VERFAHREN ZUR SELEKTIVEN DOTIERUNG VON SILIZIUM SOWIE DAMIT BEHANDELTES SILIZIUM-SUBSTRAT
    92.
    发明公开

    公开(公告)号:EP2277203A1

    公开(公告)日:2011-01-26

    申请号:EP09733502.0

    申请日:2009-04-09

    发明人: HABERMANN, Dirk

    摘要: A method for the selective doping of silicon of a silicon substrate (1) for producing a pn-junction in the silicon is characterized by the following steps: a) Providing the surface of the silicon substrate (1) with a doping agent (2) based on phosphorous, b) heating the silicon substrate (1) for creating a phosphorous silicate glass (2) on the surface of the silicon, wherein phosphorous diffuses into the silicon as a first doping (3), c) applying a mask (4) on the phosphorous silicate glass (2), covering the regions (5) that are later highly doped, d) removing the phosphorous silicate glass (2) in the non-masked regions, e) removing the mask (4) from the phosphorous silicate glass (2), f) again heating for the further diffusion of phosphorous from the phosphorous silicate glass (2) into the silicon as a second doping for creating the highly doped regions (5), g) complete removal of the phosphorous silicate glass (2) from the silicon.

    VERFAHREN UND VORRICHTUNG ZUM VEREINZELN VON WAFERN VON EINEM WAFERSTAPEL
    93.
    发明公开
    VERFAHREN UND VORRICHTUNG ZUM VEREINZELN VON WAFERN VON EINEM WAFERSTAPEL 审中-公开
    方法和装置地分离晶片从晶圆堆叠

    公开(公告)号:EP2229265A1

    公开(公告)日:2010-09-22

    申请号:EP08858959.3

    申请日:2008-12-11

    发明人: HUBER, Reinhard

    IPC分类号: B28D5/00 B65G59/04

    摘要: In a method of separating wafers (12) from a vertical wafer stack (16), the wafers (12) are transported away individually from above via movement means (23) which act from above. The movement means (23) are designed as circulating belts (24), with a suction surface (25) against which the uppermost wafer (12) is made to abut, wherein the abutment of the wafer (12) against the suction surface (25) is enhanced by negative pressure or suction. In order to separate a plurality of wafers (12) located one upon the other, the movement means (23) are subjected to at least one of the following two steps: a) water (30) is jetted with force against the leading edge of the uppermost wafer (12), the water being directed obliquely from beneath the latter b) the movement means (23) guide the wafer (12) over a stripping device (32) which butts against the underside of the moving wafer (12) from beneath and both forces the wafer (12) against the suction surface (25) and generates a braking action thereon. Thereafter, the wafer (12) is moved on to a transporting path (35, 37) in order to be transported on for further processing.

    EINRICHTUNG ZUR BEHANDLUNG VON GEGENSTÄNDEN, INSBESONDERE GALVANISIERUNG FÜR LEITERPLATTEN
    96.
    发明授权
    EINRICHTUNG ZUR BEHANDLUNG VON GEGENSTÄNDEN, INSBESONDERE GALVANISIERUNG FÜR LEITERPLATTEN 有权
    设备技术治疗的对象,尤其是镀锌用于电路板

    公开(公告)号:EP1623057B1

    公开(公告)日:2008-10-15

    申请号:EP04732978.4

    申请日:2004-05-14

    发明人: SCHMID, Christian

    IPC分类号: C25D17/00

    摘要: The invention relates to a plating device equipped with a contact roller (11) that is provided with contact elements (20), said device being used to create electric contacts on a printed circuit board (13). The contact roller (11) comprises a roller body (17) consisting of a soft material. Contact elements (20) comprising outward-facing flat contact surfaces (21) are located on the exterior face of said body. As the contact roller rotates (11) with a certain pressure on the printed circuit board (13), the entire contact surface (21) of the respective contact elements (20) makes contact with the printed circuit board (13).

    EINRICHTUNG ZUR AUFNAHME BZW. HALTERUNG MEHRERER SUBSTRATE UND GALVANISIEREINRICHTUNG
    98.
    发明公开
    EINRICHTUNG ZUR AUFNAHME BZW. HALTERUNG MEHRERER SUBSTRATE UND GALVANISIEREINRICHTUNG 有权
    设备记录或 支持多种基材和电镀

    公开(公告)号:EP1913179A1

    公开(公告)日:2008-04-23

    申请号:EP06776724.4

    申请日:2006-08-09

    发明人: SCHMID, Christian

    IPC分类号: C25D17/00 C25D17/08 C25D7/06

    摘要: In order to treat solar cells (26) in an electroplating device (30), they can be inserted into a grid-like or tray-like picking-up device (11). They are thus mechanically held and electrical contact is made with them via contacts (24). Instead of individual solar cells (26), the picking-up devices (11) are moved with a large number of inserted solar cells through the electroplating device (30) for treatment. Electrical contact is in this case made with the solar cells (26) by means of the contacts (24) and the frame limbs (12, 14) on a projecting angle section (16) together with edge strips (17) of the pick-up. Contact rollers (42) rest on the edge strips and are connected to an electrical power source (44).

    EINRICHTUNG ZUR BEHANDLUNG VON GEGENSTÄNDEN, INSBESONDERE GALVANISIERUNG FÜR LEITERPLATTEN
    99.
    发明公开
    EINRICHTUNG ZUR BEHANDLUNG VON GEGENSTÄNDEN, INSBESONDERE GALVANISIERUNG FÜR LEITERPLATTEN 有权
    设备技术治疗的对象,尤其是镀锌用于电路板

    公开(公告)号:EP1623057A2

    公开(公告)日:2006-02-08

    申请号:EP04732978.4

    申请日:2004-05-14

    发明人: SCHMID, Christian

    IPC分类号: C25D17/00

    摘要: The invention relates to a plating device equipped with a contact roller (11) that is provided with contact elements (20), said device being used to create electric contacts on a printed circuit board (13). The contact roller (11) comprises a roller body (17) consisting of a soft material. Contact elements (20) comprising outward-facing flat contact surfaces (21) are located on the exterior face of said body. As the contact roller rotates (11) with a certain pressure on the printed circuit board (13), the entire contact surface (21) of the respective contact elements (20) makes contact with the printed circuit board (13).

    VORRICHTUNG ZUM TRANSPORT VON FLEXIBLEM FLACHMATERIAL, INSBESONDERE LEITERPLATTEN
    100.
    发明公开
    VORRICHTUNG ZUM TRANSPORT VON FLEXIBLEM FLACHMATERIAL, INSBESONDERE LEITERPLATTEN 有权
    设备运输柔性扁平材料特别是印刷电路板

    公开(公告)号:EP1442646A1

    公开(公告)日:2004-08-04

    申请号:EP02802632.6

    申请日:2002-10-26

    发明人: KAPPLER, Heinz

    IPC分类号: H05K13/00

    CPC分类号: H05K13/0061

    摘要: A transport system for circuit boards (12) in treatment devices (11) is disclosed, which runs the circuit boards (12) between pairs of rollers (20, 21). The pairs of rollers are arranged in roller tracks (17, 18), running parallel to the edge of the circuit board (12) in a narrowly defined boundary region (16). The rollers are arranged with the axes (22) and shafts (23) thereof arranged at an angle (α) relative to the transport direction (14) or the perpendicular (35) thereof, such as to exert a tensile force on the circuit boards in the transverse direction thereof and thus stiffening the same. A transport through the treatment devices, for example galvanisation, etching, cleaning etc, without contact with the useful region (15) of the circuit board (12) is thus possible.