公开(公告)号：EP2102788A2

公开(公告)日：2009-09-23

申请号：EP08713671.9

申请日：2008-01-09

Applicant: Lockheed Martin Corporation

Inventor： MATTOX, Barry G. ,  TENER, Gene D.

IPC: G06K9/00

CPC classification number: G01J4/04

Abstract: This invention solves a problem of registration and improves signal-to-noise ratio (SNR) when using division-by-focal-plane array to produce multiple polarization images. This is achieved by processing a sequence of angular-position-dithered frames to generate a high-definition, Nyquist-sampled, integrated image for each of the polarizations. The integration method transforms individually under-sampled, high-resolution image frames into resultant high-resolution frames that meet the Nyquist sampling criterion. During the resampling transformation, each polarization or waveband is resampled to produce precise registration to the other polarizations, since registration offsets are fixed and defined by the arrangement of the polarized pixels in the focal-plane-array. In the most straight-forward implementation, these offsets would be integer pixel shifts in X and Y.

公开(公告)号：EP1947445A1

公开(公告)日：2008-07-23

申请号：EP07300736.1

申请日：2007-01-19

Applicant: Horiba Jobin Yvon S.A.S.

Inventor： Amary, Pascal ,  Ramdane, Benferhat ,  Cattelan, Denis

IPC: G01N21/21 ,  G01J3/28

CPC classification number: G01N21/211 ,  G01J3/2823 ,  G01J4/04 ,  G01N2021/213

Abstract: The present invention concerns a system and a process for analysing a sample (6) comprising an excitation section (1) and an analyse section (7), said excitation section (1) including a light source (2) emitting an incident measurement luminous beam (3), a polarisation state generator (PSG) (4), first optical means (5), and said analyse section (7) comprising a polarisation state analyser (PSA) (8), a detection system (10) and second optical means (9).
According to the invention, the excitation section (1) comprises an illumination source (12) emitting an incident visualization luminous beam (22), superposition optical means (13) enabling to the incident visualization luminous beam (22) to be send onto the sample surface (21) through an optical path which is identical to the optical path of the incident measurement luminous beam (3) and the analyse section (7) comprises separation optical means (14) enabling to transmit a part of the reflected or transmitted visualization luminous beam (23) and a part of the reflected or transmitted measurement luminous beam towards a visualization direction (25).

Abstract translation: 本发明涉及一种用于分析包括激励部分（1）和分析部分（7）的样品（6）的系统和方法，所述激励部分（1）包括发射入射测量光束的光源（2） （3），偏振状态发生器（PSG）（4），第一光学装置（5）和包括偏振状态分析器（PSA）（8）的所述分析部分（7），检测系统（10）和第二光学 （9）。 根据本发明，激励部分（1）包括发射入射的可视化发光束（22）的照明源（12），能够将入射的可视化发光束（22）发送到样品上的叠加光学装置（13） 通过与入射测量光束（3）和分析部分（7）的光路相同的光路的表面（21）包括分离光学装置（14），其能够透射部分反射或透射的可视光 光束（23）和反射或透射的测量发光束的一部分朝向可视化方向（25）。

公开(公告)号：EP1590646B1

公开(公告)日：2007-10-24

申请号：EP03700784.6

申请日：2003-02-06

Applicant: EXFO ELECTRO-OPTICAL ENGINEERING INC.

Inventor： CYR, Normand

IPC: G01M11/00

CPC classification number: G01J4/04 ,  G01M11/331 ,  G01M11/336

Abstract: Apparatus for measuring polarization mode dispersion (PMD) of adevice, e. g. a waveguide, comprises a broadband light source (10,12) for passing polarized broadband light through the device (14), an interferometer (20) for dividing and recombining light that has passed through the device to form interferograms, a polarization separator (30) for receiving the light from the interferometer and separating such received light along first and second orthogonalFebruary 25, 2003February 25, 2003 polarization states, detectors (32x,32y) for converting the first and second orthogonal polarization states, respectively, into corresponding first and second electrical signals (Px(τ),Py(τ)), and a processor (36) for computing the modulus of the difference and such, respectively, of the first and second electrical signals to produce a cross-correlation envelope (EC(τ)) and an auto-correlation envelope (Ec(τ)), and determining the polarization mode dispersion according to the expression PMD = where and τ is the delay difference between the paths of the interferometer.

