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公开(公告)号：EP3387377A1
公开(公告)日：2018-10-17
申请号：EP16813251.2
申请日：2016-12-09
申请人： InvenSense, Inc.
IPC分类号： G01C19/5747
摘要： A gyroscope includes four drive masses and four sense masses. Each drive mass is adjacent to two other drive masses and opposite the fourth drive mass, and each sense mass is adjacent to two other sense masses and opposite the fourth sense mass. Each drive mass may oscillate in a manner that is perpendicular to its adjacent drive mass and parallel and anti-phase to its opposite mass. The sense motion of the each sense mass may be coupled in a manner that prevents motion due to linear acceleration or angular acceleration.
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公开(公告)号：EP3387450A1
公开(公告)日：2018-10-17
申请号：EP16815949.9
申请日：2016-12-09
申请人： InvenSense, Inc.
IPC分类号： G01P15/125 , G01P21/00 , G01P15/08
CPC分类号： G01P21/00 , B81B2201/0235 , B81C1/00698 , G01P15/125 , G01P2015/0831
摘要： A microelectromechanical (MEMS) sensor, such as an accelerometer, has one more proof masses that respond to movement of the sensor, the movement of which is measured based on a distance between the one or more proof masses and on one or more sense electrodes. The accelerometer also has a plurality of auxiliary electrodes and a signal generator configured to apply an auxiliary signal having a first harmonic frequency to the plurality of auxiliary electrodes. Circuitry receives a sensed signal from the plurality of sense electrodes and identifies a portion of the sensed signal having the first harmonic frequency. Based on this identified portion of the sensed signal, the circuitry determines whether a residual voltage is present on the one or more proof masses or on the one or more sense electrodes, and the circuitry modifies the operation of the accelerometer when the residual voltage is determined to be present in order to compensate for the residual voltage.
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