CORIOLISKREISEL
    24.
    发明公开
    CORIOLISKREISEL 有权
    科里奥利

    公开(公告)号:EP2162702A1

    公开(公告)日:2010-03-17

    申请号:EP08734872.8

    申请日:2008-03-28

    发明人: GEIGER, Wolfram

    IPC分类号: G01C19/56

    CPC分类号: G01C19/574

    摘要: The invention relates to a Coriolis gyro having an arrangement which comprises a substrate (5, 22, 24, 26), at least two individual structures (61, 62, 63, 64, 500, 600, 700, 800) and spring elements (for example 1, 2, 3, 21, 23, 25), with the spring elements (for example 1, 2, 3, 21, 23, 25) coupling the individual structures (61, 62, 63, 64, 500, 600, 700, 800) to the substrate (5, 22, 24, 26) and to one another, having force transmitters (for example 514, 614, 714, 814) and having taps (for example 534, 634, 734, 834), wherein the arrangement has at least one excitation mode (7) which can be excited by the force transmitters (for example 514, 614, 714, 814) and at least one detection mode (8) which can be measured by the taps (for example 534, 634, 734, 834), wherein the excitation mode (7) and the detection mode (8) are closed off, as a result of which no disturbance excitations of the excitation mode and of the detection mode can be caused by linear accelerations and/or vibrations if there is no need to take account of manufacturing tolerances.

    BESCHLEUNIGUNGSSENSOR MIT REDUZIERTEM BIAS UND HERSTELLUNGSVERFAHREN EINES BESCHLEUNIGUNGSSENSORS
    30.
    发明公开
    BESCHLEUNIGUNGSSENSOR MIT REDUZIERTEM BIAS UND HERSTELLUNGSVERFAHREN EINES BESCHLEUNIGUNGSSENSORS 审中-公开
    减小偏置加速度传感器和加速度传感器制造方法

    公开(公告)号:EP3243082A1

    公开(公告)日:2017-11-15

    申请号:EP16700096.7

    申请日:2016-01-04

    发明人: LEINFELDER, Peter

    IPC分类号: G01P21/00 G01P15/08 G01P15/13

    摘要: The invention relates to an acceleration sensor (400) comprising an excitation mass (420) having excitation electrodes (430), which excitation mass is movably mounted over a substrate (410) along a movement axis (x) and comprising detection electrodes (440) which are permanently connected to the substrate (410) and allocated to the excitation electrodes (430). A first group of pairings (450) of excitation electrode (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a first direction (460). A second group of pairings (450) of excitation electrodes (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a second direction (465), which is opposite the first direction (460). The number of pairings (450) in the first group is equal to the number of pairings (450) in the second group. The averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the first group corresponds to the averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the second group.