Machine unit having retaining device using static electricity
    21.
    发明公开
    Machine unit having retaining device using static electricity 失效
    具有静电的保持装置的机器单元

    公开(公告)号:EP0297227A3

    公开(公告)日:1989-05-03

    申请号:EP88105806.9

    申请日:1988-04-12

    申请人: ABISARE CO., LTD.

    发明人: Kasahara, Keiji

    IPC分类号: H02N13/00

    摘要: A machine unit (18-1) provided with an electrostatic retention means (2) is disposed at a desired position. The electrostatic retention means (2) includes a pair of electrodes (4, 6), an attraction member (8) associated with the pair of electrodes (4, 6) and in which static electricity is induced so as to generate an electrostatic attraction force which attracts and retains an object (12-1), and a power source circuit (10) for supplying positive and negative charges to the pair of electrodes (4, 6) while sequentially and alternately changing the polarity thereof.

    Dispositif rotatif de découpe
    22.
    发明公开
    Dispositif rotatif de découpe 失效
    旋转切割装置

    公开(公告)号:EP0312422A1

    公开(公告)日:1989-04-19

    申请号:EP88402477.9

    申请日:1988-09-30

    IPC分类号: B26F1/44 B26D7/26

    摘要: Le dispositif rotatif de découpe destiné à découper en continu des fenêtres dans une feuille de papier comporte une matrice de découpe en feuille métallique munie d'une arête tranchante.
    La feuille métallique 13, 15 est une plaque de tôle flexible mince en matériau magnétique sur laquelle est formée l'arête de découpe 12 et cette tôle flexible est plaquée sur la surface extérieure d'une coquille 4 sous l'effet de l'at­traction magnétique exercée par des aimants 9c, 9d portés par la coquille 4.
    Application à la fixation rapide et n'occupant qu'un faible encombrement, de matrices de découpe rotative.

    摘要翻译: 用于连续切割一张纸中的窗口的旋转切割装置具有设有切割边缘的金属片切割模具。 金属箔13,15是由磁性材料制成的柔性金属薄板,其上形成有切割刃12,并且该柔性板在磁性吸引的作用下压靠在壳体4的外表面上。 由壳体4承载的磁体9c,9d施加。应用于快速附接并且仅占用足够小的旋转模切。

    Magnetic device for gripping and clamping a workpiece in a machining unit or machining line
    24.
    发明公开
    Magnetic device for gripping and clamping a workpiece in a machining unit or machining line 有权
    用于在处理单元中或在加工处理生产线抓握和夹紧的工件磁体装置

    公开(公告)号:EP2497599A1

    公开(公告)日:2012-09-12

    申请号:EP11157202.0

    申请日:2011-03-07

    IPC分类号: B23Q3/154

    CPC分类号: B23Q3/1546 B23Q3/154

    摘要: A magnetic device for gripping and clamping a workpiece in a machining unit or on a machining line comprises a magnetic plate (2) of the type including a distribution of high-energy permanent-magnet modules (3), which can be electrically activated. The device further comprises an auxiliary workpiece-holder plate made of ferromagnetic material, which rests on a main surface of the magnetic plate and has a top surface (10) shaped in a way complementary to a surface of the workpiece (P) that rests thereon. The workpiece (P) rests on the top surface (10) of the auxiliary workpiece-holder plate (8) only in points corresponding to some supporting pads (13), whilst the facing surfaces of the workpiece (P) and auxiliary workpiece-holder plate (8) are kept slightly set apart from one another for most of their extension. Precise referencing in the plane of the main surface (6) of the magnetic plate (2) between the workpiece (P) and the auxiliary workpiece-holder plate (8) is obtained by means of two locating pins (14) projecting from the auxiliary plate (8) and received within respective seats (15) of the workpiece (P). There may be provided a protective shroud (16) above the magnetic plate (2), having an opening (16b) from which the aforesaid auxiliary workpiece-holder plate (8) projects.

    摘要翻译: 用于在加工单元上或在加工线夹持和夹紧一工件的磁性装置包括类型的,包括高能永磁体模块(3)的分布,其可以是电激活的磁板(2)。 该装置的辅助的工件支承板的由铁磁材料制成,在所述磁性板的主面抵靠在并具有成形在与工件(P)的表面互补的方式的顶表面(10)进一步包括在其上做休止符 , 工件(P)搁置仅在点对应于一些支撑垫(13)的辅助的工件支承板(8)的顶面(10)上,而所述工件(P)和辅助的工件保持器的面对表面 板(8)保持稍微分开设置彼此其大部分延伸。 在从辅助突出的主表面(6)的磁性板(2)的工件(P)和辅助工件支承板(8)之间是通过手段获得的两个定位销(14)的平面精确参考 板(8)和所述工件(P)的respectivement座(15)内接收到。 可以提供磁性板(2)上方的保护罩(16),具有上开口(16B),从该上述的辅助工件支承板(8)的项目。

    Method and apparatus for dechucking a workpiece from an electrostatic chuck
    27.
    发明公开
    Method and apparatus for dechucking a workpiece from an electrostatic chuck 审中-公开
    从静电卡盘快速释放工件的方法

    公开(公告)号:EP1118425A2

    公开(公告)日:2001-07-25

    申请号:EP01300467.6

    申请日:2001-01-19

    发明人: Lesser, Karl F.

