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    ELLIPSOMETRE SPECTROSCOPIQUE A FAIBLE BRUIT
    21.
    发明公开
    ELLIPSOMETRE SPECTROSCOPIQUE A FAIBLE BRUIT 有权
    OUT CHARM分光椭率

    公开(公告)号：EP1290417A1

    公开(公告)日：2003-03-12

    申请号：EP01945381.0

    申请日：2001-06-08

    Applicant: FRANCE TELECOM

    Inventor： FERRIEU, Frédéric

    IPC: G01J4/00 ,  G01N21/21

    CPC classification number: G01J4/00 ,  G01N21/211

    Abstract: The invention concerns a spectroscopic ellipsometer comprising a light source (1) emitting an optical beam, a polarizer (2) arranged on the path of the optical beam emitted by the light source, a sample holder (9) receiving the optical beam from the polarizer output, a polarisation analyser (3) designed to be traversed by the beam reflected by the sample to be analysed, a detection set which receives the beam from the analyser output and which comprises a monochromator (5) and a photodetector (4), means (6) for processing the signal in said detection set output, which include an electronic counter (13). Cooling means (12) maintain the detection set at a temperature lower than room temperature, minimising the noise of the detector so as to be constantly in the condition of minimum photon noise. The optimal measuring condition of the ellipsometer is reached by minimising all the sources of noise (lamps, detection, ambient noise).

    Polarimeter
    24.
    发明公开
    Polarimeter 审中-公开
    旋光仪

    公开(公告)号：EP1118847A2

    公开(公告)日：2001-07-25

    申请号：EP01100646.7

    申请日：2001-01-11

    Applicant: A. Krüss Optronic GmbH

    Inventor： Pannhoff, Helge

    IPC: G01J4/00

    CPC classification number: G01N21/21 ,  G01J4/00

    Abstract: Die Erfindung bezieht sich auf ein Polarimeter zur Ermittlung von Eigenschaften einer Probe über Phasenauflösung und Fourieranalyse mit einer Quelle (1, 2, 3, 4, 5) für linear polarisierte Strahlung, einer Probenkammer zur Aufnahme der Polarimeterröhre (6) für die Probe, einen Analysator (7), der am Ausgang der Probenkammer (6) angeordnet ist, der das von der Probe optisch beeinflusste Licht erhält und der kontinuierlich drehbar ist, einen Motor mit Inkrementalgeber (10) als Antrieb für den Analysator (7), einen Detektor (9) mit Linse (8), der das vom Analysator (7) ausgegebene Signal hinsichtlich Analysatorstellung und Intensitätssignal erfasst und an einen Analog-Digitalwandler (11) abgibt, der von dem Inkrementalgeber (19) getriggert wird, und einen Rechner (12), der das Ausgangssignal vom Analog-Digitalwandler (11) erhält und über eine Fourieranalyse eine Aussage über die Eigenschaften der Probe macht.

    Abstract translation: 卤素灯（2）将光照射到室（6）中的样品上。 从样品反射的光被分析仪（7）接收，并送入强度检测器（9）。 检测器的输出由增量式传感器触发的模拟数字转换器（11）转换成数字信号。 数字信号被馈送到计算机（12），以获得频率信息。

    Procédé d'imagerie tridimensionnelle à partir d'images thermiques
    26.
    发明公开
    Procédé d'imagerie tridimensionnelle à partir d'images thermiques 审中-公开
    一种用于生产热图像的三维图像处理

    公开(公告)号：EP0903609A1

    公开(公告)日：1999-03-24

    申请号：EP98402337.4

    申请日：1998-09-23

    Applicant: THOMSON-CSF

    Inventor： Collot, Laurent ,  Kerboull-Leclerc, Frédérique ,  Larive, Marc

    IPC: G02B27/28 ,  G02B23/12 ,  G01J4/00

    CPC classification number: G02B27/28 ,  G01B11/24 ,  G01J4/00 ,  G02B23/12

    Abstract: Le procédé de l'invention consiste à effectuer, pour chaque pixel à traiter d'une image thermique d'un objet, trois mesures différentes, par exemple à l'aide d'un polariseur à trois orientations différentes, à en déduire les paramètres de Stockes de l'onde issue de l'objet correspondant au pixel considéré, à calculer les paramètres polarimétriques d'ellipticité et d'inclinaison du grand axe de l'ellipse de l'onde partiellement polarisée, et à reconstruire la surface tridimensionnelle visible de l'objet en déterminant pour chacun de ces pixels ses coordonnées grâce aux relations existant entre les paramètres polarimétriques de l'onde et l'indice optique du matériau constituant l'objet, et le vecteur normal à la surface de l'objet à l'emplacement du pixel.

    Abstract translation: 从强度的参数产生的法线向量从每个像素表征椭圆部分偏振波的感确定性使用数学​​和拓扑标准开采。 从到达寻求通过建立连续表面元件的本体（C1）内产生的声子的光束（FI）处界面（P1）与空气建立的对象的原点表面。 的部分偏振光束（FR）被反射回所述主体和另一部分偏振光束（Fe）的出现到空气中。 偏振的出射光束的程度取决于主体的性质，特别是它的介电常数。 具有相等的发光强度机构因此可被区分。 该方法仅使用三种类型的用于由使用具有相对于接收波束三个不同的特性的光学元件的而获得的每个像素观察光学数据。 然后三个斯托克斯参数计算哪一个使强度椭圆描述从每个像素发出的部分偏振光是确定性的开采的详细信息。 已知感伪法线向量的字段然后可构建允许的对象的从小元件建立起来的形状。

    Polarisation monitoring methods and apparatus
    27.
    发明公开
    Polarisation monitoring methods and apparatus 失效
    Verfahren und Vorrichtung zur Messung der Polarization

    公开(公告)号：EP0737856A3

    公开(公告)日：1999-03-10

    申请号：EP96301670.4

    申请日：1996-03-12

    Applicant: J.A. WOOLLAM CO. INC.

