公开(公告)号：EP3106833A3

公开(公告)日：2017-05-03

申请号：EP16174422.2

申请日：2016-06-14

申请人： NXP USA, Inc.

发明人： Singer, Stefan ,  Gerster, Jochen ,  Herrmann, Stephan ,  Neff, Albrecht

IPC分类号： G01C19/574 ,  G01P1/00 ,  G01C19/5733

CPC分类号： G01C19/5621 ,  G01C19/5614 ,  G01C19/5733

摘要： A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.

摘要翻译： MEMS器件包括耦合一对可移动质量的两个弹簧系统。 每个弹簧系统包括约束刚性梁和一对挠曲件，其中一个挠曲件直接联接到刚性梁的一端并且联接到一个可运动质量块，并且另一个挠曲件直接联接到刚性件的相对端 梁和另一个可移动的质量。 响应于可动质量块的驱动运动，挠曲件能够使受约束的刚性梁枢转运动，使得刚性梁围绕其中心铰接点在相反方向上枢转。 这种枢转运动使得驱动质量块的反相线性振荡运动成为可能，同时基本上抑制或以其他方式拒绝可动质量块的同相运动。

公开(公告)号：EP3158292A1

公开(公告)日：2017-04-26

申请号：EP15721229.1

申请日：2015-05-07

申请人： Robert Bosch GmbH

发明人： OHMS, Torsten ,  MAUL, Robert ,  HATTASS, Mirko ,  HOEPPNER, Christian ,  SCHMIDT, Benjamin ,  SCHEBEN, Rolf

IPC分类号： G01C19/5733 ,  G01C19/5747

CPC分类号： G01C19/5747 ,  G01C19/5733

摘要： The invention relates to a micromechanical sensor component for a rotation rate sensor, comprising a first, second, third, and fourth seismic mass (12a to 12d) which are arranged on a mounting (10) in a movable manner about an intermediate space such that the first seismic mass (12a) and the second seismic mass (12b) can be moved at least along one first pivot axis (14), and the third seismic mass (12c) and the fourth seismic mass (12d) can be moved at least along one second pivot axis (16). A first rocker structure (26a) is connected to the first seismic mass (12a) via a first rocker coupling element (28a) and to the second seismic mass (12b) via a second rocker coupling element (28b) and is arranged on the mounting (10) adjacently to an outer face (30a) of the third seismic mass (12c) such that the first rocker structure (26a) can be set into a first rocker movement about a specified first pivot axis (32a) with respect to the mounting (10).

摘要翻译： 本发明涉及一种用于旋转速率传感器的微机械传感器部件，其包括第一，第二，第三和第四震动块（12a至12d），其围绕中间空间以可移动的方式布置在安装件（10）上，使得 可以至少沿着一个第一枢转轴线（14）移动第一地震块（12a）和第二地震块（12b），并且可以至少移动第三地震块（12c）和第四地震块（12d） 沿着一个第二枢转轴线（16）。 第一摇臂结构（26a）经由第一摇臂联接元件（28a）与第一震动块（12a）经由第二摇臂联接元件（28b）连接到第二震动块（12b），并且布置在安装件 （10）相邻地邻近所述第三抗震块（12c）的外表面（30a），使得所述第一摇臂结构（26a）能够相对于所述安装件被设置为围绕指定的第一枢转轴线（32a）的第一摇摆运动 （10）。

公开(公告)号：EP3106833A2

公开(公告)日：2016-12-21

申请号：EP16174422.2

申请日：2016-06-14

申请人： NXP USA, Inc.

发明人： Singer, Stefan ,  Gerster, Jochen ,  Herrmann, Stephan ,  Neff, Albrecht

IPC分类号： G01C19/574 ,  G01P1/00 ,  G01C19/5733

CPC分类号： G01C19/5621 ,  G01C19/5614 ,  G01C19/5733

摘要： A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.

