公开(公告)号：EP0762077A3

公开(公告)日：1998-01-07

申请号：EP96305653.6

申请日：1996-07-31

Applicant: Hewlett-Packard Company

Inventor： Sorin, Wayne V. ,  Heffner, Brian L. ,  Venkatesh, Shalini

IPC: G01B11/06

CPC classification number: G01B11/06

Abstract: In apparatus and a method for measuring the thickness of a film (13), the film (13) is illuminated with a low coherence light signal that is preferably generated from a source (12, 100) including two or more LEDs (102, 103). The light reflected from the surfaces of the film (13) is collected and coupled to an interferometer (18). The slope of the Fourier transform of the output of the signal from the interferometer (18) is measured to provide a determination of the thickness of the film (13). In the preferred embodiment, the interferometer output is sampled at fewer than two points per cycle of the low coherence light signal.

公开(公告)号：EP0772039A2

公开(公告)日：1997-05-07

申请号：EP96307947.0

申请日：1996-11-01

Applicant: Hewlett-Packard Company

Inventor： Heffner, Brian L. ,  Sorin, Wayne V.

IPC: G01N21/47 ,  G01N21/64

CPC classification number: G01N21/645 ,  G01N2021/6484 ,  G11B7/09 ,  G11B7/1384

Abstract: In an apparatus[100, 200, 400, 500] for applying an optical signal to a surface[104,504] and collecting the light leaving the surface[104,504] in response to the application of the optical signal, the optical signal and the collected light traverse an optical fiber[112] having an end proximate to the surface[104,504] which delivers light to the surface[104,504] with the aid of a lens[102, 509] that couples the optical signal to the surface[104,504], collects the light emitted by the surface[104,504], and couples collected light into the optical fiber[112]. A detector[111,404] measures the intensity of light delivered into the optical fiber[112] and generates a detection signal indicative of the measured intensity as a function of time. A set of actuators[120,220,320] dither the position of the lens[102, 509] relative to the proximate end of the fiber. Each actuator operates at a different dither frequency and moves the lens[102, 509] relative to fiber along a different axis. The average position of the lens[102, 509] relative to the proximate end of the fiber along each axis is adjusted so as to maximize the average power detected at the corresponding dither frequency.

Abstract translation: 在响应于光信号的施加而将光信号施加到表面[104,504]并收集离开表面[104,504]的光的装置[100,200,400,500]中，光信号和收集的光 穿过具有接近表面[104,504]的端部的光纤[112]，其借助于将光信号耦合到表面[104,504]的透镜[102,509]将光传递到表面[104,504] 由表面发射的光[104,504]，并将收集的光耦合到光纤[112]中。 检测器[111,404]测量输送到光纤[112]中的光的强度，并产生表示作为时间函数的测量强度的检测信号。 一组致动器[120,220,320]相对于光纤的近端抖动透镜[102,509]的位置。 每个致动器以不同的抖动频率工作，并沿着不同的轴相对于光纤移动透镜[102,509]。 调整透镜[102,509]相对于沿着每个轴的光纤的近端的平均位置，以便使在相应的抖动频率处检测到的平均功率最大化。

公开(公告)号：EP0553460B1

公开(公告)日：1996-11-06

申请号：EP92121214.8

申请日：1992-12-12

Applicant: HEWLETT-PACKARD COMPANY

Inventor： Heffner, Brian L.

IPC: G01M11/00 ,  G01J4/00

CPC classification number: G01M11/334 ,  G01J4/00 ,  G01M11/336 ,  H04B10/2569

公开(公告)号：EP0592187A1

公开(公告)日：1994-04-13

申请号：EP93307902.2

申请日：1993-10-05

Applicant: Hewlett-Packard Company

Inventor： Heffner, Brian L.

IPC: G01J4/04

CPC classification number: G01J4/04

Abstract: A method and an apparatus to re-calibrate a polarimeter (112) without a standard source with known polarization. An input electromagnetic wave (102) is sequentially transformed into many electromagnetic waves, all having substantially the same degree of polarization and at least three of the electromagnetic waves having different states of polarization. All the electromagnetic waves are measured by the polarimeter (112). The method then calculates a calibration factor which, when applied to the measured signals, generates substantially the same calculated degree of polarization for all the electromagnetic waves. A birefringent material, such as a wave-plate (314), can be used to generate the electromagnetic waves from the input electromagnetic wave (102). If the input electromagnetic wave (102) is an optical wave, then loops of optical fibers (104) or an electro-optic material (204), such as a LiNbO₃ crystal, is used as the birefringent material.

