公开(公告)号：EP1216837A1

公开(公告)日：2002-06-26

申请号：EP01310421.1

申请日：2001-12-13

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Lee, Sang-wook ,  Oh, Yong-soo ,  Kim, Hyeon-cheol

IPC分类号： B41J2/16

CPC分类号： B41J2/14137 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/1437

摘要： A method for manufacturing an ink-jet printhead having a hemispherical ink chamber is provided. A nozzle plate (120) is formed on the surface of substrate (110). A ring-shaped heater (130) is formed on the nozzle plate. A manifold (112) for supplying ink is formed by etching the substrate. An electrode (150) is formed on the nozzle plate to be electrically connected to the heater. A nozzle (122), through which ink will be ejected, is formed by etching the nozzle plate inside the heater to have a diameter smaller than the diameter of the heater. A groove (124) for forming an ink channel is formed to expose the substrate by etching the nozzle plate so that the groove extends from the outside of the heater toward the manifold. An ink chamber is formed to have a diameter greater than the diameter of the heater and be almost hemispherical by etching the substrate exposed by the nozzle. An ink channel is formed to connect the ink chamber and the manifold by isotropically etching the substrate exposed by the groove. The groove is closed by forming a first material layer (180) on the nozzle plate. Here, the first material layer is introduced to prevent ink from leaking out through the groove and may be a silicon nitride layer or a silicon oxide layer.

摘要翻译： 提供一种用于制造具有半球形墨水室的喷墨打印头的方法。 在基板（110）的表面上形成喷嘴板（120）。 在喷嘴板上形成环状加热器（130）。 用于供应墨水的歧管（112）通过蚀刻基底而形成。 电极（150）形成在喷嘴板上以电连接到加热器。 通过将加热器内部的喷嘴板蚀刻成具有小于加热器直径的直径，形成通过其喷射墨水的喷嘴（122）。 形成用于形成油墨通道的槽（124）形成为通过蚀刻喷嘴板而使基板暴露，使得槽从加热器的外部朝向歧管延伸。 形成油墨室，其直径大于加热器的直径，并且通过蚀刻由喷嘴暴露的基板而几乎为半球形。 形成油墨通道，通过各向同性蚀刻由凹槽暴露的基材来连接油墨室和歧管。 通过在喷嘴板上形成第一材料层（180）来封闭凹槽。 这里，引入第一材料层以防止墨通过凹槽泄漏出来，并且可以是氮化硅层或氧化硅层。