摘要翻译： MEMS装置包括耦合一对可移动质量块的两个弹簧系统。 每个弹簧系统包括受约束的刚性梁和一对挠曲，其中一个挠曲件直接联接到刚性梁的一端和一个可移动质量块，另一个挠曲件直接联接到刚性梁的相对端 梁和另一个移动块。 响应于可移动质量块的驱动运动，挠曲能够使约束的刚性梁枢转运动，使得刚性梁在相对的方向绕其中心铰链点枢转。 该枢转运动使得驱动质量的反相线性振荡运动能够基本上抑制或以其他方式拒绝可移动质量块的同相运动。

公开(公告)号：EP2096407B1

公开(公告)日：2016-11-16

申请号：EP07860167.1

申请日：2007-12-26

申请人： Dai Nippon Printing Co., Ltd.

发明人： MORII, Akio

IPC分类号： G01C19/56 ,  H01L29/84 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18 ,  G01C25/00 ,  G01C19/5733 ,  G01P15/08

CPC分类号： G01P15/097 ,  G01C19/5733 ,  G01C19/5769 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0842

摘要： A mechanical quantity sensor includes: a first structure having a fixed portion with an opening, a displaceable portion disposed in the opening and displaceable relative to the fixed portion, and a connection portion connecting the fixed portion and the displaceable portion to each other; a second structure having a weight portion joined to the displaceable portion and a pedestal joined to the fixed portion, the second structure being stacked on the first structure; a first base having a first driving electrode which is disposed on a surface facing the displaceable portion and is made of a conductive material containing Al and Nd, the first base being stacked on the first structure while being connected to the fixed portion; and a second base having a second driving electrode which is disposed on a surface facing the weight portion and is made of the conductive material, the second base being stacked on the second structure while being connected to the pedestal.

公开(公告)号：EP2884229A1

公开(公告)日：2015-06-17

申请号：EP14182956.4

申请日：2014-08-29

申请人： InvenSense, Inc.

发明人： Anac, Ozan ,  Seeger, Joseph

IPC分类号： G01C19/5712 ,  G01C19/5733 ,  G01C19/574

CPC分类号： G01C19/5712 ,  G01C19/5733 ,  G01C19/574

摘要： A gyroscope (150) comprises a substrate (101) and a guided mass system. The guided mass system comprises proof masses (102a, 651) and guiding arms (104a, 104b) disposed in a plane parallel to the substrate (101). The proof masses are coupled to the guiding arm by springs (103a, 103b). The guiding arm is coupled to the substrate by springs (108a,108b). At least one of the proof-masses (651) is directly coupled to the substrate (101) by at least one anchor via a spring system (710a,710b). The gyroscope also comprises an actuator (109a, 109b) for vibrating one of the proof-masses (102a) in the first direction, which causes another proof mass to rotate in the plane. Finally, the gyroscope also includes transducers (660a, 660b) for sensing motion of the guided mass system in response to angular velocities about a single axis or multiple input axes.

摘要翻译： 陀螺仪（150）包括基板（101）和引导质量系统。 引导质量系统包括设置在平行于衬底（101）的平面中的校准质量（102a，651）和引导臂（104a，104b）。 检验质量通过弹簧（103a，103b）与引导臂联接。 引导臂通过弹簧（108a，108b）联接到基板。 至少一个证明物质（651）通过弹簧系统（710a，710b）由至少一个锚固件直接耦合到基底（101）。 陀螺仪还包括用于在第一方向上振动证明物质（102a）中的一个的致动器（109a，109b），这导致另一个证明物质在平面中旋转。 最后，陀螺仪还包括用于响应于围绕单个轴或多个输入轴的角速度感测被引导质量系统的运动的换能器（660a，660b）。