Abstract translation: 一种不具有已知极化的标准源重新校准偏振计（112）的方法和装置。 输入电磁波（102）被顺序地变换成许多电磁波，全部具有基本上相同的偏振度，并且至少有三个电磁波具有不同的偏振状态。 所有的电磁波由偏振仪（112）测量。 然后，该方法计算校准因子，其在应用于所测量的信号时，对于所有电磁波产生基本相同的计算的偏振度。 可以使用诸如波片（314）的双折射材料来产生来自输入电磁波（102）的电磁波。 如果输入电磁波（102）是光波，则使用诸如LiNbO 3晶体的光纤（104）或电光材料（204）的环作为双折射材料。

公开(公告)号：EP0536538A2

公开(公告)日：1993-04-14

申请号：EP92115177.5

申请日：1992-09-04

Applicant: Hewlett-Packard Company

Inventor： Heffner, Brian L.

IPC: G01J4/00 ,  G01J4/04 ,  G01M11/00

CPC classification number: G01M11/00 ,  G01J4/04

Abstract: An instrument (8) includes a polarized optical source (9) for producing three sequential predetermined states of polarization of a light beam (ℓ) and an optical polarization meter (10) for measuring the polarization of a portion (Δℓ) of the light beam (ℓ) transmitted by or reflected from an optical network (30,51,52;100) by splitting it into four beams (Δℓa - Δℓd), passing three of the beams (Δℓb - Δℓd) through optical elements, measuring the transmitted intensity of all four beams (Δℓa - Δℓd), and calculating Stokes parameters. The portion (Δℓ) of the light beam (ℓ) enters the optical polarization meter (10) through a single-mode optical fiber (11) that acts as a spatial filter for controlling the position and alignment of the beam with respect to the optical elements (12). The distortion of the light beam polarization caused by this optical fiber is corrected by introducing two different linearly polarized light beams (ℓ₁,ℓ₂) and measuring Stokes parameters which are used to construct a calibration matrix that is inverted and multiplied times measured normalized Stokes parameters of subsequent measurements to yield true Stokes parameters. The three sequential predetermined states of polarization yield three corresponding Jones input vectors, and the Stokes parameters for the responses of the optical network (30,51,52) are converted to three Jones output vectors. A Jones matrix for the optical network (30,51,52) to within a complex constant is then computed from the Jones input and output vectors. Relative polarization sensitivity can be determined from this matrix for the optical network (30,51,52). The relative distortion caused by the optical network (30,51,52) can be corrected by multiplying by the inverse of the matrix during later measurements through the optical network (30,51,52). Additionally, power measurements on the optical network (30,51,52) and a substituted optical through enable absolute determinations and corrections.

Abstract translation: 仪器（8; 8'）包括用于产生光束（P）的三个顺序的预定偏振态的偏振光源（9; 9'）和用于测量光束 由光网络（30,51,52,30'，51'，52'，100）透射或反射的光束（P）的一部分（WP），通过将其分成四个光束（WPa-WPd） 通过光学元件（14-17）通过三个光束（WPb-WPd），测量所有四个光束（WPa-WPd）的透射强度，并计算斯托克斯参数。 光束（P）的部分（WP）通过单模光纤（11）进入光偏振仪（10; 10'），该单模光纤作为空间滤光器，用于控制光束的位置和对准 到所述光学元件（12,14-17）。 通过引入两种不同的线性偏振光（P <5>，P <6>）和测量斯托克斯参数来校正由该光纤（11）引起的光束偏振的变形，该参数用于构建校准矩阵 反演和相乘时间测量后续测量的归一化斯托克斯参数，以产生真实的斯托克斯参数。 三个连续预定的极化状态产生三个对应的琼斯输入向量，光网络（30,51,52,30'，51'，52'，100）的响应的斯托克斯参数被转换成三个琼斯输出向量 。 然后，从琼斯输入和输出向量计算一个复数常数内的光网络（30,51,52,30'，51'，52'，100）的琼斯矩阵。 可以根据光网络（30,51,52,30'，51'，52'，100）的矩阵来确定相对极化灵敏度。 由光网络（30,51,52,30'，51'，52'，100）引起的相对失真可以通过在稍后测量期间通过光网络（30,51,52）乘以矩阵的倒数来校正 ; 30'，51'，52'，100）。 此外，光网络（30,51,52,30'，51'，52'，100）上的功率测量和经过替换的光学通过启用绝对确定和校正。

公开(公告)号：EP0982705A2

公开(公告)日：2000-03-01

申请号：EP99112851.3

申请日：1999-07-02

Applicant: Hewlett-Packard Company

Inventor： Mertz, Pierre H. ,  Heffner, Brian L.

