Method of and apparatus for burning exhaust gases containing gaseous silane
    1.
    发明公开
    Method of and apparatus for burning exhaust gases containing gaseous silane 失效
    用于燃烧含气体硅烷的排气的方法和装置

    公开(公告)号:EP0160524A3

    公开(公告)日:1987-01-07

    申请号:EP85302919

    申请日:1985-04-25

    IPC分类号: F23G07/06 F23D14/82

    摘要: A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with airs in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere. An inert gas mixing pipe 17 is connected for dilution to an exhaust gas feed section 16, an enclosure pipe 21 is fitted to the outer circumference of an exhaust gas introduction pipe 13 introduced into the combustion chamber 6 to constitute a double pipe structure, and the enclosure pipe 21 is connected at the rear end thereof to an inert gas feed pipe 25 and slightly protruded at the top end thereof ahead of the top end of the exhaust gas introduction pipe.

    Apparatus for burning exhaust gases containing gaseous silane
    2.
    发明公开
    Apparatus for burning exhaust gases containing gaseous silane 失效
    用于气态含硅烷的废气的燃烧的装置。

    公开(公告)号:EP0160524A2

    公开(公告)日:1985-11-06

    申请号:EP85302919.7

    申请日:1985-04-25

    IPC分类号: F23G7/06 F23D14/82

    摘要: A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with airs in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere.
    An inert gas mixing pipe 17 is connected for dilution to an exhaust gas feed section 16, an enclosure pipe 21 is fitted to the outer circumference of an exhaust gas introduction pipe 13 introduced into the combustion chamber 6 to constitute a double pipe structure, and the enclosure pipe 21 is connected at the rear end thereof to an inert gas feed pipe 25 and slightly protruded at the top end thereof ahead of the top end of the exhaust gas introduction pipe.

    Combustion method for specific exhaust gases containing deleterious substances
    4.
    发明公开
    Combustion method for specific exhaust gases containing deleterious substances 失效
    Verbrennungsverfahrenfürspezifische Abgase mitschädlichenStoffen。

    公开(公告)号:EP0311317A2

    公开(公告)日:1989-04-12

    申请号:EP88309126.6

    申请日:1988-09-30

    IPC分类号: F23G7/06

    CPC分类号: F23G7/065 F23G2209/142

    摘要: A method for the combustion of specific exhaust gases such as silane-containing exhaust gases discharged from a reaction furnace in which a combustible gas is supplied to and burnt around the top end of a nozzle for the exhaust gases, thereby forming a flame barrier around the top end of the nozzle, and the exhaust gases are introduced from the top end of the nozzle to the inside of the flame barrier to be compulsorily burnt by the flame ahead of the barrier of the flame atmosphere.

    摘要翻译: 一种用于燃烧特定废气的方法,例如从反应炉排出的含硅烷的废气,其中可燃气体被供应到燃烧用于废气的喷嘴的顶端周围并在其周围燃烧,从而在其周围形成阻焰 喷嘴的顶端,排气从喷嘴的顶端引入火焰屏障的内部,被火焰气氛的屏障前方的火焰强制燃烧。

    Combustion method for specific exhaust gases containing deleterious substances
    5.
    发明公开
    Combustion method for specific exhaust gases containing deleterious substances 失效
    含有特殊废气的垃圾处理方法

    公开(公告)号:EP0311317A3

    公开(公告)日:1990-03-28

    申请号:EP88309126.6

    申请日:1988-09-30

    IPC分类号: F23G7/06

    CPC分类号: F23G7/065 F23G2209/142

    摘要: A method for the combustion of specific exhaust gases such as silane-containing exhaust gases discharged from a reaction furnace in which a combustible gas is supplied to and burnt around the top end of a nozzle for the exhaust gases, thereby forming a flame barrier around the top end of the nozzle, and the exhaust gases are introduced from the top end of the nozzle to the inside of the flame barrier to be compulsorily burnt by the flame ahead of the barrier of the flame atmosphere.

    摘要翻译: 一种用于燃烧特定废气的方法,例如从反应炉排出的含硅烷的废气,其中可燃气体被供应到燃烧用于废气的喷嘴的顶端周围并在其周围燃烧,从而在其周围形成阻焰 喷嘴的顶端,排气从喷嘴的顶端引入火焰屏障的内部,被火焰气氛的屏障前方的火焰强制燃烧。