    Inventor： Green, Steven E. ,  Woollam, John A. ,  Herzinger, Craig M. ,  Ducharme, Stephen P. ,  Johs, Blaine D.

    IPC: G01N21/21 ,  G01J3/447

    CPC classification number: G01J4/00 ,  G01J3/447 ,  G01N21/211

    Abstract: A system and method for controlling polarisation state determining parameters of a polarised beam of light in an ellipsometer or polarimeter and the like system, so that they are in ranges wherein the sensitivity, of a sample system characterising PSI and DELTA value monitoring detector (DET) used to measure changes in said polarisation state resulting from interaction with a "composite sample system," comprised of a sample system per se. (SS) and a beam polarisation state determining variable retarder, to noise and measurement errors etc. therein), is reduced. This allows determining sample system per se.
    characterising PSI and DELTA values, from Composite Sample System characterising PSI and DELTA values, by compensating for the presence of components, (VR1) and/or (VR2), added to an ellipsometer or polarimeter and the like system. The arrangement also improves the ability of an ellipsometer or polarimeter and the like system fitted with components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterising PSI and DELTA determining data values, wherein a sample system per se. investigating polarised beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. The arrangement also allows determination of the "Handedness" of a polarised beam of light, and of sample system Jones or Mueller Matrix component values; and provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter and the like system.

    Abstract translation: 用于控制椭偏仪或偏振计等偏振光束的偏振态确定参数的系统和方法，使得它们处于表征PSI和DELTA值监视检测器（DET）的样本系统的灵敏度的范围内， 用于测量由与样品系统本身组成的“复合样品系统”的相互作用产生的所述极化状态的变化。 （SS）和光束偏振状态确定可变延迟器，其中的噪声和测量误差等）降低。 这允许确定样品系统本身。 通过补偿添加到椭偏仪或偏振计等的组件（VR1）和/或（VR2）的存在来表征PSI和DELTA值的复合样品系统的PSI和DELTA值的表征。 该装置还提高了配有组件（VR1）和/或（VR2）的椭偏仪或偏振计等的系统能够提供表征PSI和DELTA确定数据值的可用的精确和精确的采样系统的能力，其中采样系统本身。 调查偏振光束的方向是除了Principal或Brewster入射角之外，否则使用哪个角度的发生角度将是困难的，甚至是不可能的。 该布置还允许确定偏振光束和样本系统Jones或Mueller Matrix分量值的“Handedness”; 并且提供用于将系统组件（VR1）和/或（VR2）添加到椭偏仪或偏振计等的系统，基本上终端用户在需要时是透明的，而不从所述椭偏仪或偏振计等偏移仪中去除。

    A METHOD AND APPARATUS FOR VIEWING
    28.
    发明公开
    A METHOD AND APPARATUS FOR VIEWING 失效
    方法和仪器监测

    公开(公告)号：EP0791170A1

    公开(公告)日：1997-08-27

    申请号：EP95939147.0

    申请日：1995-11-09

    Applicant: WOLFF, Lawrence B.

    Inventor： WOLFF, Lawrence B.

    IPC: G01J4

    CPC classification number: G01J4/00

    Abstract: An apparatus (10) comprises an optical filter (12), which resolves electromagnetic radiation into a sequence of resolved polarization components, an imaging device (14), having a storage device (16), and a driver (18). The imaging device (14) receives the sequence of resolved polarization components from the optical filter (12) and stores them in the storage device (16). The driver (18), which receives the video synchronization signal, produces a filter synchronization signal which is provided to the optical filter (12) to cause the optical filter (12) to produce the sequence of resolved polarization components so the optical filter (12) is in synchronization with the imaging device (14). This apparatus (10) is used to view the polarization properties of a scene.

    POLARIZATION VIEWER
    30.
    发明公开
    POLARIZATION VIEWER 失效
    极化研究单位

    公开(公告)号：EP0729687A1

    公开(公告)日：1996-09-04

    申请号：EP94901207.0

    申请日：1993-10-26

    Applicant: WOLFF, Lawrence B.

    Inventor： WOLFF, Lawrence B.

    IPC: G02B23 ,  G01J4 ,  G02F1 ,  H04N5

    CPC classification number: H04N5/2254 ,  G01J4/00

    Abstract: A polarization viewer comprising a mechanism (12, 18, 20) for forming a broadview image having a spectral width greater than 2 angstroms and 50° based on polarization information of a scene. The polarization viewer is also comprised of a mechanism (12, 18, 20) for providing polarization information to the forming mechanism. The providing mechanism is in communication with the forming mechanism. In a first embodiment, the providing mechanism includes a camera mechanism in communication with the forming mechanism. The camera mechanism includes a fixed polarizer analyzer (12) disposed such that electromagnetic radiation entering the camera mechanism passes through the polarizer analyzer (12). The providing mechanism can also include a mechanism for steering a polarization plane of the radiation. The steering mechanism is disposed such that radiation passing through the polarizer analyser first passes through the steering mechanism. The steering mechanism preferably includes a first twist crystal (18) and at least a second twist crystal (20) aligned with the first twist crystal such that radiation passing through the first crystal has a first state and a second state.

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