-
11.发明公开GRAIN GROWTH OF ELECTRICAL INTERCONNECTION FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) 有权晶粒长大过程用于生产微机电系统的电连接器（MEMS）
公开(公告)号：EP1244900A1
公开(公告)日：2002-10-02
申请号：EP01900885.3
申请日：2001-01-05
申请人： ROSEMOUNT INC.
IPC分类号： G01L9/12
CPC分类号： G01L9/0075 , B81B7/0006
摘要： An isolated connection is formed by growing interconnects from the grain growth of an electrically conductive grain growth material (16) inside an MEMS device (10) after the device (10) is bonded together. The material used for grain growth of electrical contacts is deposited inside a cavity (18) formed between first (12) and second layers (12) of the device (10).
-
公开(公告)号：EP1181518B1
公开(公告)日：2005-11-02
申请号：EP00928951.3
申请日：2000-05-11
申请人： ROSEMOUNT INC.
CPC分类号： G01L9/0075 , G01L9/0072 , G01L9/125 , G01L13/025
-
公开(公告)号：EP1254357A1
公开(公告)日：2002-11-06
申请号：EP01907147.1
申请日：2001-02-09
申请人： ROSEMOUNT INC.
CPC分类号： G01L9/0007 , G01L9/0055 , G01L9/0072 , G01L9/0073 , G01L9/0075 , G01L9/0076 , G01L11/02 , G01L13/026
摘要： A pressure sensor (10) configured to sense an applied pressure, comprising a diaphragm support structure (12), a diaphragm (16A, B) coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member (20) coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element (34) coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.
-
公开(公告)号：EP1254356A1
公开(公告)日：2002-11-06
申请号：EP01907145.5
申请日：2001-02-09
申请人： Rosemount, Inc.
IPC分类号： G01L9/00
CPC分类号： G01L9/0007 , G01L9/0055 , G01L9/0072 , G01L9/0073 , G01L9/0075 , G01L9/0076 , G01L11/02 , G01L13/026
摘要： A pressure sensor (10) is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member (12) having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms (16A, 16B) are the movement of a moveable member (20). The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.
-
15.发明公开
公开(公告)号：EP1203212A1
公开(公告)日：2002-05-08
申请号：EP00952583.3
申请日：2000-08-07
申请人： ROSEMOUNT INC.
IPC分类号： G01L15/00
CPC分类号： G01L15/00 , Y10T137/87249
摘要： A pressure transmitter (24, 26, 28, 100) with first and second absolute pressure sensors (120, 124) receives process pressures from corresponding first and second process inlets (122, 126). A transmitter circuit (128) coupled to the first and second absolute pressure sensors (120, 124) generates a differential pressure type output (104). A third absolute pressure sensor (140) coupled to the transmitter circuit (128) receives atmospheric pressure (P3) from a third inlet (116). The transmitter circuit (128) generates a second type of transmitter output that can be a gage or absolute pressure type. Single crystal sapphire pressure sensors are preferred to provide enough accuracy for measuring accurately over 200:1 pressure range.
-
公开(公告)号：EP1181518A1
公开(公告)日：2002-02-27
申请号：EP00928951.3
申请日：2000-05-11
申请人： ROSEMOUNT INC.
CPC分类号： G01L9/0075 , G01L9/0072 , G01L9/125 , G01L13/025
摘要： A device and method provide for improved error compensation in the measurement of process pressure. The device and method are able to compensate for diaphragm deformation (offset) and varying dielectric constants present in a process field environment. The pressure sensor (56), filled with a dielectric fill-fluid (95), includes at least three capacitor plates (144, 146, 148, 150), disposed about a diaphragm (102). At least two capacitor plates (144, 146) are placed on one side of a conductive diaphragm (102), and one capacitor plate (148, 150) is placed on the other side of the diaphragm (102). The method compensates for both diaphragm offset and variances in the dielectric constant of the fill-fluid (95). An error compensated measurement of differential pressure is a function of the amount of diaphragm deflection detected at the edge region (194) subtracted from the amount of diaphragm deflection detected at the center region (140). One way of measuring diaphragm deflection is to measure the changes in capacitances from two capacitors on each side of the diaphragm (102), and to combine these values to achieve an error compensated output (R) representative of the applied differential pressure.
-
-
-
-
-
搜索结果
16 条记录 (耗时 0.014 秒)