IPC: G09F13/16

CPC classification number: G09F13/16

Abstract: A display[100] that includes an array[12] of reflective pixels, a linear light source[104]; and a reflector[102]. The reflector[102] includes a cylindrical surface, the axis of the cylindrical surface being parallel to the linear light source[104]. The linear light source[104] is positioned relative to the reflector[102] such that light from the linear light source[104] is reflected by the reflector[102] onto the array[12] of reflective pixels. The reflector[102] is constructed from a material that is partially reflecting. The linear light source[104] preferably includes a plurality of light emitting diodes[106] and an optical diffuser[105]. In a color display[100], the light emitting diodes[106] include diodes having different emission spectra. In one embodiment of the invention, the reflector[102] is constructed from a material that reflects light of a first linear polarization while transmitting light having a linear polarization orthogonal to the first linear polarization. In this embodiment, each pixel in the array[12] of reflective pixels preferably includes a polarization rotating cell that rotates the linear polarization vector of light reflected by the pixel in response to the receipt of an electrical signal by the pixel.

Abstract translation: 一个显示器，包括一个反射像素阵列，一个线性光源。 和反射器。 反射器210102包括圆柱形表面，圆柱形表面的轴线平行于线性光源。 线性光源Ä104Ü相对于反射器109102定位，使得来自线性光源Ä104的光被反射器Ä102u反射到反射像素的阵列上。 反射器210102由部分反射的材料构成。 线性光源优选地包括多个发光二极管（10910）和光学扩散器（105）。 在彩色显示器100100中，发光二极管Ä106u包括具有不同发射光谱的二极管。 在本发明的一个实施例中，反射器1020102由反射第一线偏振光的材料构成，同时透射具有与第一线偏振正交的线性偏振的光。 在该实施例中，反射像素阵列中的每个像素优选地包括偏振旋转单元，其响应于像素接收到电信号而旋转由像素反射的光的线偏振矢量。

公开(公告)号：EP0829700A3

公开(公告)日：1998-06-17

申请号：EP97114494.4

申请日：1997-08-21

Applicant: Hewlett-Packard Company

Inventor： Heffner, Brian L. ,  Venkatesh, Shalini ,  Sorin, Wayne V.

IPC: G01B11/06

CPC classification number: G01B11/0675

Abstract: An apparatus[10, 500, 600] and method for measuring the thickness of a film [15, 216, 315, 415] having top and bottom surfaces. The apparatus[10, 500, 600] includes low coherence light source[12] that generates a probe light signal. The film[15, 216, 315, 415] is positioned against a roller[314,460] having a partially reflecting surface that is positioned at a fixed distance from the film[15, 216, 315, 415]. The probe light signal is applied to the film[15, 216, 315, 415] and is then reflected back through the film[15, 216, 315, 415] by the partially reflecting surface. The light leaving the film[15, 216, 315, 415] is collected to form the input to a receiver[18] that determines the time delay between light reflected from the top and bottom surfaces of the film[15, 216, 315, 415]. The receiver output may also be used to determine the thickness of the various layers in a multi-layer film[15, 216, 315, 415].

公开(公告)号：EP0762078A2

公开(公告)日：1997-03-12

申请号：EP96305828.4

申请日：1996-08-08

Applicant: Hewlett-Packard Company

Inventor： Venkatesh, Shalini ,  Heffner, Brian L. ,  Sorin, Wayne V.

IPC: G01B11/06 ,  G01N21/41

CPC classification number: G01N21/41 ,  G01B11/0675

Abstract: Apparatus (10,100) and a method for measuring the thickness of a film (15) having top and bottom surfaces provides a low coherence light source (12) that generates a probe light signal. The film (15) is positioned between first and second reference reflectors, the first reference reflector being partially reflecting. The probe light signal is applied to the film (15) after passing through the first reference reflector. Part of the portion of the probe light signal leaving the film (15) is reflected back toward the first reference reflector by the second reference reflector. The light exiting through the first reference reflector is collected to form the input to a receiver (18) that determines the time delay between light reflected from the top and bottom surfaces of the film (15) as well as the change in optical path length between said first and second reflector (25,26) resulting from the introduction of said film (15) between said first and second reflector (25,26). In the preferred embodiment the receiver (18) is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the combined light signal. Embodiments in which only one of the reference reflectors is utilized provide a means for simplifying the output spectrum from the receiver (18) when multi-layer films (15) are utilized.

