摘要:
A low range pressure sensor (10) includes a base plate of brittle material (12), and a diaphragm plate assembly (14) mounted on the base plate (12) and sealed around a periphery (16) to the base plate (12). Pressures are introduced to cause a center diaphragm section (18) to deflect toward the base plate (12), and the deflection of the diaphragm (18) is sensed through strain gauges (32) to provide an indication of the pressure. The diaphragm (18) is provided with a plurality of individual support posts (36) on a side facing the base plate (12), so that when the diaphragm (18) is deflected toward the base plate (12) under high overpressures the support posts (36) will support the diaphragm (18) against movement to avoid failure or breakage of the diaphragm (18). The number of support posts (36) can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer (40) of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts (36) as they touch the surface of the base plate (12) to reduce stress buildup in the diaphragm (18) as the overpressure increases.
摘要:
A crimping system for a fill tube of an industrial process transmitter system comprises a collar, a fill tube and crimp jaws. The collar comprises a passageway for receiving the fill tube, and a seat surrounding the passageway. The fill tube extends through the passageway and seat of the collar. The crimp jaws are positioned within the seat to surround the fill tube, and are inserted into the seat to crimp the fill tube.
摘要:
A low range pressure sensor (10) includes a base plate of brittle material (12), and a diaphragm plate assembly (14) mounted on the base plate (12) and sealed around a periphery (16) to the base plate (12). Pressures are introduced to cause a center diaphragm section (18) to deflect toward the base plate (12), and the deflection of the diaphragm (18) is sensed through strain gauges (32) to provide an indication of the pressure. The diaphragm (18) is provided with a plurality of individual support posts (36) on a side facing the base plate (12), so that when the diaphragm (18) is deflected toward the base plate (12) under high overpressures the support posts (36) will support the diaphragm (18) against movement to avoid failure or breakage of the diaphragm (18). The number of support posts (36) can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer (40) of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts (36) as they touch the surface of the base plate (12) to reduce stress buildup in the diaphragm (18) as the overpressure increases.
摘要:
A pressure sensor (100, 222) integrally formed in the shape of a beam (102) around a central channel. The beam (102) has an integral blind end (104) that is pressurized by the fluid. The beam has an opposite end (106) that is shaped to provide a stepped corner (107) with a gap (108) opening at the base of the stepped corner (107), where the gap (108) and isolated from the fluid. A sensing film (112) in the channel adjacent the blind end (104) has an electrical parameter that varies with pressure and electrical leads (110) that extend from the channel and out the gap. A seal (115) fills the gap (108) around the leads (110) and the seal (115) fills a portion of the stepped corner (107). The sensor (100) is preferably formed by direct bonding of single crystal alumina layers (114, 116). Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
摘要:
A pressure sensor (10) is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member (12) having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms (16A, 16B) are the movement of a moveable member (20). The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.
摘要:
An isolated connection is formed by growing interconnects from the grain growth of an electrically conductive grain growth material (16) inside an MEMS device (10) after the device (10) is bonded together. The material used for grain growth of electrical contacts is deposited inside a cavity (18) formed between first (12) and second layers (12) of the device (10).
摘要:
An isolated connection is formed by growing interconnects from the grain growth of an electrically conductive grain growth material (16) inside an MEMS device (10) after the device (10) is bonded together. The material used for grain growth of electrical contacts is deposited inside a cavity (18) formed between first (12) and second layers (12) of the device (10).
摘要:
A pressure sensor (100, 222) integrally formed in the shape of a beam (102) around a central channel. The beam (102) has an integral blind end (104) that is pressurized by the fluid. The beam has an opposite end (106) that is shaped to provide a stepped corner (107) with a gap (108) opening at the base of the stepped corner (107), where the gap (108) and isolated from the fluid. A sensing film (112) in the channel adjacent the blind end (104) has an electrical parameter that varies with pressure and electrical leads (110) that extend from the channel and out the gap. A seal (115) fills the gap (108) around the leads (110) and the seal (115) fills a portion of the stepped corner (107). The sensor (100) is preferably formed by direct bonding of single crystal alumina layers (114, 116). Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.