MUELLER MATRIX SPECTROSCOPY USING CHIROPTIC
    25.
    发明公开
    MUELLER MATRIX SPECTROSCOPY USING CHIROPTIC 审中-公开
    与CHIROPTIC Mueller矩阵光谱

    公开(公告)号:EP2663853A1

    公开(公告)日:2013-11-20

    申请号:EP11811465.1

    申请日:2011-12-21

    CPC classification number: G01N21/211 G01N21/23

    Abstract: An optical metrology device produces a broadband beam of light that is incident on and reflected by a sample and introduces multiple variations in the polarization state of the beam of light induced by an optical chiral element. Using the detected light, the Muller matrix or partial Mueller matrix for the sample is determined, which is then used to determine a characteristic of the sample. For example, simulated spectra for a Mueller matrix for a model is fit to the measured spectra for the Mueller matrix of the sample by adjusting the parameters of the model until an acceptable fit between the simulated spectra and measured spectra from the Mueller matrices is produced. The varied parameters are then used as the sample parameters of interested, which can be reported, such as by storing in memory or displaying.

    CRYSTAL GRATING APPARATUS
    27.
    发明公开
    CRYSTAL GRATING APPARATUS 审中-公开
    CRYSTAL电网设备

    公开(公告)号:EP1588133A4

    公开(公告)日:2010-09-01

    申请号:EP04703873

    申请日:2004-01-21

    Applicant: SPECRYS LTD

    CPC classification number: G01N21/21 G01J3/447

    Abstract: Apparatus for analyzing light having at least one wavelength, the apparatus comprising: (a) a light deflector for deflecting the light so as to provide a deflected light beam characterized by at least one wavelength-dependent angle, respectively corresponding to the at least one wavelength of the light; (b) an encoder, capable of encoding the deflected light beam so as to provide an encoded light beam characterized by at least one angle-dependent polarization state, respectively corresponding to the at least one wavelength-dependent angle; and (c) a decoder, for decoding the encoded light beam so as to determine at least one spectral component of the light.

    REFLECTION TYPE TERAHERTZ SPECTROMETER AND SPECTROMETRIC METHOD
    28.
    发明公开
    REFLECTION TYPE TERAHERTZ SPECTROMETER AND SPECTROMETRIC METHOD 审中-公开
    的反射式和程序光谱太赫分光计

    公开(公告)号:EP1630542A4

    公开(公告)日:2007-04-11

    申请号:EP04734599

    申请日:2004-05-24

    Applicant: AISIN SEIKI

    CPC classification number: G01N21/3581 G01N21/552

    Abstract: A reflection type terahertz spectrometer characterized by comprising an incident-side optical path (1) through which terahertz waves are propagated, irradiating means (2) for irradiating a measuring subject article with the terahertz waves propagated through the incident-side optical path (1), an outgoing-side optical path (3) through which terahertz waves sent from the irradiating means (2) are propagated, and a detector (4) for receiving and detecting the terahertz waves propagated through the outgoing-side optical path (3), wherein the irradiating means (2) has at least one planar interface (21) and a refractive index greater than that of a peripheral region contacting the planar interface (21) and is disposed between the incident-side optical path (1) and the outgoing-side optical path (3) such that the terahertz waves propagated through the incident-side optical path (1) to be incident on the planar interface (21) are internally totally reflected thereby, and wherein the measuring subject article is disposed in the peripheral region contacting the planar interface (21) of the irradiating means (2), and the measuring subject article is irradiated with evanescent waves radiated from the planar interface (21) to the peripheral region contacting the planar interface (21) when the terahertz waves are subjected to the internal total reflection at the planar interface (21), thereby performing spectrometry.

