Abstract:
A head chip (51A) according to an aspect of the present disclosure includes an ejection section (61, 62), a jet hole plate (53), a return plate (52), a flow channel plate (120), and a protective film (125). A communication channel (110) includes an upstream opening (115) communicated with a channel opening which opens toward a first side in a first direction in a jet channel, a downstream opening (116) communicated with a manifold opening which opens toward the first side in the first direction in the manifold (123), and a connecting part (117) which extends in a third direction, and which is configured to connect the upstream opening and the downstream opening to each other. The return plate is bonded to the ejection section so that at least a part of an opening edge (115a-d) in the upstream opening is arranged at an outer side when viewed from the first direction with respect to an opening edge (71c, 71d) of the channel opening.
Abstract:
A liquid ejecting head (1) includes a flow channel forming substrate (10) that is provided with a space constituting a pressure generating chamber (12) which communicates with nozzle openings (21), a vibration plate (50) that is stacked on one surface of the flow channel forming substrate and seals the space, and a piezoelectric element (300) that includes a first electrode (60), a piezoelectric layer (70), and a second electrode (80) sequentially stacked on a surface of the vibration plate opposite to the flow channel forming substrate, in which the first electrode is formed, in which at least a width of a first direction along the opposite surface is narrower than the space in a region corresponding to the space, the piezoelectric layer is stacked so as to overlap the first electrode and at least a part of the vibration plate in the region corresponding to the space, the second electrode is stacked so as to overlap the piezoelectric layer in the region corresponding to the space, and as a thickness of a stacked direction of the piezoelectric element is a thickness of the piezoelectric layer, a first thickness (D1) of the piezoelectric layer of a part positioned on the first electrode and a second thickness (D2) of the piezoelectric layer of a part positioned on the vibration plate satisfy a relationship of the first thickness (D1) > the second thickness (D2).
Abstract:
An inkjet printhead assembly comprising an ink supply manifold: printhead integrated circuits and a connector film for supplying power to drive circuits in the printhead integrated circuits. Each prithead integrated circuit has a frontside comprising the drive e circuitry and inkjet nozzle assemblies, a backside attached to the ink supply manifold, and ink supply channels providing fluid communication between the backside and the inkjet nozzle assemblies. A connection end of the connector film is sandwiched between part of the ink supply manifold and the printhead integrated circuits.
Abstract:
When a film containing constituent elements of a target is formed on a substrate through a vapor deposition technique using plasma with placing the substrate and the target to face each other, film formation is carried out with controlling variation of plasma potential Vs (V) in a plasma space in an in-plane direction of the substrate to be within ±10V at a distance of 2-3 cm from a surface of the target toward the substrate.
Abstract:
A method for processing a silicon substrate includes providing a combination of a first silicon substrate, a second silicon substrate, and an intermediate layer including a plurality of recessed portions, which is provided between the first silicon substrate and the second silicon substrate, forming a first through hole that goes through the first silicon substrate by executing etching of the first silicon substrate on a surface of the first silicon substrate opposite to a bonding surface with the intermediate layer by using a first mask, and exposing a portion of the intermediate layer corresponding to the plurality of recessed portions of the intermediate layer, forming a plurality of openings on the intermediate layer by removing a portion constituting a bottom of the plurality of recessed portions, and forming a second through hole that goes through the second silicon substrate by executing second etching of the second silicon substrate by using the intermediate layer on which the plurality of openings are formed as a mask.
Abstract:
A piezoelectric device includes a first substrate that includes a piezoelectric element (32) provided in a first region where bending deformation is allowed and an electrode layer (39) electrically connected to the piezoelectric element (32), a second substrate in which a bump electrode (43) abutting and conducting the electrode layer (39), and having elasticity is formed, and which is disposed so as to face the piezoelectric element (32) with a predetermined space, and adhesive (43) that bonds the first substrate and the second substrate in a state where a distance between the first substrate and the second substrate is maintained. The adhesive (43) has a width in a center portion in a height direction relative to a surface of the first substrate or the second substrate greater than a width in end portions in the same direction.
Abstract:
An ink jet head (10) includes a base (15), walls (18) attached to the base and defining flow paths (51,52) between the walls, the flow paths including first and second flow paths alternating with one another, a nozzle plate (16) comprising openings (25), each of which communicates with one of the first flow paths, an ink supply unit (12) fluidly coupled to the first flow paths, electrodes (28) on side surfaces of the walls, first and second wirings (35), each extending along the base and each being individually connected to one of the electrodes, a plurality of first protective layers (54) on the base, the first wiring extending between a first pair of the first protective layers and the second wiring extending between a second pair of the first protective layers, and a second protective layer (56) comprising an electrically insulating layer covering the first protective layers and the first and second wirings.
Abstract:
The present disclosure is drawn to a thermal inkjet printhead stack with an amorphous metal resistor, including an insulated substrate and a resistor applied to the insulated substrate. The resistor can include from 5 atomic % to 90 atomic % of a metalloid of carbon, silicon, or boron; and from 5 atomic % to 90 atomic % each of a first and second metal of titanium, vanadium, chromium, cobalt, nickel, zirconium, niobium, molybdenum, rhodium, palladium, hafnium, tantalum, tungsten, iridium, or platinum, where the second metal is different than the first metal. The metalloid, the first metal, and the second metal can account for at least 70 atomic % of the amorphous thin metal film.