公开(公告)号：EP4428613A1

公开(公告)日：2024-09-11

申请号：EP22887224.8

申请日：2022-10-31

申请人： SHIN-ETSU CHEMICAL CO., LTD.

发明人： KUBOTA, Yoshihiro ,  YANASE, Yu

IPC分类号： G03F1/64 ,  G03F1/84 ,  G03F7/20

CPC分类号： G03F1/64 ,  G03F7/20 ,  G03F1/84

摘要： [Object] To provide a pellicle frame that prevents discharging and generating dust and foreign matter remaining on the frame made during a process of producing the frame, and allows reducing generation of dust and foreign matter additionally generated during travel, store, use, and the like, and even if dust or foreign matter adheres to the frame, allows an easy washing, and a pellicle using the same.
[Solution] The present invention provides a pellicle frame and a pellicle including the pellicle frame. The pellicle frame includes a frame base material made of Ti or Ti alloy and a metal layer laminated on a surface of the frame base material. The metal layer includes one or a plurality of layers, the pellicle frame has a surface that has an outermost surface layer of the metal layer, and when a surface of the outermost surface layer is measured at a magnification of 1200x using a laser microscope compliant to Japanese Industrial Standard B0601, at least an inner surface has a region with an arithmetic mean surface roughness Ra of 0.10 um or less.

公开(公告)号：EP4325290A1

公开(公告)日：2024-02-21

申请号：EP22788153.9

申请日：2022-04-12

申请人： SHIN-ETSU CHEMICAL CO., LTD.

发明人： YANASE, Yu ,  SHIRASAKI, Toru

IPC分类号： G03F1/64 ,  G03F1/66

摘要： Provided are: a pellicle frame laminate 10 characterized by having a first adhesive layer 11 on an upper end surface 1a of a pellicle frame 1 having the upper end surface and a lower end surface and covering the first adhesive layer with a first protection sheet 21 and by having a second adhesive layer 12 on a lower end surface 1b and covering the second adhesive layer with a second protection sheet 22; and a method for manufacturing a pellicle by removing the first protection sheet 21 of the pellicle frame laminate 10 and providing, to the exposed first adhesive layer 11, a pellicle film which has been prepared separately. According to the present invention, by using a pellicle frame in which the adhesive layers are formed on both the upper end surface and lower end surface of the pellicle frame and both surfaces are protected with the protection sheets, it is possible to assemble a pellicle at a place where an adhesive for the pellicle film cannot be applied.

公开(公告)号：EP3470922B1

公开(公告)日：2024-02-07

申请号：EP18196526.0

申请日：2018-09-25

发明人： YANASE, Yu

IPC分类号： G03F1/64

公开(公告)号：EP3470921B1

公开(公告)日：2024-02-07

申请号：EP18196522.9

申请日：2018-09-25

发明人： YANASE, Yu

IPC分类号： G03F1/64

公开(公告)号：EP3707557B1

公开(公告)日：2024-01-24

申请号：EP18796950.6

申请日：2018-11-06

发明人： HOUWELING, Zomer Silvester ,  ANDE, Chaitanya Krishna ,  DE GRAAF, Dennis ,  KATER, Thijs ,  KUIJKEN, Michael Alfred Josephus ,  VALEFI, Mahdiar

IPC分类号： G03F1/62 ,  G03F1/64 ,  G03F7/20

公开(公告)号：EP3667417B1

公开(公告)日：2023-06-28

申请号：EP18843684.4

申请日：2018-08-01

发明人： OKU, Hidehiko ,  HIDE, Ichiro

IPC分类号： G03F1/62 ,  G03F1/64 ,  G03F7/20 ,  C23C16/32 ,  H01L21/02 ,  H01L21/306

公开(公告)号：EP4163719A1

公开(公告)日：2023-04-12

申请号：EP21817765.7

申请日：2021-05-20

申请人： SHIN-ETSU CHEMICAL CO., LTD.

发明人： YANASE, Yu

IPC分类号： G03F1/64 ,  G03F7/20

摘要： Provided are: a frame-shaped pellicle frame 1 having a pellicle frame main body 1a and an insulation layer 1b covering the pellicle frame main body; a pellicle comprising a pellicle film that is provided on the pellicle frame 1 and a top end surface 13 of the pellicle frame with an adhesive or pressure-sensitive adhesive therebetween; a pellicle-equipped exposure original plate; an exposure method; a method for manufacturing a semiconductor; and a method for manufacturing a liquid crystal display board. The pellicle frame can reduce falling of a foreign matter adhered to the surface thereof.

公开(公告)号：EP4139743A1

公开(公告)日：2023-03-01

申请号：EP21714167.0

申请日：2021-03-25

申请人： ASML Netherlands B.V.

发明人： CUSTERS, Kristof ,  DE BRUIJN, Ron, Geeraard, Catharina ,  KRUIZINGA, Matthias ,  SCHIJVENAARS, Lodewijk, Alexander

IPC分类号： G03F1/64

公开(公告)号：EP3486723B1

公开(公告)日：2022-11-23

申请号：EP17827454.4

申请日：2017-06-30

发明人： TAGUCHI Yoshihiro ,  YAMAGUCHI Takayuki ,  YU Jun ,  ISHIWATA Yasuo

IPC分类号： G03F1/64 ,  C22C21/00 ,  C22F1/04 ,  C25D11/04 ,  C25D11/06 ,  C25D11/22 ,  C22F1/00 ,  B22F1/00

公开(公告)号：EP4047674A2

公开(公告)日：2022-08-24

申请号：EP22153622.0

申请日：2022-01-27

申请人： Samsung Display Co., Ltd.

发明人： MOON, Jaesuk ,  KIM, Euigyu ,  YI, Sangmin ,  LEE, Sangshin ,  LEE, Seungjin ,  HONG, Seungju

IPC分类号： H01L51/52 ,  C23C14/04 ,  H01L51/00 ,  G03F1/64

摘要： A display apparatus includes: a first pixel electrode (210R) of a first pixel (OLED1); a second pixel electrode (210G) of a second pixel (OLED3) adjacent to the first pixel, the first and second pixels to emit light of different colors from each other; a first lower emission layer (222ra) on the first pixel electrode; a second lower emission layer (222ga) on the second pixel electrode; a first upper emission layer 222rb) on the first lower emission layer; a second upper emission layer (222gb) on the second lower emission layer; a charge generation layer (224) between the first lower emission layer (222ra) and the first upper emission layer (222rb), and between the second lower emission layer (222ga) and the second upper emission layer (222gb); and a counter electrode (230) extending across the first upper emission layer and the second upper emission layer. The charge generation layer (224) includes first (a) and second parts (b), and electrical conductivities of the first (a) and second parts (b) are different from each other.