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193 条记录 (耗时 0.018 秒)

    A DEVICE FOR GENERATING X-RAYS HAVING A LIQUID METAL ANODE
    91.
    发明公开
    A DEVICE FOR GENERATING X-RAYS HAVING A LIQUID METAL ANODE 有权
    器具，用于产生的X射线与液态金属阳极

    公开(公告)号：EP1485936A1

    公开(公告)日：2004-12-15

    申请号：EP03743946.0

    申请日：2003-02-19

    申请人： Koninklijke Philips Electronics N.V. ,  Philips Intellectual Property & Standards GmbH

    发明人： HARDING, Geoffrey ,  DOORMANN, Volker ,  DAVID, Bernd

    IPC分类号： H01J35/08 ,  H01J35/18

    CPC分类号： H01J35/18 ,  H01J35/08 ,  H01J2235/082

    摘要： The invention relates to a device for generating X-rays (31). The device has a source (5) for emitting electrons (27) accommodated in a vacuum space (3). The X-rays are emitted by a liquid metal as a result of the incidence of the electrons. The liquid metal flows through a constriction (13) where the electrons emitted by the source impinge upon the liquid metal. The constriction is bounded by a thin window (23), which is made from a material which is transparent to electrons and X-rays and which separates the liquid metal in the constriction from the vacuum space. According to the invention, the constriction (13) has a cross-sectional area which, seen in a main flow direction (X), increases in such a manner that during operation in said direction, a decrease of a flow velocity takes place such that a decrease of a pressure of the liquid metal in the constriction in said direction, caused by viscous flow losses, substantially corresponds with an increase of said pressure in said direction, which is caused by the Bernoulli effect resulting from said increase of the velocity. As a result, the pressure of the liquid metal in the constriction can be maintained at a uniform relatively low level throughout the constriction, so that a uniform and relatively low mechanical load is exerted on the window during operation. In this way, the deformation of the window and the risk of breakage of the window are considerably limited.

    X-RAY TUBE AND MICROELECTRONICS ALIGNMENT PROCESS
    93.
    发明公开
    X-RAY TUBE AND MICROELECTRONICS ALIGNMENT PROCESS 失效
    X射线管和微型电子对准

    公开(公告)号：EP0980583A4

    公开(公告)日：2003-01-29

    申请号：EP97923544

    申请日：1997-05-05

    申请人： NANODYNAMICS INC

    发明人： WANG CHIA-GEE

    IPC分类号： G03F9/00 ,  H01J35/18 ,  H01J35/32 ,  H05G1/06 ,  H05G1/26 ,  H01J35/14

    CPC分类号： G03F9/70 ,  H01J35/18 ,  H01J35/32 ,  H01J2235/087 ,  H01J2235/186 ,  H05G1/06 ,  H05G1/26

    摘要： A compact x-ray tube assembly (9) comprises an evacuated chamber (10) enclosed by a ceramic tubular envelope (11), an attached power supply (12) at one end connected to an emitter (19) inside the chamber, electrostatic means (17) for focusing a beam of electrons on a metal foil target (15), an end window (14) at the other end comprising said target (15), the thickness and composition of the metal foil target and the e-beam energy being selected to generate a microfocused bright beam of x-rays of a preselected energy. The compact assembly is useful in a method for aligning or positioning layers used in the production of microelectronics components.

    X-RAY IRRADIATION APPARATUS INCLUDING AN X-RAY SOURCE PROVIDED WITH A CAPILLARY OPTICAL SYSTEM
    94.
    发明公开
    X-RAY IRRADIATION APPARATUS INCLUDING AN X-RAY SOURCE PROVIDED WITH A CAPILLARY OPTICAL SYSTEM 有权
    X射线源含有X射线照射装置的光学系统毛细血管

    公开(公告)号：EP1044457A1

    公开(公告)日：2000-10-18

    申请号：EP99970783.9

    申请日：1999-09-22

    申请人： Koninklijke Philips Electronics N.V.

    发明人： VAN SPRANG, Hendrik, A.

    IPC分类号： H01J35/00 ,  G21K1/06

    CPC分类号： B82Y10/00 ,  G03F7/70166 ,  G21K1/06 ,  G21K5/04 ,  H01J35/18 ,  H05G1/02

    摘要： Generally known conventional X-ray tubes include a window opening which is covered by an X-ray transparent X-ray window which is usually made of beryllium. A significant absorption of X-rays of comparatively long wavelength, for example of the order of magnitude of from 1 nm to 10 nm, occurs in such windows. According to the invention, a bundle of X-ray conducting capillary tubes (46) is connected to the window opening of the X-ray tube, the other end (48) of the bundle being provided with a very thin X-ray window (50) which seals the interior of the capillary tubes (46), being in vacuum contact with the vacuum space of the X-ray tube, from the environment in a vacuumtight manner.

    High power X-Ray tube
    95.
    发明公开
    High power X-Ray tube 失效
    高功率X射线管

    公开(公告)号：EP0991106A2

    公开(公告)日：2000-04-05

    申请号：EP99123769.4

    申请日：1991-11-21

    申请人： VARIAN ASSOCIATES, INC.

    发明人： Richardson, John E. ,  Boye, James E. ,  Koller, Thomas J.

    IPC分类号： H01J35/16 ,  H01J35/04

    CPC分类号： H01J35/04 ,  H01J35/16 ,  H01J35/18 ,  H01J2235/122 ,  H01J2235/1262 ,  H01J2235/167 ,  H01J2235/168

    摘要： A high power x-ray generating tube (2) for reducing the effects of excessive heating of the window (16) through which the x-rays (16) are transmitted. The x-ray generating tube consists of a metal center section (6) having a stationary cathode (8) and a rotating anode (10). Various embodiments are employed for deflecting secondary electrons back scattered from the anode away from the window to avoid overheating of the window. A grounded anode simplifies the mechanisms required to prevent overheating.

    摘要翻译： 一种高功率X射线发生管（2），用于减少透过X射线（16）的窗口（16）的过度加热的影响。 该X射线发生管由具有固定阴极（8）和旋转阳极（10）的金属中心部分（6）组成。 使用各种实施例来将从阳极反向散射的二次电子偏转离开窗口以避免窗口过热。 阳极接地简化了防止过热所需的机制。

    Means for preventing excessive heating of an X-ray tube window
    96.
    发明公开
    Means for preventing excessive heating of an X-ray tube window 有权
    装置，以避免X射线管的窗口的过热

    公开(公告)号：EP0924742A2

    公开(公告)日：1999-06-23

    申请号：EP98308723.0

    申请日：1998-10-26

    申请人： PICKER INTERNATIONAL, INC.

    发明人： Harris, Jason P. ,  Carlson, Gerard J. ,  Miller, Lester D.

    IPC分类号： H01J35/18

    CPC分类号： H01J35/18 ,  H01J2235/168

    摘要： An x-ray tube includes an envelope (13) defining an evacuated chamber and having a window (30) transmissive to x-rays. An anode assembly and a cathode assembly operate within the envelope to produce x-rays which travel through the window transmissive to x-rays towards a patient or subject under examination. A shield transmissive (32) to x-rays is coupled to the envelope and positioned such that x-rays travelling through the window transmissive to x-rays must first travel through the shield. The shield prevents substantially all secondary electrons created during the production of x-rays from coming into contact with the window transmissive to x-rays thereby preventing excessive heating of the window transmissive to x-rays. An electrode (50) defined by the envelope in a region proximate the window transmissive to x-rays may additionally or alternatively be used to prevent secondary electrons from reaching the window transmissive to x-rays.