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    SCANNING ENDOSCOPE
    12.
    发明公开
    SCANNING ENDOSCOPE 审中-公开
    扫描内窥镜

    公开(公告)号：EP2796084A1

    公开(公告)日：2014-10-29

    申请号：EP12860839.5

    申请日：2012-12-13

    Applicant: Olympus Corporation

    Inventor： NISHIMURA, Junichi

    IPC: A61B1/04 ,  A61B1/00 ,  A61B1/06

    CPC classification number: G01J1/0403 ,  A61B1/00009 ,  A61B1/00096 ,  A61B1/00172 ,  A61B1/045 ,  A61B1/07 ,  G01J1/0425 ,  G01J1/08

    Abstract: Observation is performed using a clear image such that halation is prevented from occurring on an image generated due to light with strong intensity such as regular reflection light on the surface of an object. There is provided a scanning endoscope (1) including an optical scanning unit (10) in which an angle at which illumination light is emitted from a leading edge of an insertion portion (2) is changed to scan the emitted illumination light on an object, a plurality of light receiving portions (13) which is circumferentially spaced apart at the leading edge of the insertion portion 2 and receives return light returning from the object as a result of the optical scanning unit (10) scanning the illumination light, a light detection unit (14) that detects the intensity of the return light received by the light receiving portion (13), a return light selection unit (15) that selects the return light whose intensity, which is detected by the light detection unit (14), is equal to or smaller than a predetermined threshold, and a storage unit (5) that stores the intensity of the return light selected by the return light selection unit (15) in association with the position where the optical scanning unit (10) scans the illumination light.

    Abstract translation: 使用清晰的图像进行观察，从而防止在由物体表面上的诸如规则反射光的具有强烈强度的光产生的图像上发生晕影。 提供一种包括光学扫描单元（10）的扫描内窥镜（1），其中改变从插入部分（2）的前缘发射照明光的角度以扫描物体上发射的照明光， 多个受光部（13），该受光部在插入部2的前端沿周向间隔开，并且通过光扫描部（10）扫描照明光而接收从被拍摄体返回的返回光;光检测部 检测由所述受光部接收到的返回光的强度的单元;选择由所述光检测单元检测出的强度的返回光的返回光选择单元; 等于或小于预定阈值;以及存储单元（5），其将由返回光选择单元（15）选择的返回光的强度与光学扫描单元 单元（10）扫描照明光。

    DISPOSITIF DE FORMATION D'UN RESEAU D'INTERFERENCES SUR UN ECHANTILLON.
    14.
    发明公开
    DISPOSITIF DE FORMATION D'UN RESEAU D'INTERFERENCES SUR UN ECHANTILLON. 审中-公开
    DEVICE FOR形成网格干扰在样本

    公开(公告)号：EP2661612A1

    公开(公告)日：2013-11-13

    申请号：EP11813417.0

    申请日：2011-12-21

    Applicant: Centre National de la Recherche Scientifique

    Inventor： LONGEAUD, Christophe

    IPC: G01J1/08

    CPC classification number: G02B26/0816 ,  G01J1/08 ,  Y02E10/52

    Abstract: The invention relates to a device for forming an interference grating on a sample, the device comprising a laser emitting a light beam of wavelength lambda, a beam splitter plate splitting the beam emitted by the laser into first and second beams (11, 14), the first beam (11) being deflected in a first direction, a first stationary deflection mirror for deflecting the first beam onto a point P of the sample at a first constant angle of incidence theta1, and at least one second stationary deflection mirror for deflecting the second beam along a final path (17) that reaches said point P of the sample at a second angle of incidence theta2 in order to form an interference grating on the sample at a pitch that depends on the angular difference theta between the first and second angles of incidence theta1 and theta2, the path of the second beam being characterized in that it includes a movable deflection mirror (7, 7') to direct and deflect the second beam from a plurality of first points of impact (71) from which the second beam (15) is directed towards a plurality of second points of impact (82) on a said second mirror (8, M2), thereby forming a plurality of pairs, each comprising first and second points of impact (71, 82), each of which corresponding to a said final path (17) of the second beam having a different value of the angle theta2, so as to cause the value of the angle of incidence theta2 to vary and thus vary the angular difference theta, and in that the first points of impact (71) are arranged on a linear or parabolic path extending from an upstream end remote from the sample where it is spaced apart from the direction of the beam (10) that is emitted by the laser in a direction opposite to the first direction and thus away from the segment (12) of the first beam that impacts said point P of the sample (ECH), said linear or parabolic path being reentrant towards said segment (12) of the first beam on going towards a downstream end closer to the sample (ECH) so as to compensate at least in part for optical path length variations of the second beam for the pairs of first and second points of impact (71, 82), each of which corresponds to a respective value of the angular difference theta.

