摘要:
A valve control apparatus including a stepping motor coupled to a valve and a motor control unit for controlling the stepping motor is provided. The motor control unit includes a motor control section for applying drive pulses to the pulse motor, a counting section for counting the number of drive pulses applied to the pulse motor, a voltage-drop detecting section for detecting a voltage drop of a drive power supply for the motor control section, and a writing section for writing a count from the counting section in a nonvolatile memory if the voltage-drop detecting section detects the voltage drop.
摘要:
Provided are a rotary joint that is capable of inexpensively coping with an increase and decrease in chemical liquid etc. used and that can be reduced in production costs etc. and in a time period required for its production, and housing segment bodies for the rotary joint. The rotary joint has a substantially circular column-like shaft body (3), shaft body flow holes (15a, 15b, 15c, 15d) formed in the shaft body (3) and having openings in the side face of the shaft body (3); a housing (7) having in it an insertion hole (5) into which the shaft body (3) is relatively rotatably inserted; housing segment bodies (25, 25, 27a, 27b, 27c, 27d) that are segments divided in the housing (7) so as to be laid out in the direction of the center axis (C) of the shaft body (3); a housing flow hole (51) for communicating the shaft body flow holes (15a, 15b, 15c, 15d) and the outside of the housing (7); an annular groove (49) for communicating the shaft body flow holes (15a, 15b, 15c, 15d) and the housing flow hole (51); and an annular-like leakage prevention member (43) for blocking the movement of fluid in the center axis (C) direction, between the shaft body (3) and the housing (7).
摘要:
There is provided a method and device for producing an absolute pressure type pressure sensor that enables a relative pressure type pressure sensor to be modified (converted) into an absolute pressure type pressure sensor in a simple and easy manner. The method is characterized by comprising: a step of arranging a relative pressure type pressure sensor, that has a reference pressure chamber therein, and a pressure guide hole whose one end communicates with the reference pressure chamber and the other end opens to the atmosphere, inside a vacuum chamber with the other end of the pressure guide hole opening upward; a step of placing a solder piece onto the other end of the pressure guide hole; a step of drawing a vacuum inside the vacuum chamber; and a step of heating the solder piece until the solder melts.
摘要:
A fluid apparatus unit structure is provided that can be applied to a use in which a chemical fluid is removed as necessary while chemical fluid circulation and water circulation are being carried out, a fluid such as a chemical fluid does not readily solidify therein, and the fluid apparatus unit structure is compact. In the fluid apparatus unit structure (FU) that groups together and integrates plural fluid apparatus components that are connected via a flow path into a base member (10), a linked flow path (15), which links an adjacent air pressure control valve (20A) and a manual control valve (30A) that form a first chemical fluid discharge path that carries out chemical fluid circulation, is offset from the axial center of the fluid apparatus components.
摘要:
In a back-pressure responsive valve that receives large back pressure, the influence or the back pressure is minimized to limit or prevent an increase in size of an actuator and to maintain the valve function. A back-pressure responsive value (1A) includes a plug-type valve element (10A) that moves up and down in a valve chamber (2) to open and close a fluid channel (3), an urging part that holds the valve element (10A) in one of a fully closed position or a fully open position, an opening/closing mechanism that opens and closes the valve element (10A) with an operating force larger than that of the urging part, and a diaphragm (8) connected to a shaft (12) of the valve element (10A) and receiving back pressure from the fluid in the fully closed position of the valve element (10A), wherein the diameter of the valve element (10A) is set smaller at a diaphragm (8)-size base portion connected to the shaft (12) than at a valve-seat (7)-side end portion (11).
摘要:
A fluidic device unit structure in which a plurality of fluidic devices are integrated and which is effective in reducing a footprint is provided. With a fluidic device unit structure in which a plurality of fluidic devices that are connected by channels are integrated in a base member 10 in parallel, the base member 10, which has a plurality of mounting surfaces 11 on which pure-water opening and closing valves 5 are mounted, includes a pure-water circulation supply line 2 that passes through the base member 10 and that is connected in parallel to the pure-water opening and closing valves 5 via pure-water branch channels 4.