公开(公告)号：EP1869479A4

公开(公告)日：2012-06-27

申请号：EP06738613

申请日：2006-03-16

Applicant: FORMFACTOR INC

Inventor： MILLER CHARLES A ,  BARBARA BRUCE J

IPC: G01R31/36 ,  G01R31/02 ,  G01R31/26

CPC classification number: G01R1/36 ,  G01R31/2889

公开(公告)号：EP2041587A4

公开(公告)日：2010-06-16

申请号：EP07797793

申请日：2007-05-25

Applicant: FORMFACTOR INC

Inventor： MILLER CHARLES A

IPC: G01R31/02 ,  G01R31/28

CPC classification number: G01R31/2889 ,  G01R1/07342

公开(公告)号：EP1642145A4

公开(公告)日：2006-08-09

申请号：EP04756506

申请日：2004-06-30

Applicant: FORMFACTOR INC

Inventor： MILLER CHARLES A ,  HREISH EMAD B

IPC: G01R35/00 ,  G01R20060101 ,  G01R1/00 ,  G01R1/073 ,  G01R31/02

CPC classification number: G01R35/00 ,  G01R31/11 ,  G01R31/2886

Abstract: A method of testing a probe card (156) includes the step of positioning the probe card (156) in a prober (152) over a verification wafer (501) that is placed on a stage (159). The probe card (156) is brought in contact with a contact region (503) on the verification wafer (501). The verification wafer (501) includes a shorting plane (502) surrounding the contact region (503). A test signal is sent through the verification wafer (501) to the probe card (156). A response signal from the probe card (156) is received and analyzed.