摘要:
A manufacturing method of a sputtering target having mainly oxychalcogenide containing La and Cu by sintering at least one or more powders selected from an elementary substance of a constituent element, oxide or chalcogenide as the raw material, characterized in including a reaction step of retaining the [material] at a temperature of 850°C or less for 1 hour or more during the sintering step, wherein this [material], after the reaction step, is subject to pressure sintering at a temperature that is higher than the reaction step temperature. In addition to increasing the density of a P-type transparent conductive material target having mainly oxychalcogenide containing La and Cu and enabling the enlargement of the target at a low manufacturing cost, the existence of unreacted matter in the target can be eliminated, the production yield can be improved by suppressing the generation of cracks in the target, and the quality of deposition formed by sputtering this kind of target can also be improved.
摘要:
It is an object of the present invention to provide a copper electrolytic solution used to obtain a low-profile electrolytic copper foil with low surface roughness on the rough side (the opposite side from the glossy side) in the production of an electrolytic copper foil using a cathode drum, and more particularly to provide a copper electrolytic solution used to obtain an electrolytic copper foil that has excellent transmission loss characteristics at high frequency, can be finely patterned, and has excellent elongation and tensile strength both at ordinary temperature and high temperature. The copper electrolytic solution of the present invention contains as additives (A) at least one quaternary amine salt selected from the group consisting of (a) quaternary amine salts obtained by reaction between epichlorohydrin and an amine compound mixture composed of a secondary amine compound and a tertiary amine compound, and (b) polyepichlorohydrin quaternary amine salts, and (B) an organic sulfur compound.
摘要:
A semiconductor wafer W mirror finished at least on the major surface side following beveling at the wafer circumferential edge part. An inclining face 21 having an inclination angle theta of 5ring-25ring with respect to a major surface 10 and a length L of 100 mum or longer in the radial direction of the wafer is provided at the circumferential edge part of the wafer. Furthermore, the inclining face 21 has a non-mirror finish part 21b on the outer circumferential side of the wafer.
摘要:
A positive plate material for lithium secondary cells stably exhibiting excellent performance including the cell initial capacity, cycle characteristics, and the safety. The material is procuded by dripping an aqueous solution of a salt (e.g., cobalt sulfate) of a doping element (e.g. a transition metal, an alkaline metal, an alkaline-earth metal, B, or Al) into an alkaline solution, a carbonate solution, or a hydrogencarbonate solution in any one of which a compound (e.g., manganese oxide) of a metal (Mn, Co, Ni, or the like) which is the major component of the positive plate material so as to precipitate the compound of the doping element on the major component and to cover the major component compound, mixing the major component compound covered with the doping element with a lithium compound (e.g., lithium carbonate), and firing the mixture.
摘要:
Provided is iron silicide powder in which the content of oxygen as the gas component is 1500ppm or less, and a method of manufacturing such iron silicide powder including the steps of reducing iron oxide with hydrogen to prepare iron powder, heating the iron powder and Si powder in a non-oxidizing atmosphere to prepare synthetic powder containing FeSi as its primary component, and adding and mixing Si powder once again thereto and heating this in a non-oxidizing atmosphere to prepare iron silicide powder containing FeSi 2 as its primary component. The content of oxygen as the gas component contained in the iron silicide powder will decrease, and the iron silicide powder can be easily pulverized as a result thereof. Thus, the mixture of impurities when the pulverization is unsatisfactory will be reduced, the specific surface area of the iron silicide powder will increase, and the density can be enhanced upon sintering the iron silicide powder.
摘要:
Provided is a tantalum sputtering target having a crystal structure in which the (222) orientation is preferential from a position of 10% of the target thickness toward the center face of the target, and a manufacturing method of a tantalum sputtering target, including the steps of forging and recrystallization annealing, and thereafter rolling, a tantalum ingot or billet having been subject to melting and casting, and forming a crystal structure in which the (222) orientation is preferential from a position of 10% of the target thickness toward the center face of the target. As a result, evenness (uniformity) of the film is enhanced, and quality of the sputter deposition is improved.
摘要:
The object of the present invention to provide a metal plating method by a simple process, for example, on resins on which plating has been heretofore impossible. The metal plating method comprising surface treating an article to be plated with a liquid prepared by mixing or reacting in advance an organic acid salt of a silane coupling agent containing an azole in a molecule, for example, a coupling agent which is an equimolar reaction product of imidazole and γ-glycidoxypropyltrimethoxysilane, and a noble metal compound, and then conducting electroless plating thereon.
摘要:
Provided is metallic powder for powder metallurgy having iron as its principal component and containing indium soap, or metallic powder for powder metallurgy further comprising at least one type selected among bismuth soap, nickel soap, cobalt soap, copper soap, manganese soap and aluminum soap in such indium soap. Thereby obtained is metallic powder for powder metallurgy capable of easily improving the rustproof effect without having to hardly change the conventional process.
摘要:
A vapor-phase growth apparatus includes: a reaction furnace which is hermetically closable, a wafer container which is disposed in the reaction furnace, for disposing a wafer at a predetermined position, a gas supply member for supplying a source gas toward the wafer, and a heating member for heating the wafer, wherein the apparatus is designed to form a grown film on a front surface of the wafer by supplying the source gas in a high temperature state while the heating member heats the wafer in the reaction furnace through the wafer container. The wafer container includes: a heat flow control section having a space for disposing a wafer; and a heat flow transmitting section joined to the heat flow control section, for transmitting heat to the wafer disposed in the space; and contact heat resistance R g between the heat flow control section and the heat flow transmitting section is not less than 1.0x10 -6 m 2 K/W to not more than 5.0x10 -3 m 2 K/W, and the heat flow control section is made of a material having a coefficient of thermal conductivity which is not less than 5 times to not more than 20 times that of the wafer disposed on the heat flow transmitting section.