摘要:
The invention relates to a miniaturized biaxial piezo actuating device with at least two piezo actuators as well as force-transmitting lever elements and solid body flector joints serving as a, by and large, flat, table-shaped module for micropositioning and controlling the movement of optical, mechanical or other units. According to the invention, an essentially rectangular or quadratic plate (2) for accommodating or fastening the units to be positioned or moved are provided inside a support frame (1). The plate is guided relative to the support frame by means of the solid body flector joints (3-6), and the solid body flector joints each extend in the plate corner area toward the support frame. In addition, at least one piezo actuator (8) is arranged in two axes, which are orthogonal to one another, in the area between the support frame and plate. These piezo actuators, on the movement side, act upon the respectively adjacent, level-like solid body flector joints. The joint located at the intersection of the axes, which are orthogonal to one another, is provided in the form of a double joint for decoupling the piezo actuators, and the joint diagonally opposite the double joint is provided in the form of a compensating joint (7) for reducing the tilting of the plate.
摘要:
The invention relates to a piezoelectric ultrasound motor comprising an oscillator (1) in the form of a piezoelectric plate (11) having a length L and a height H, and one or two friction elements (5) which are arranged on the oscillator and elastically pressed against the friction surface of the part to be displaced. According to the invention, the piezoelectric plate is divided into two identical parts by a cutting plane extending perpendicularly to the large surfaces, at least one of said parts containing an asymmetrical generator (19, 20) which generates an asymmetrical two-dimensional standing wave during the control thereof, in such a way that the friction elements arranged in the centre of the long front side of the plate perform a movement (35) which is inclined in relation to the front side, enabling the kinetic energy to be transferred to the part (3) to be displaced.
摘要:
The invention relates to a method and to a circuit arrangement for the precise, dynamic digital control of especially piezoelectric actuators for micropositioning systems, comprising a regulator, whereby, in order to minimize position order deviations, the future system behavior is estimated and current correction signals for the purpose of feedforward correction are obtained. The aim of the invention is to reduce latency times in the feedforward loop of the scanner system. For this purpose, the signal of the command variable is passed over a switched bypass to a high-resolution digital-to-analog converter, said converter being operated at the scan rate of the scanner system. The feedforward loop leads to a fast digital-to-analog converter which is controlled in a scanner system-independent manner. The output signals of the converters representing the control voltages are added to the device to be controlled, especially they are forwarded to a piezoelectric actuator which together with the position sensor forms the controlled system.