公开(公告)号：EP2327960A4

公开(公告)日：2012-10-24

申请号：EP09808178

申请日：2009-08-05

申请人： HITACHI LTD

发明人： DEGAWA MUNENORI ,  JEONG HEEWON

IPC分类号： G01P15/125 ,  G01C19/56 ,  G01C19/5733 ,  G01P1/02 ,  G01P15/08

CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01P1/003 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： In order to provide a technology capable of suppressing degradation of measurement accuracy due to fluctuation of detection sensitivity of an MEMS by suppressing fluctuation in natural frequency of the MEMS caused by a stress, first, fixed portions 3a to 3d are displaced outward in a y-direction of a semiconductor substrate 2 by deformation of the semiconductor substrate 2. Since a movable body 5 is disposed in a state of floating above the semiconductor substrate 2, it is not affected and displaced by the deformation of the semiconductor substrate 2. Therefore, a tensile stress (+Ã 1 ) occurs in the beam 4a and a compressive stress (-Ã 2 ) occurs in the beam 4b. At this time, in terms of a spring system made by combining the beam 4a and the beam 4b, increase in spring constant due to the tensile stress acting on the beam 4a and decrease in spring constant due to the compressive stress acting on the beam 4b are offset against each other.

摘要翻译： 为了提供一种能够通过抑制由应力引起的MEMS的固有频率的波动而由于MEMS的检测灵敏度的波动而抑制测量精度的劣化的技术，首先，固定部分3a至3d向外移位， 通过半导体基板2的变形，半导体基板2的方向。由于可移动体5以半导体基板2上方浮置的状态设置，所以不会受到半导体基板2的变形的影响和位移。因此， 在梁4a中发生拉伸应力（+ 1），并且在梁4b中发生压缩应力（-Δ2）。 此时，通过组合梁4a和梁4b制成的弹簧系统，由于作用在梁4a上的拉伸应力而增加弹簧常数，并且由于作用在梁4b上的压缩应力而降低弹簧常数 彼此抵消。

公开(公告)号：EP4350288A1

公开(公告)日：2024-04-10

申请号：EP23201347.4

申请日：2023-10-03

申请人： Commissariat à l'énergie atomique et aux énergies alternatives

发明人： JOET, Loïc ,  REY, Patrice

IPC分类号： G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

摘要： Dispositif (1) micro-électromécanique comprenant : un cadre ; une masse (4) d'épreuve reliée au cadre par une première liaison mécanique qui autorise un pivotement de la masse d'épreuve par rapport au cadre autour d'un premier axe (Δ 1 ) de rotation parallèle à un plan moyen du cadre ; et un levier (7) de détection d'un pivotement de la masse, relié à la masse d'épreuve par une deuxième liaison (9) mécanique autorisant une rotation du levier (7) par rapport à la masse (4) d'épreuve autour d'un deuxième axe (Δ 2 ). La deuxième liaison comprend deux parois se raccordant perpendiculairement l'une à l'autre et se raccordant, pour l'une (91), au levier, et pour l'autre (97) à la masse d'épreuve, l'une des parois étant parallèle au deuxième axe de rotation.

公开(公告)号：EP4300039A3

公开(公告)日：2024-01-10

申请号：EP23168935.7

申请日：2023-04-20

申请人： Analog Devices, Inc.

发明人： PRIKHODKO, Igor P. ,  VOHRA, Gaurav ,  SAVCHENKO, Arthur Yurievich ,  Zhang, Xin

IPC分类号： G01C19/5726 ,  G01C19/5733

摘要： A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (1/3 of the capacitive gap).

公开(公告)号：EP4266003A1

公开(公告)日：2023-10-25

申请号：EP23168285.7

申请日：2023-04-17

申请人： Analog Devices, Inc.

发明人： SAVCHENKO, Arthur Y. ,  PRIKHODKO, Igor P. ,  DUNN, Tyler Adam

IPC分类号： G01C19/5726 ,  G01C19/5733

摘要： Microelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass includes an opening, or a plurality of openings. The out-of-plane quadrature trim electrodes are positioned to laterally overlap edges of the opening in a projection plane. The out-of-plane quadrature trim electrodes trim in-plane motion of the proof mass in one or two directions to limit quadrature motion. The out-of-plane quadrature trim electrodes may be arranged in a symmetric pattern to enable mode switching.

公开(公告)号：EP3294665B1

公开(公告)日：2023-10-18

申请号：EP16725587.6

申请日：2016-05-09

发明人： IIHOLA, Antti ,  TORKKELI, Altti

IPC分类号： B81C1/00 ,  G01C19/5733 ,  G01C19/5769