公开(公告)号：EP1112550B1

公开(公告)日：2011-10-26

申请号：EP99934136.5

申请日：1999-07-15

Applicant: August Technology Corporation ,  Rudolph Technologies, Inc.

Inventor： O'DELL, Jeffrey ,  HARLESS, Mark ,  VERBURGT, Thomas ,  WATKINS, Cory

IPC: H01L21/00 ,  G01N21/95 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8803 ,  G01N21/8806 ,  G01N2021/8838 ,  G01N2201/06113 ,  G01N2201/0696 ,  G01N2201/0697 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/30148 ,  H01L21/67242 ,  H01L21/67271 ,  H01L21/67288 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/2256 ,  H01L2924/00

Abstract: An automated defect inspection system (10) has been invented and is used to inspect patterned wafers, whole wafers, broken wafers, partial wafers, waffle packs, MCMs, etc. The inspection system is specifically intended and designed for second optical wafer inspection for such defects as metalization defects, such as scratches, voids, corrosion and bridging, as well as diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

公开(公告)号：EP1466137B1

公开(公告)日：2010-04-14

申请号：EP02806181.0

申请日：2002-12-18

Applicant: Rudolph Technologies, Inc. ,  Mariner Acquisition Company LLC

Inventor： SNOW, Donald, B. ,  STROM, John, T. ,  KRAFT, Raymond, H.

IPC: G01B11/14 ,  G01B11/25 ,  G01C11/06

CPC classification number: G01B11/254 ,  G01B11/245 ,  G01C11/06 ,  G06T7/521 ,  H05K13/0015

Abstract: A stereoscopic three-dimensional optical metrology system (100) and method accurately measure the location of physical features (129) on a test article (120) in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article (120) from two or more perspectives through a substantially transparent fiducial plate (190) bearing a fiducial marking (199); camera (111,112) viewing angles and apparent relative distances between a feature on a test article (120) and one or more fiducials (199) may enable accurate calculation of feature position.

Abstract translation: 立体三维光学测量系统和方法以对表面轮廓不连续性快速且鲁棒的方式精确地测量测试物品上物理特征的位置。 公开的实施例可以从两个或更多个透视图通过基本上透明的基准标记来承载测试用品; 相机视角和测试物品上的特征与一个或多个基准之间的明显的相对距离可以使得能够精确地计算特征位置。

公开(公告)号：EP1381825A1

公开(公告)日：2004-01-21

申请号：EP02721330.5

申请日：2002-03-08

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： MORATH, Christopher ,  VERTIKOV, Andrey

IPC: G01B11/06

CPC classification number: G01N29/2418 ,  G01B11/0666

Abstract: Disclosed are methods and apparatus for reducing thermal loading of a film (220) disposed while measuring the thickness of the film in an area about a measurement site. The method includes steps of bringing an optical assembly of the measurement system (75) into focus, aligning a beam spot with the measurement site, turning on one of a dither EOM (205) of a dither AOM of a piezo-electric dither assembly to sweep the beam spot in an area about the measurement site, thereby reducing the thermal loading within the measurement site, making a measurement data to determine an average film thickness in the measurement area.