VALVE CONTROL APPARATUS AND FLOW VOLUME CONTROLLER

    公开(公告)号:EP2017513A4

    公开(公告)日:2017-12-06

    申请号:EP07742922

    申请日:2007-05-08

    摘要: A valve control apparatus including a stepping motor coupled to a valve and a motor control unit for controlling the stepping motor is provided. The motor control unit includes a motor control section for applying drive pulses to the pulse motor, a counting section for counting the number of drive pulses applied to the pulse motor, a voltage-drop detecting section for detecting a voltage drop of a drive power supply for the motor control section, and a writing section for writing a count from the counting section in a nonvolatile memory if the voltage-drop detecting section detects the voltage drop.

    ROTARY JOINT AND HOUSING SEGMENTS OF ROTARY JOINT
    15.
    发明公开
    ROTARY JOINT AND HOUSING SEGMENTS OF ROTARY JOINT 有权
    旋转和住房分割体。转椅

    公开(公告)号:EP1832795A4

    公开(公告)日:2009-01-21

    申请号:EP05820358

    申请日:2005-12-20

    IPC分类号: F16L27/08 F16J15/18

    CPC分类号: F16L39/06

    摘要: Provided are a rotary joint that is capable of inexpensively coping with an increase and decrease in chemical liquid etc. used and that can be reduced in production costs etc. and in a time period required for its production, and housing segment bodies for the rotary joint. The rotary joint has a substantially circular column-like shaft body (3), shaft body flow holes (15a, 15b, 15c, 15d) formed in the shaft body (3) and having openings in the side face of the shaft body (3); a housing (7) having in it an insertion hole (5) into which the shaft body (3) is relatively rotatably inserted; housing segment bodies (25, 25, 27a, 27b, 27c, 27d) that are segments divided in the housing (7) so as to be laid out in the direction of the center axis (C) of the shaft body (3); a housing flow hole (51) for communicating the shaft body flow holes (15a, 15b, 15c, 15d) and the outside of the housing (7); an annular groove (49) for communicating the shaft body flow holes (15a, 15b, 15c, 15d) and the housing flow hole (51); and an annular-like leakage prevention member (43) for blocking the movement of fluid in the center axis (C) direction, between the shaft body (3) and the housing (7).

    METHOD AND DEVICE FOR PRODUCING ABSOLUTE PRESSURE-TYPE PRESSURE SENSOR
    16.
    发明公开
    METHOD AND DEVICE FOR PRODUCING ABSOLUTE PRESSURE-TYPE PRESSURE SENSOR 审中-公开
    方法和设备用于生产绝对传感器

    公开(公告)号:EP1764598A4

    公开(公告)日:2007-12-05

    申请号:EP05751449

    申请日:2005-06-16

    发明人: TAKADA AKIRA

    IPC分类号: G01L9/00

    CPC分类号: G01L9/0051 G01L9/0055

    摘要: There is provided a method and device for producing an absolute pressure type pressure sensor that enables a relative pressure type pressure sensor to be modified (converted) into an absolute pressure type pressure sensor in a simple and easy manner. The method is characterized by comprising: a step of arranging a relative pressure type pressure sensor, that has a reference pressure chamber therein, and a pressure guide hole whose one end communicates with the reference pressure chamber and the other end opens to the atmosphere, inside a vacuum chamber with the other end of the pressure guide hole opening upward; a step of placing a solder piece onto the other end of the pressure guide hole; a step of drawing a vacuum inside the vacuum chamber; and a step of heating the solder piece until the solder melts.

