Electro-absorption type semiconductor optical modulator having a quantum well structure
    3.
    发明公开
    Electro-absorption type semiconductor optical modulator having a quantum well structure 失效
    Optischer Halbleitermodulator vom Elektroabsorptionstyp mit Quantentopfstruktur

    公开(公告)号:EP0810462A3

    公开(公告)日:1998-09-09

    申请号:EP97108638

    申请日:1997-05-28

    申请人: NEC CORP

    发明人: SAKATA YASUTAKA

    IPC分类号: G02F1/025 G02F1/015 G02F1/017

    摘要: Disclosed is an electro-absorption type semiconductor optical modulator utilizing the Quantum Confinement Stark Effect, in which a quantum well structure introduced in its optical absorption layer is arranged to have a potential structuresuch that one of the electron affinity and the energy of the top of the valence band increases in the laminating direction, while the other decreases, thereby canceling the built-in field. It is intended to lower the drive voltage and to enhance an on/off ratio (extinction ratio). Thus, the absorption peak becomes narrow at a no bias state to attain a low drive voltage and an enhanced extinction ratio.

    摘要翻译: 公开了一种利用量子限制斯塔克效应的电吸收型半导体光调制器,其中在其光吸收层中引入的量子阱结构被布置成具有这样的潜在结构:电子亲和力和顶部的能量之一 价带在层叠方向上增加,而另一方降低,从而取消内置场。 旨在降低驱动电压并提高开/关比(消光比)。 因此,在无偏压状态下,吸收峰变窄,达到低驱动电压和提高的消光比。

    LIGHT MODULATORS COMPRISING SI-GE QUANTUM WELL LAYERS
    5.
    发明公开
    LIGHT MODULATORS COMPRISING SI-GE QUANTUM WELL LAYERS 审中-公开
    包含SI-GE量子阱层的调光器

    公开(公告)号:EP2049939A1

    公开(公告)日:2009-04-22

    申请号:EP07801537.7

    申请日:2007-08-07

    IPC分类号: G02F1/017 H01L21/205

    摘要: Optical modulators include active quantum well structures (200) coherent with pseudosubstrates (100) comprising relaxed buffer layers (104, 106, 108, 110) on a silicon substrate (102). In a preferred method the active structures, consisting of Si1-x Gex barrier and well layers with different Ge contents x, are chosen in order to be strain compensated. The Ge content in the active structures may vary in a step-wise fashion along the growth direction or in the form of parabolas within the quantum well regions. Optical modulation may be achieved by a plurality of physical effects, such as the Quantum Confined or Optical Stark Effect, the Franz-Keldysh Effect, exciton quenching by hole injection, phase space filling or temperature modulation. In a preferred method the modulator structures are grown epitaxially by low-energy plasma-enhanced chemical vapor deposition (LEPCVD).

    摘要翻译: 光调制器包括与在硅衬底(102)上包括松弛缓冲层(104,106,108,110)的假基底(100)相干的有源量子阱结构(200)。 在优选的方法中,选择由Si 1-x Ge x势垒和具有不同Ge含量x的阱层组成的有源结构以进行应变补偿。 有源结构中的Ge含量可以沿着生长方向逐步变化,或者在量子阱区域内以抛物线的形式变化。 光学调制可以通过多种物理效应来实现,例如量子限制或光学斯塔克效应,Franz-Keldysh效应,通过空穴注入的激子猝灭,相空间填充或温度调制。 在优选的方法中,调制器结构通过低能等离子体增强化学气相沉积(LEPCVD)外延生长。

    Electro-absorption type semiconductor optical modulator having a quantum well structure
    8.
    发明公开
    Electro-absorption type semiconductor optical modulator having a quantum well structure 失效
    电吸收型量子阱结构的半导体光调制器

    公开(公告)号:EP0810462A2

    公开(公告)日:1997-12-03

    申请号:EP97108638.4

    申请日:1997-05-28

    申请人: NEC CORPORATION

    发明人: Sakata, Yasutaka

    IPC分类号: G02F1/015

    摘要: Disclosed is an electro-absorption type semiconductor optical modulator utilizing the Quantum Confinement Stark Effect, in which a quantum well structure introduced in its optical absorption layer is arranged to have a potential structuresuch that one of the electron affinity and the energy of the top of the valence band increases in the laminating direction, while the other decreases, thereby canceling the built-in field. It is intended to lower the drive voltage and to enhance an on/off ratio (extinction ratio). Thus, the absorption peak becomes narrow at a no bias state to attain a low drive voltage and an enhanced extinction ratio.