公开(公告)号：EP1636556A4

公开(公告)日：2007-09-12

申请号：EP04809374

申请日：2004-05-13

Applicant: UNIV AKRON

Inventor： GIAKOS GEORGE C

IPC: G01J4/04 ,  G01J20060101 ,  G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G01J4/00 ,  G01N21/21

CPC classification number: G01J4/04 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/433 ,  G01J3/447 ,  G01N21/21

Abstract: A multi-energy polarization imaging method consisting of a multi-fusion, dual-rotating retarder / multiple-energy complete Mueller matrix-based polarimeter and dual-energy capabilities The system includes a light source (14) for illuminating a target (18) with a first quantity of light having a first wavelength and a second quantity of light having a second wavelength, the first and second wavelength being different. A polarization-state generator (22) generates a polarization state for each of the first and second quantities of light, and includes a first polarizer (26) through which the first and second quantities of light are transmitted before entering a first waveplate (32). A polarization-state receiver (44) evaluates a resulting polarization state of the first and second quantities of light following illumination of the target (18), the polarization-state receiver (44) including a second waveplate (48) through which the first and second quantities of light are transmitted before entering a second polarizer (51). An optical image-capture device captures a first image of the target illuminated by the first quantity of light and a second image of the target illuminated by the second quantity of light. A processing unit assigns a weighting factor to at least one of the first and second images and evaluates a weighted difference between the first and second images to generate a multi-energy image of the target (18).

公开(公告)号：EP1786123A1

公开(公告)日：2007-05-16

申请号：EP07004247.8

申请日：2001-08-31

Applicant: FUJITSU LIMITED

Inventor： Rasmussen, Jens C. c/o Fujitsu Ltd ,  Ishikawa, George c/o Fujitsu Ltd ,  Terahara, Takafumi c/o Fujitsu Ltd ,  Ooi, Hiroki c/o Fujitsu Ltd

IPC: H04B10/18 ,  G01J4/00

CPC classification number: G01J4/00 ,  G01J4/04 ,  H04B10/2569

Abstract: The degree of polarization of an optical signal is measured by a polarimeter and used for providing a feedback signal to adjust adaptive optics of a polarization mode dispersion compensator. The polarization properties of the polarimeter are determined with high accuracy to match the polarimeter through calibration and used to produce the feedback signal.

Abstract translation: 光信号的偏振度由偏振计测量并用于提供反馈信号以调整偏振模色散补偿器的自适应光学器件。 偏振计的偏振特性被高精度地确定以通过校准来匹配偏振计并被用于产生反馈信号。

公开(公告)号：EP1707929A1

公开(公告)日：2006-10-04

申请号：EP06005739.5

申请日：2006-03-21

Applicant: OMRON CORPORATION ,  National University Corporation Hokkaido University

Inventor： Okabe, Hiroshi c/o Omron Corporation ,  Matoba, Kenichi c/o Omron Corporation ,  Oka, Kazuhiko c/o Div. of Applied Physics

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In the channeled spectroscopic polarimetry, a measurement error of a parameter showing a spectropolarization characteristic of a sample is effectively removed, the error being generated by various variations in retardation of a retarder depending upon the state of the sample.
With attention being focused on that the retardation of the retarder may be kept constant by stabilization of an incident direction of light that transmits through the retarder, the retarder (R1, R2, 117, 118, 207, 208) was arranged on the light source (7, 202) side with respect to the sample (D, 50,400) so as to effectively remove an influence relative to a measurement error, such as variations in direction of a light ray due to the sample (D, 50, 400).

Abstract translation: 在通道光谱偏振法中，有效地消除了示出样品的分光偏振特性的参数的测量误差，该误差是由取决于样品的状态的延迟器的延迟的各种变化而产生的。 注意力集中在通过使通过延迟器透射的光的入射方向的稳定化可以使延迟器的延迟保持恒定，将延迟器（R1，R2,117,187,208,208）设置在光源 （D，50,400）的相对于样品（D，50,400）的光线方向的变化的测量误差的影响（D，50,400）。

公开(公告)号：EP1698939A2

公开(公告)日：2006-09-06

申请号：EP06004225.6

申请日：2006-03-02

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yamazoe, Kenji ,  Takeuchi, Seiji ,  Suzuki, Akiyoshi

