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46 条记录 (耗时 0.18 秒)

    MEASUREMENT OF SURFACE DEFECTS
    31.
    发明授权
    MEASUREMENT OF SURFACE DEFECTS 有权
    测量表面缺陷的

    公开(公告)号：EP1336095B1

    公开(公告)日：2006-10-18

    申请号：EP01995647.3

    申请日：2001-11-16

    申请人： Koninklijke Philips Electronics N.V.

    发明人： TUKKER, Teunis, W.

    IPC分类号： G01N21/95

    CPC分类号： G01N21/95 ,  G01N21/94

    摘要： A device for the inspection of one or more movable surfaces (8), more in particular for the inspection of a rotating surface (8) of a wafer, which device includes at least one light source (1), and a beam splitter (4) for splitting the light beam that into a reference beam (6) that is applied to a detector (16) and a measuring beam (5) that is applied to the surface (surfaces) and contains at least one component in the direction of movement (U) of the respective surface or in the opposite direction. The light (15) that is reflected by the surface (8) has, upon detection of a defect (14), a frequency (v') that has been shifted relative to the measuring beam (5) and on which the reference beam (6) can be superposed. The device includes an evaluation unit (29) for determining the velocity (v) of a defect (14) on the surface (8) from the shifted frequency (v') and for determining the position of the defect on the surface therefrom.

    OPTICAL SCANNING DEVICE
    32.
    发明公开
    OPTICAL SCANNING DEVICE 审中-公开
    光学扫描装置

    公开(公告)号：EP1554720A2

    公开(公告)日：2005-07-20

    申请号：EP03808788.8

    申请日：2003-09-12

    申请人： Koninklijke Philips Electronics N.V.

    发明人： LIEDENBAUM, Coen, T., H., F. ,  TUKKER, Teunis, W.

    IPC分类号： G11B7/00

    CPC分类号： G11B7/005 ,  G11B7/135

    摘要： An optical scanning device 1 detects an information signal from an optical record carrier 2 using differential interference contrast. Two radiation beams 13a, 13b are generated and focused to two distinct spots 15a, 15b respectively displaced along a data track on the information layer of an optical record carrier. The relative positions of the spots in lands and pits can generate a path length difference between the reflected beams 17a, 17b. This path length difference causes the beams to interfere either constructively or destructively, depending on the relative land/pit position in the data track of the spots. This interference causes a detectable signal to be generated, the signal being representative of a transition from a pit to a land on the information layer 4 or vice versa.

    摘要翻译： 光学扫描设备1使用差分干涉对比度来检测来自光学记录载体2的信息信号。 两个辐射光束13a，13b被产生并聚焦到分别沿着光学记录载体的信息层上的数据轨道移位的两个不同的点15a，15b。 斑点和凹坑中的斑点的相对位置可以在反射束17a，17b之间产生路径长度差。 这种路径长度差异会造成光束相长或相消干涉，这取决于光斑数据轨道中的相对纹间/凹坑位置。 这种干扰导致产生可检测信号，该信号代表信息层4上从坑到岸的过渡，反之亦然。

    OPTICAL SCANNING DEVICE
    33.
    发明公开
    OPTICAL SCANNING DEVICE 审中-公开
    光学扫描装置

    公开(公告)号：EP1459308A1

    公开(公告)日：2004-09-22

    申请号：EP02785852.1

    申请日：2002-12-06

    申请人： Koninklijke Philips Electronics N.V.

    发明人： TUKKER, Teunis, W. ,  HENDRIKS, Bernardus, H., W.

    IPC分类号： G11B7/125 ,  G02B27/00 ,  G11B7/095

    CPC分类号： G11B7/13927 ,  G11B7/0956 ,  G11B7/1369

    摘要： An optical scanning device is for scanning an information layer (2) with a radiation beam (4). It includes: a radiation source (6) for providing said radiation beam, a lens system (7) for transforming said radiation beam to a scanning spot (17) on said information layer, and a wavefront modifier arranged between said radiation source and said scanning spot. The modifier including two elements (301, 302) having each an aspheric surface (301b, 302a) and being mutually linearly movable for introducing a wavefront modification in said second radiation beam. According to the invention, the aspheric surfaces are shaped so that: a first mutual linear displacement of the elements (301, 302) introduces a first wavefront modification (Wa) along a first axis (XO) in said second radiation beam, and a second mutual linear displacement of the elements introduces a second wavefront modification (Wb) along said second axis (YO) in said second radiation beam.