    Flat light emitting plate for simulating thermal radiation, method for calibrating a pyrometer and method for determining the temperature of a semiconducting wafer
    15.
    发明公开
    Flat light emitting plate for simulating thermal radiation, method for calibrating a pyrometer and method for determining the temperature of a semiconducting wafer 审中-公开
    平面发光用于热辐射的方法的模拟面板用于校准高温计和一种用于确定半导体晶片的温度

    公开(公告)号：EP2660574A1

    公开(公告)日：2013-11-06

    申请号：EP13158380.9

    申请日：2013-03-08

    Applicant: LayTec AG

    Inventor： Zettler, Jörg-Thomas ,  Kaspari, Christian

    IPC: G01J5/00 ,  G01J5/08 ,  G01J1/08 ,  G01J5/52

    CPC classification number: G01J5/02 ,  G01J1/08 ,  G01J5/0007 ,  G01J5/0896 ,  G01J5/522 ,  H05B33/0854

    Abstract: The present invention relates to a flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer.
    It is an object of the present invention to provide a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit.
    According to the present invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.

    Abstract translation: 本发明涉及一种平面发光板，对于半导体晶片的温度校准高温计和一种方法用于确定性采矿由所述高温计的处理室内部的方法。 这是本发明的一个目的是提供一种用于通过冷源的手段校准高温计的所有其因此适用于具有窄缝处理腔室的方法。 。根据本发明，一台光用于模拟热辐射发射板设置，其包括由透明材料制成的主体，位于光用于发射光，至少一个发光板的上表面上的发光区域 源位于所述发光板的侧表面，位于所述发光板的侧表面的至少一个检测器，和用于调节由光源发射的光的强度的调节电路。

    Kalibrierverfahren, Farbmessverfahren und Anwendung des letzteren
    19.
    发明公开
    Kalibrierverfahren, Farbmessverfahren und Anwendung des letzteren 审中-公开
    Kalibrierverfahren，Farbmessverfahren und Anwendung des letzteren

    公开(公告)号：EP2213993A1

    公开(公告)日：2010-08-04

    申请号：EP09151729.2

    申请日：2009-01-30

    Applicant: X-Rite Europe GmbH

    Inventor： Frick, Beat

    IPC: G01J3/46 ,  H04N1/60 ,  G01J1/08

    CPC classification number: G01J3/46 ,  G01J1/08 ,  G01J3/462 ,  G01J3/506

    Abstract: Ein Notebook Rechner ist mit einem in seine Tastaturplatte (1) integrierten Lichtmesssensor (10) ausgestattet, welcher den Monitor (4) des Rechners im geschlossenen Zustand ausmessen kann. Der Lichtmesssensor wird (nach einer vorgängigen herstellerseitigen Linearisierung) im in den Notebook Rechner eingebauten Zustand auf den zuvor mittels eines externen Farbmessgeräts vollständig charakterisierten bzw. profilierten Monitor des Notebook Rechners kalibriert, die dabei erzeugten Kalibrierungsdaten werden nicht-flüchtig, vorzugsweise im Lichtmesssensor selbst angespeichert. Anhand der abgespeicherten Kalibrierungsdaten des Lichtmesssensors lassen sich die Sensor-Signale in X,Y,Z-Farbwerte umrechnen. Der an sich nur Leuchtdichten bzw. Helligkeiten messende Lichtmesssensor wird auf diese Weise zu einem Colorimeter, das in Kombination mit dem Monitor, auf den es kalibriert wurde, zuverlässige Ergebnisse liefert. Mit Hilfe des so kalibrierten Lichtmesssensors lässt sich jederzeit eine Neu-Kalibrierung (Profilierung) des Monitors durchführen.

    Abstract translation: 该方法包括用各种刺激来控制LCD监视器（4）并用光测量传感器（10）测量相关联的传感器信号。 测量的传感器信号和与刺激相关联的X，Y，Z颜色值被馈送到一组方程式中，其组合了多个校准系数上的传感器信号与X，Y，Z颜色值。 根据非易失性并存储在光测量传感器中的校准系数求解方程组。

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