摘要:
A two-dimensional absolute encoder includes a scale (SCL) having marks arranged thereon along first and second directions different from each other, a detector (PDA(X), PDA(Y)) configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor (PRC) configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.
摘要:
A two-dimensional absolute encoder includes a scale (SCL) having marks arranged thereon along first and second directions different from each other, a detector (PDA(X), PDA(Y)) configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor (PRC) configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.
摘要:
A two-dimensional absolute encoder includes a scale (SCL) having marks arranged thereon along first and second directions different from each other, a detector (PDA(X), PDA(Y)) configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor (PRC) configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.
摘要:
An absolute encoder includes a scale (SCL) in which plural marks are arranged at a first pitch; a detector (PDA) configured to detect a predetermined number of marks corresponding to one of the absolute codes; and a calculator (CULC) configured to calculate an absolute position of the scale based on an output of the detector. The calculator is configured to generate a data sequence constituted by the predetermined number of data by respectively quantizing the predetermined number of periodic signals output from the detector, and to obtain first position data corresponding to the one of the absolute codes based on the generated data sequence, to obtain second position data based on a phase of at least one of the predetermined number of periodic signals, and to generate data which represents the absolute position by combining the first position data and the second position data.
摘要:
An interferometer for measuring the displacement of a diffraction grating includes a multi-mode semiconductor laser (1) for generating a laser beam; a device (20) for supplying a predetermined current to the laser so that at least five vertical modes occur in an oscillation spectrum of the laser beam generated by the laser at an intensity ratio of at least 0.05; and an optical system (3) for splitting the laser beam generated by the laser into first and second beams. The optical system also directs the first and second beams to the diffraction grating (6) and effects interference between a first diffracted light beam generated by the diffraction of the first beam at the diffraction grating and a second diffracted light beam generated by the diffraction of the second beam at the diffraction grating to produce an interference light beam. Also provided is a photoelectric convertor (13) for converting the interference light beam into an electrical signal.
摘要:
There is provided an absolute encoder advantageous in accuracy of an output thereof against a defect in a scale thereof. In the absolute encoder, a detector detects a part of an array of marks of the scale, and outputs a data sequence corresponding to the part. A processor stores information indicating a correspondence between each of a plurality of code sequences and an absolute coordinate of motion of the scale, and outputs information of the absolute coordinate based on the data sequence and the information. The processor detects an error of the data sequence, and performs rewriting of the information based on the detected error.
摘要:
A scale (SCL) of an absolute encoder, on which a plurality of marks are arranged at predetermined pitches along at least one direction, includes: a base (Ba, Bb, G) including a plurality of light-reflective or light-transmissive marks (RGP) arranged at the predetermined pitches along the at least one direction. A film (HTL, HT), which attenuates light, is formed on each of marks (HTP) as a part of the plurality of marks.
摘要:
An absolute rotary encoder comprises a scale (SCL) having marks arranged at a first pitch; a first detector (PDA_A) and a second detector (PDA_B) including plural photoelectric conversion elements arranged at a second pitch smaller than the first pitch, and configured to detect a predetermined number of marks, the second detector disposed opposite to the first detector; and a computing device (CULC). The computing device is configured to generate a data string by quantizing a periodic signal output from the first detector, and obtains first angle data from the data string, to normalize amplitudes of the periodic signals output from the first and second detectors, to average the normalized periodic signal to obtain second angle data from a phase of the averaged periodic signal, and to combine the first and second angle data to generate data representing an absolute rotation angle.