    FLUID DEVICE UNIT STRUCTURE
    17.
    发明公开
    FLUID DEVICE UNIT STRUCTURE 审中-公开
    EINHEITENSTRUKTURFÜREINEFLÜSSIGKEITSVORRICHTUNG

    公开(公告)号:EP2149730A4

    公开(公告)日:2017-06-21

    申请号:EP08764346

    申请日:2008-05-19

    发明人: IGARASHI HIROKI

    IPC分类号: F16K27/00

    CPC分类号: F16K27/003 Y10T137/87249

    摘要: A fluid apparatus unit structure is provided that can be applied to a use in which a chemical fluid is removed as necessary while chemical fluid circulation and water circulation are being carried out, a fluid such as a chemical fluid does not readily solidify therein, and the fluid apparatus unit structure is compact. In the fluid apparatus unit structure (FU) that groups together and integrates plural fluid apparatus components that are connected via a flow path into a base member (10), a linked flow path (15), which links an adjacent air pressure control valve (20A) and a manual control valve (30A) that form a first chemical fluid discharge path that carries out chemical fluid circulation, is offset from the axial center of the fluid apparatus components.

    摘要翻译: 本发明提供一种流体装置单元结构,该流体装置单元结构能够应用于在进行化学流体循环和水循环,化学流体等流体难以固化的同时根据需要去除药液的用途, 流体设备单元结构紧凑。 在将经由流路与基座构件(10)连接的多个流体设备构成要素组合并一体化的流体设备单元结构(FU)中,连结流路(15),该连结流路将相邻的气压控制阀 形成进行化学液循环的第一药液排出路径的手动控制阀(20A)和手动控制阀(30A)从流体设备部件的轴心偏移。

    BACK PRESSURE RECEIVING VALVE
    18.
    发明公开
    BACK PRESSURE RECEIVING VALVE 审中-公开
    ABSPERRVENTIL

    公开(公告)号:EP2199649A4

    公开(公告)日:2017-04-05

    申请号:EP08838190

    申请日:2008-10-02

    发明人: IGARASHI HIROKI

    摘要: In a back-pressure responsive valve that receives large back pressure, the influence or the back pressure is minimized to limit or prevent an increase in size of an actuator and to maintain the valve function. A back-pressure responsive value (1A) includes a plug-type valve element (10A) that moves up and down in a valve chamber (2) to open and close a fluid channel (3), an urging part that holds the valve element (10A) in one of a fully closed position or a fully open position, an opening/closing mechanism that opens and closes the valve element (10A) with an operating force larger than that of the urging part, and a diaphragm (8) connected to a shaft (12) of the valve element (10A) and receiving back pressure from the fluid in the fully closed position of the valve element (10A), wherein the diameter of the valve element (10A) is set smaller at a diaphragm (8)-size base portion connected to the shaft (12) than at a valve-seat (7)-side end portion (11).

    摘要翻译: 在受到大背压的背压响应阀中,影响或背压被最小化以限制或防止致动器的尺寸增大并保持阀功能。 背压响应值(1A)包括在阀室(2)内上下移动而开闭流体通路(3)的插塞式阀芯(10A),将阀芯 (10A)的全开位置或完全打开位置中的任意一个位置;开闭机构,其以比所述施力部的操作力大的操作力开闭所述阀体(10A);以及隔膜(8) 与阀件(10A)的轴(12)连接并在阀件(10A)的完全关闭位置接收来自流体的背压,其中阀件(10A)的直径在隔膜(10A) 8)的基部与轴(12)连接的部分大于在阀座(7)侧的端部(11)处的基部。

    FLUID DEVICE UNIT STRUCTURE
    20.
    发明公开
    FLUID DEVICE UNIT STRUCTURE 有权
    流体设备单元结构

    公开(公告)号:EP2025981A4

    公开(公告)日:2012-10-24

    申请号:EP07741928

    申请日:2007-04-19

    发明人: IGARASHI HIROKI

    IPC分类号: F16K27/00 F17D1/08

    摘要: A fluidic device unit structure in which a plurality of fluidic devices are integrated and which is effective in reducing a footprint is provided. With a fluidic device unit structure in which a plurality of fluidic devices that are connected by channels are integrated in a base member 10 in parallel, the base member 10, which has a plurality of mounting surfaces 11 on which pure-water opening and closing valves 5 are mounted, includes a pure-water circulation supply line 2 that passes through the base member 10 and that is connected in parallel to the pure-water opening and closing valves 5 via pure-water branch channels 4.