Abstract translation: 装置（10,100）和用于测量具有顶面和底面的薄膜（15）的厚度的方法提供了一个低相干光源（12）做基因速率的探测光信号。 膜（15）的第一和第二基准反射器之间定位，所述第一基准反射器是部分反射。 探测光信号穿过第一基准反射之后被施加到薄膜（15）。 探测光信号离开膜（15）的部分的一部分被反射回朝向由第二基准反射器的第一基准反射器。 通过第一基准反射器出射的光被收集，以形成输入到接收器（18）做了确定性地雷从膜（15）的顶表面和底表面反射的光之间的时间延迟以及在它们之间的光路长度的变化 所述第一和第二反射器（25,26）从导入所述第一和第二反射器（25,26）在所述电影（15）得到的。 在优选实施例接收器（18）从光学自相关器或光谱分析仪构建确实包括电路用于提供所述傅里叶变换从合成光信号测得的频域频谱。 其中仅参考反射器之一被用来实施方案中，用于从接收器（18）当多层膜（15）被用于简化的输出谱的手段。

公开(公告)号：EP0762077A2

公开(公告)日：1997-03-12

申请号：EP96305653.6

申请日：1996-07-31

Applicant: Hewlett-Packard Company

Inventor： Sorin, Wayne V. ,  Heffner, Brian L. ,  Venkatesh, Shalini

IPC: G01B11/06

CPC classification number: G01B11/06

Abstract: In apparatus and a method for measuring the thickness of a film (13), the film (13) is illuminated with a low coherence light signal that is preferably generated from a source (12, 100) including two or more LEDs (102, 103). The light reflected from the surfaces of the film (13) is collected and coupled to an interferometer (18). The slope of the Fourier transform of the output of the signal from the interferometer (18) is measured to provide a determination of the thickness of the film (13). In the preferred embodiment, the interferometer output is sampled at fewer than two points per cycle of the low coherence light signal.

Abstract translation: 在用于测量膜（13）的厚度的装置和方法中，用低相干光信号照射膜（13），该低相干光信号优选地从包括两个或更多个LED（102,103）的源（12,100）产生 ）。 从膜（13）的表面反射的光被收集并耦合到干涉仪（18）。 测量来自干涉仪（18）的信号的输出的傅立叶变换的斜率，以提供薄膜（13）的厚度的确定。 在优选实施例中，干涉仪输出在低相干光信号的每个周期以少于两个点采样。

公开(公告)号：EP0553460A2

公开(公告)日：1993-08-04

申请号：EP92121214.8

申请日：1992-12-12

Applicant: HEWLETT-PACKARD COMPANY

Inventor： Heffner, Brian L.

IPC: G01M11/00 ,  G01J4/00

CPC classification number: G01M11/334 ,  G01J4/00 ,  G01M11/336 ,  H04B10/2569

Abstract: An instrument includes a polarized optical source for producing three sequential predetermined states of polarization of a light beam at each of at least two wavelengths, as well as an optical polarization meter for measuring the polarization of a portion of the light beam at each wavelength transmitted by or reflected from an optical network by splitting it into four beams, passing three of the beams through optical elements, measuring the transmitted intensity of all four beams, and calculating Stokes parameters. The three sequential predetermined states of polarization at each wavelength yield three corresponding Jones input vectors at each wavelength, and the Stokes parameters for the responses of the optical network are converted to three Jones output vectors at each wavelength. A Jones matrix for the optical network to within a complex constant is then computed from the Jones input and output vectors at each wavelength. Polarization mode dispersion in the optical network is determined from these matrices.

Abstract translation: 仪器包括用于在至少两个波长中的每一个处产生光束的三个顺序的预定偏振状态的偏振光源，以及用于测量在每个波长处传输的每个波长的一部分光束的偏振的光学偏振仪 或者通过将其分成四个光束从光网络反射，通过三个光束通过光学元件，测量所有四个光束的透射强度，以及计算斯托克斯参数。 在每个波长处的三个顺序预定的偏振状态在每个波长处产生三个对应的Jones输入向量，并且用于光网络的响应的斯托克斯参数被转换成每个波长的三个琼斯输出向量。 然后，从每个波长的Jones输入和输出向量计算用于光网络中的复数常数的Jones矩阵。 从这些矩阵确定光网络中的极化模式色散。