    IPC分类号: B23Q3/15 H01L21/08

    摘要: A method and apparatus that provides a dechucking voltage applied to an electrostatic chuck (108) under the control of a computer (100) that facilitates removal of a workpiece or workpiece therefrom. The method incorporates residual chucking force information obtained from the preceding dechuck operation and stored in a memory (128) to modify and improve the dechucking algorithm for the subsequent wafer dechucking cycle. To avoid charge accumulation on the electrostatic chuck when processing a succession of workpieces, the chucking and dechucking voltages reverse polarity after each workpiece is dechucked.

    摘要翻译: 的方法和设备没有提供一种应用于在计算机的控制下,静电卡盘(108)(100)中的脱离电压确实有助于除去从那里工件或工件的。 该方法结合了来自preceding-去夹持操作和存储于存储器(128)进行修改和改进对随后的晶片去夹紧周期去夹紧算法获得的残余夹紧力信息。 为了避免在静电吸盘的电荷累积在处理的工件连续,夹持和去夹紧电压反极性每个工件dechucked之后。

    Top plate for magnetic devices
    28.
    发明公开
    Top plate for magnetic devices 失效
    Deckplattefürmagnetische Anordnungen。

    公开(公告)号:EP0585494A1

    公开(公告)日:1994-03-09

    申请号:EP92202676.0

    申请日:1992-09-03

    申请人: Walker-Hagou B.V.

    IPC分类号: B23Q3/00 B23Q3/154

    CPC分类号: B23Q3/154

    摘要: A top plate (1) for magnetic devices, such as chucks, lifters, clamps etc. comprises a plurality of elongate magnetic piece means regularly spaced apart and separated by non-magnetic material in a direction substantially perpendicular to the length thereof and parallel to a clamping surface (7) formed. The non-magnetic material consists of a coating (8) on the magnetic piece means (6) joint to form the top plate.

    摘要翻译: 用于诸如卡盘,升降器,夹具等的磁性装置的顶板(1)包括多个细长的磁片装置,其规则地间隔开并且以非磁性材料在基本上垂直于其长度的方向上并且平行于 夹紧表面(7)形成。 非磁性材料由磁性件装置(6)上的涂层(8)组成,以形成顶板。

    Stanze, insbesondere Flachbettstanze
    29.
    发明公开
    Stanze, insbesondere Flachbettstanze 失效
    斯坦兹,insbesondere Flachbettstanze。

    公开(公告)号:EP0355673A1

    公开(公告)日:1990-02-28

    申请号:EP89115060.9

    申请日:1989-08-16

    申请人: DELKESKAMP KG

    发明人: Nagl, Otmar

    IPC分类号: B26F1/38

    摘要: Beschrieben wird eine Stanze, insbesondere Flach­bett- oder Rotationsstanze, mit einem metallischen Werkzeugträger (1) und mit einem Stanzwerkzeug, das über die arbeitsseitige Oberfläche (10) einer Grundplatte (8) senk­recht hinausragende, gegebenenfalls von Schaumgummi­streifen eingefaßte Schneid- und/oder Preßkanten (32) auf­weist und mittels Halteelementen (12) im wesentlichen flä­chig auf einer Aufspannfläche (6) des Werkzeugträgers (1) fi­xierbar ist, und mit einem von der Aufspannfläche (6) beab­standeten Gegenstanzelement. Dabei ist vorgesehen, daß die Halteelemente (12, 13) wenigstens teilweise aus magneti­schem Material bestehen und mindestens eine mit der Aufspannfläche (10) des Werkzeugträgers (1) flächig in magneti­schen Wirkkontakt bringbare Unterfläche (20) besitzen, so­wie mindestens eine Anschlagfläche (14, 16) aufweisen, die an Flächenabschnitten der Grundplatte (8) zu deren Fixierung auf der Aufspannfläche (6) anlegbar ist.

    摘要翻译: 描述了一种冲压机,特别是平板或旋转冲压机,其具有金属工具支撑件(1)和冲压工具,该冲压工具具有在工作侧表面上垂直地突出的切割和/或加压边缘(32) 并且可以通过保持元件(12)以大致平面的方式固定在工具支撑件(1)的夹紧表面(6)上,并且具有底板 与夹紧表面(6)间隔开的反向调节元件。 在这种布置中,对保持元件(12,13)进行至少部分地由磁性材料构成并且具有至少一个下表面(20),所述至少一个下表面(20)能够以平面方式与磁性工作接触 工具支撑件(1)的夹紧表面(10),并且还具有至少一个止挡面(14,16),该止动面可以放置在基板(8)的表面部分上,用于将其固定在夹紧表面 (6)。

    Electrostatic holding apparatus
    30.
    发明公开
    Electrostatic holding apparatus 失效
    静电保持装置

    公开(公告)号:EP0294556A3

    公开(公告)日:1989-04-26

    申请号:EP88105558.6

    申请日:1988-04-07

    申请人: ABISARE CO., LTD.

    发明人: Kasahara, Keiji

    IPC分类号: H02N13/00

    摘要: An electrostatic holding apparatus (2) having, in sequentially laminated relation, an insulating base layer (4), a set of electrodes (6,8) to which positive and nega­tive charges are respectively applied, and an adsorbing layer (12) which is induced by the set of electrodes (6,8) for attracting and holding an object (10) thereagainst by an electrostatic attracting force. A power supply circuit (14) is connected to the set of electrodes (6,8) for respectively applying positive and negative charges to the first and second electrodes (6,8) of the set. The power supply circuit (14) includes a DC power source (16), and also includes a switch­ing arrangement (18) for permitting reversing of the charges as applied to the electrodes (6,8) so that reverse charges are applied to the electrodes (6,8) each time a prior object (10) is peeled off the adsorbing layer (12) and a new object (10) is attached thereto.