    摘要翻译： 一种光学扫描装置用于利用辐射束（4）扫描信息层（2）。 它包括：用于提供所述辐射束的辐射源（6），用于将所述辐射束变换成所述信息层上的扫描点（17）的透镜系统（7），以及布置在所述辐射源和所述扫描之间的波前调节器 点。 该修改器包括具有每个非球面表面（301b，302a）并且可相互线性移动的两个元件（301,302），用于在所述第二辐射束中引入波前修正。 根据本发明，非球面表面成形为使得：元件（301,302）的第一相互线性位移沿所述第二辐射束中的第一轴（XO）引入第一波前修正（Wa），并且第二波长 元件的相互线性位移在所述第二辐射束中沿所述第二轴（YO）引入第二波前修正（Wb）。

    MEASUREMENT OF SURFACE DEFECTS
    34.
    发明公开
    MEASUREMENT OF SURFACE DEFECTS 有权
    测量表面缺陷的

    公开(公告)号：EP1336095A2

    公开(公告)日：2003-08-20

    申请号：EP01995647.3

    申请日：2001-11-16

    申请人： Koninklijke Philips Electronics N.V.

    发明人： TUKKER, Teunis, W.

    IPC分类号： G01N21/95

    CPC分类号： G01N21/95 ,  G01N21/94

    摘要： A device for the inspection of one or more movable surfaces (8), more in particular for the inspection of a rotating surface (8) of a wafer, which device includes at least one light source (1), and a beam splitter (4) for splitting the light beam that into a reference beam (6) that is applied to a detector (16) and a measuring beam (5) that is applied to the surface (surfaces) and contains at least one component in the direction of movement (U) of the respective surface or in the opposite direction. The light (15) that is reflected by the surface (8) has, upon detection of a defect (14), a frequency (v') that has been shifted relative to the measuring beam (5) and on which the reference beam (6) can be superposed. The device includes an evaluation unit (29) for determining the velocity (v) of a defect (14) on the surface (8) from the shifted frequency (v') and for determining the position of the defect on the surface therefrom.

    REFLECTOR WITH MIXING CHAMBER
    35.
    发明公开
    REFLECTOR WITH MIXING CHAMBER 审中-公开
    与混合舱反射器

    公开(公告)号：EP2414724A1

    公开(公告)日：2012-02-08

    申请号：EP10712999.1

    申请日：2010-03-29

    申请人： Koninklijke Philips Electronics N.V.

    发明人： TUKKER, Teunis, W. ,  ANSEMS, Johannes, P., M. ,  VAN OERS, Denis, J., C.

    IPC分类号： F21K99/00 ,  F21Y101/02

    CPC分类号： F21K9/62 ,  F21K9/233 ,  F21Y2105/10 ,  F21Y2115/10

    摘要： A lighting unit (1), comprising a bowl shaped reflector (6), and a plurality of point shaped light sources (2) arranged inside the reflector. The unit further comprises a mixing chamber (4) in which the point shaped light sources (2) are arranged, and a scattering layer (5) covering the mixing chamber (4). The scattering layer (5) is partially reflecting and partially transmitting, thereby ensuring that light emitted by the point shaped light sources (2) is mixed in the mixing chamber (4) before reaching the reflector. This allows light emitted from the mixing chamber via the reflector to be conceived as one beam. In use, light from the point shaped light sources may be reflected by the scattering layer and then scattered by the scattering layer so that the reflector generates a beam similar to a halogen beam.

    OPTICAL COMPENSATOR, OPTICAL ELEMENT, OPTICAL SCANNING HEAD AND OPTICAL SCANNING DEVICE
    38.
    发明公开
    OPTICAL COMPENSATOR, OPTICAL ELEMENT, OPTICAL SCANNING HEAD AND OPTICAL SCANNING DEVICE 审中-公开
    光学补偿器，光学元件，并且光学扫描的光学扫描装置

    公开(公告)号：EP1974350A2

    公开(公告)日：2008-10-01

    申请号：EP06809312.9

    申请日：2006-09-15

    申请人： Koninklijke Philips Electronics N.V.

    发明人： TUKKER, Teunis, W. ,  VREHEN, Joris, J.

    IPC分类号： G11B7/00

    CPC分类号： G11B7/13922 ,  G11B7/1353 ,  G11B2007/0006 ,  G11B2007/0013

    摘要： An optical compensator for use in an optical scanning device for scanning a first optical record carrier (3') having an information layer (2') at a first information layer depth d and a second optical record carrier (3') having an information layer (2') at a second, different information layer depth d2. The scanning of the first and second optical record carrier is effected using a scanning spot (16) formed on the information layer by a first radiation beam having a first wavelength and a second radiation beam having a second, different wavelength respectively. The optical compensator includes a substantially circular phase structure having an annular zone arranged in the path of the first radiation beam and the second radiation beam. The annular zone is adapted for imparting a wavefront modification to said first radiation beam causing destructive interference over the area of the scanning spot (16) for radiation incident on said annular zone; and a wavefront modification to said second radiation beam for compensating spherical aberration. A further aspect of the present invention relates to an optical element for defining the numerical aperture of a radiation beam. The optical compensator or optical element can be used for a two- or three-wavelength system. The invention also discloses an optical scanning head, and an optical scanning device using the optical compensator. The invention also relates to an optical scanning head and an optical scanning device.