric ratios 2n+2 = y +z or 2n=y+z apply for Si n X y R z and the stochiometric ratios 2n+2 = x+y+z or 2n=x+y+z apply for Si n H x X y R z.
摘要:
The invention relates to bodies coated with a hard material, comprising a multi-layer coating system containing at least one Ti 1-X Al X N hard material coating and to a multi-stage CVD method for producing said bodies. The aim of the invention is to achieve excellent adhesion of the Ti 1-x Al x N hard material coating in bodies coated with a hard material comprising a multi-layer coating system containing at least one Ti 1-X Al X N hard material coating and a high degree of wear resistance. According to the invention, said bodies coated with a hard material comprising a multi-layer coating system containing at least one Ti 1-X Al X N hard material coating are characterised by the following features: the coating system consists of a) a bonding coating applied to the body, consisting of TiN, Ti(C,N) or TiC; b) a phase gradient coating that is applied to the bonding coating; and c) the single or multi-phase Ti 1-X Al X N hard material coating or coatings applied to the phase gradient coating. The phase gradient coating consists of a TiN/h-AIN phase mixture on the side facing the bonding coating and has an increasing phase fraction of fcc-TiAIN with an increasing coating thickness, (the fraction being > 50%), towards the Ti 1-X Al X N hard material coating(s) and a corresponding simultaneous decrease in the phase fractions of TiN and h-AlN. The coating according to the invention can be used in particular for tools and components consisting of steel, hard metals, cermets and ceramics, such as for example drills, milling cutters and indexable cutting inserts.
摘要:
The invention relates to coated bodies made of metal, hard metal, cermet or ceramic material, coated with a single- or multi-layer coating system containing at least one hard material composite coating, and to a method for coating such bodies. The aim of the invention is to develop a coating system for such bodies, which is single- or multi-layered and comprises at least one hard material composite coating, which contains cubic TiAICN and hexagonal AIN as the main phases and is characterized by a composite structure having a smooth, homogeneous surface, high oxidation resistance and high hardness. Said aim includes the development of a method for cost-effectively producing such coatings. The hard material composite coating according to the invention contains cubic TiAICN and hexagonal AIN as main phases, wherein the cubic TiAICN is microcrystalline fcc-Ti 1-x Al x C y N z where x > 0.75, y = 0 to 0.25 and z = 0.75 to 1 having a crystallite size of ≥ 0.1 μm, and wherein the composite coating in the grain boundary region additionally contains amorphous carbon having a percent by weight of 0.01% to 20%. The coating is carried out according to the invention in a LPCVD process at temperatures between 700ºC and 900ºC and at pressures between 10 2 Pa and 10 5 Pa without additional plasma excitation. The hard material composite coating according to the invention is characterized by a composite structure having a smooth, homogeneous surface, high oxidation resistance and high hardness and can be used in particular as a wear protection coating on Si 3 N 4 and WC/Co indexable inserts and steel components.