IPC: G03F7/20

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G03F7/70058 ,  G03F7/70566 ,  G03F7/70591

Abstract: An exposure apparatus includes an illumination optical (IO) system for illuminating the reticle (MK) using the ultraviolet light from the light source, and a polarization measuring unit (1) measuring the polarization state of the ultraviolet light, the polarization measuring unit including an optical unit for providing at least three different phase differences to the ultraviolet light that has passed at least part of the illumination optical system, a polarization element for providing a different transmittance in accordance with a polarization state of the ultraviolet light that has passed the optical unit, and an image pickup device (22) for detecting a light intensity of the ultraviolet light that has passed the polarization element, the polarization measuring unit measuring the polarization state of the ultraviolet light that has passed the at least part of the illumination optical system based on a detection result of the image pickup device.

Abstract translation: 曝光装置包括使用来自光源的紫外光照射掩模版（MK）的照明光学（IO）系统和测量紫外光的偏振状态的偏振光测量单元（1），所述偏振光测量单元包括： 光学单元，用于对通过至少部分照明光学系统的紫外光提供至少三个不同的相位差;偏振元件，用于根据已经通过光学单元的紫外光的偏振状态提供不同的透射率 以及用于检测已经通过偏振元件的紫外光的光强度的图像拾取装置（22），所述偏振测量单元测量已经通过所述照明光学系统的至少一部分的紫外光的偏振状态 根据图像拾取装置的检测结果。

公开(公告)号：EP1596172A2

公开(公告)日：2005-11-16

申请号：EP04022711.8

申请日：2004-09-23

Applicant: FUJITSU LIMITED

Inventor： Kubo, Teruhiro

IPC: G01J4/04

CPC classification number: G01J4/04

Abstract: A polarization state measuring apparatus of the present invention branches an input signal light into a plurality of signal lights by optical couplers, gives polarization and phase shift which are different from each other, to the signal lights by a plurality of optical elements arranged on optical branch paths, detects the power of each of the signal lights by the corresponding light receiving elements, and after adjusting at least differences in the optical branch paths, processes electrical signals output from the light receiving elements by operating means, to acquire information related to a polarization state of the input signal light. As a result, it is possible to provide a small size polarization state measuring apparatus which can correct differences in arrival times of the signal lights to the light receiving elements, which occur due to differences in the optical path lengths of the plurality of optical branch paths, to thereby measure the polarization state of the input signal light with high accuracy.

Abstract translation: 本发明的偏振状态测量装置通过光耦合器将输入信号光分支成多个信号光，通过布置在光分支上的多个光学元件将信号光分别彼此不同的极化和相移 通过相应的光接收元件检测每个信号光的功率，并且在调整至少光分支路径的差异之后，通过操作装置处理从光接收元件输出的电信号，以获取与偏振相关的信息 输入信号灯的状态。 结果，可以提供一种小尺寸偏振状态测量装置，其可以校正由于多个光分支路径的光路长度的差异而导致的信号光到达光接收元件的到达时间的差异 ，从而以高精度测量输入信号光的偏振状态。

公开(公告)号：EP1353158B1

公开(公告)日：2005-10-19

申请号：EP03002980.5

申请日：2003-02-11

Applicant: Thorlabs, Inc.

Inventor： Bandemer,Adalbert,Dr. ,  Krause,Egbert

IPC: G01J4/04

CPC classification number: G01M11/337 ,  G01J4/04 ,  G01M11/336

公开(公告)号：EP1558902A1

公开(公告)日：2005-08-03

申请号：EP02808047.1

申请日：2002-10-25

Applicant: Agilent Technologies Inc

Inventor： HENTSCHEL, Christian ,  THOMA, Peter

IPC: G01J4/04 ,  G01M11/00

CPC classification number: G01J4/00 ,  G01J4/04

Abstract: A first optical signal with a first polarization state is received by a polarization conversion unit. From this first optical signal, a set of n derived optical signals with n different well-defined polarization states i, i = 1, ..., n, is generated, whereby n is a natural number greater than one. Said n different well-defined polarization states are chosen such that polarization dependent measurement errors of the n derived optical signals cancel each other when averaged irrespective of the first optical signal's polarization state. Therefore, polarization dependent measurement errors can be reduced or even eliminated.