    ANGLE-OF-ROTATION MEASURING DEVICE AND ANGLE-OF-ROTATION MEASURING METHOD
    29.
    发明公开
    ANGLE-OF-ROTATION MEASURING DEVICE AND ANGLE-OF-ROTATION MEASURING METHOD 审中-公开
    角测量装置和角度测量方法

    公开(公告)号:EP1387161A4

    公开(公告)日:2007-03-07

    申请号:EP02700687

    申请日:2002-02-21

    Inventor: MATSUMOTO KENJI

    CPC classification number: G01N21/21 A61B5/14558

    Abstract: An angle-of-rotation measuring device and method, for measuring the concentration of a rotatory-polarizing substance (such as saccharide, amino acid, vitamin) in a sample in a noncontact manner. A coherent light flux is branched into two light fluxes an object beam and a reference beam -, the object beam that has passed through the sample is converted by means of a quarter-wave plate into orthogonal polarization components having a phase difference proportional to the angle of rotation of the sample, and the angle of rotation of the sample is determined from a phase difference between beat signals obtained by interference between the object beam and the reference beam. Alternatively, a coherent light flux incident to and passed through a sample is converted by means of a quarter-wave plate into orthogonal polarization components having a phase difference proportional to the angle of rotation of the sample, the orthogonal polarization components are allowed to interfere with each other by a polarizer, and the angle of rotation of the sample is measured by the phase of a beat signal thus obtained.

    Verfahren und Vorrichtung zur polarisationsabhängigen und ortsaufgelösten Untersuchung einer Oberfläche oder einer Schicht
    30.
    发明公开
    Verfahren und Vorrichtung zur polarisationsabhängigen und ortsaufgelösten Untersuchung einer Oberfläche oder einer Schicht 有权
    方法和偏振相关装置和一个表面或层的空间分辨的调查

    公开(公告)号:EP1507137A1

    公开(公告)日:2005-02-16

    申请号:EP04012448.9

    申请日:2004-05-26

    Applicant: SICK AG

    Inventor: Blöhbaum, Frank

    CPC classification number: G01N21/211 G01J4/04 G02B5/3058

    Abstract: Bei einem Verfahren zur Untersuchung einer Oberfläche oder einer Schicht wird polarisierte optische Strahlung als Beleuchtungsstrahlung auf die Oberfläche bzw. Schicht gestrahlt und es werden in Abhängigkeit von dem Ort auf der Oberfläche bzw. in der Schicht im Wesentlichen gleichzeitig wenigstens eine Polarisationseigenschaft der von der Oberfläche als Messstrahlung zurückgeworfenen bzw. von der Schicht als Messstrahlung abgegebenen optischen Strahlung erfasst. Eine Vorrichtung (10) zur Untersuchung einer Oberfläche (12) oder einer Schicht umfasst eine Quelle (16) für polarisierte optische Strahlung zur Abgabe von Beleuchtungsstrahlung (18) auf die Oberfläche (12) oder Schicht und eine Detektionseinrichtung (22,24,28,30) zur ortsaufgelösten Erfassung wenigstens einer Polarisationseigenschaft der von der Oberfläche (12) als Messstrahlung (36) zurückgeworfenen bzw. von der Schicht als Messstrahlung (36) abgegebenen optischen Strahlung.
    Die Detektions einricht (22,24,28,30) umfasst eine Kamera (22), eine Auswerteeinrichtung (30), ein Feld (24) von Photodetektionselementen und eine Polarisations filter anordnung (28). Die Anordnung (28) umfasst matrix förmig angeordnete Bereiche mit zueinander verschiedenen Polarisationsrichtungen.

    Abstract translation: 用于检查表面(12)或其中偏振视觉辐射(18)的层的方法,用来照亮来自表面上的位置(38)的表面或层和测量辐射(36)反射或散射的始发被测量以确定矿表面 偏振特性。 因此独立权利要求中包括了以下内容: - 用于检查表面和偏振特性(a)中的装置; (B),用于测量的光辐射与光电检测器元件在其上的偏振滤光器,在一个金属的形式特别喜欢的一个场传感器被施加。

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