公开(公告)号：EP1397651A4

公开(公告)日：2005-06-22

申请号：EP02744424

申请日：2002-06-17

Applicant: HINDS INSTRUMENTS INC

Inventor： WANG BAOLIANG ,  OAKBERG THEODORE C

IPC: G01J4/04 ,  G01M11/00 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/20 ,  G01J4/00

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/70966

Abstract: Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.

公开(公告)号：EP1060369A4

公开(公告)日：2005-01-19

申请号：EP99934336

申请日：1999-02-17

Applicant: HINDS INSTRUMENTS INC

Inventor： WANG BAOLIANG ,  OAKBERG THEODORE C ,  KADLEC PAUL

IPC: G01J4/04 ,  G01B9/02 ,  G01N21/23

CPC classification number: G01J4/04 ,  G01N21/23

Abstract: A practical system and method for precisely measuring low-level birefrigence properties (retardance and fast axis orientation) of optical materials (26). The system permits multiple measurements to be taken across the area of a sample to detect and graphically display (100) variations in the birefrigence properties across the sample area. In a preferred embodiment, the system incorporates a photoelastic modulator (24) for modulating polarized light that is then directed through a sample (26). The beam ('Bi') propagating from the sample is separated into two parts, with one part ('B1') having a polarization direction different than the polarization direction of the other beam part ('B2'). These separate beam parts are then processed as distinct channels. Detection mechanisms (32, 50) associated with each channel detect the time varying light intensity corresponding to each of the two parts of the beam. This information is combined for calculating a precise measure of the retardance induced by the sample, as well as the sample's fast axis orientation.

公开(公告)号：EP1495293A1

公开(公告)日：2005-01-12

申请号：EP03718940.4

申请日：2003-04-15

Applicant: Qinetiq Limited

Inventor： HARVEY, Andrew Robert,Heriot Watt University ,  FLETCHER-HOLMES, David William,Heriot Watt Univ.

IPC: G01J3/28 ,  G01J3/447 ,  G01J3/51

CPC classification number: G01J4/04 ,  G01J3/2823 ,  G01J3/447 ,  G01J3/51

Abstract: An imaging spectrometer (2) is disclosed that comprises imaging means for dividing a received image into two or more spatially separated spectral images and means for detecting each spectral image (4), and is characterised in that the imaging means comprises at least one polarising beam splitter (18, 20, 22; 64, 68, 72). The polarising beam splitter may be a Wollaston prism. In one embodiment of the invention, the imaging means comprises image replication means (12) to produce two or more spatially separated images, and one or more filter elements such as dichroic filters (8) which act to alter the spectral characteristics of one or more of the spatially separated images. In a further embodiment of the invention the imaging means comprises one or more spectral replication means arranged in optical series, each spectral replication means comprising an optical retardation element (62, 66, 70) and a polarising beam splitter (64, 68, 72).

公开(公告)号：EP1482273A1

公开(公告)日：2004-12-01

申请号：EP03707195.8

申请日：2003-03-03

Applicant: Takaoka Electric Mfg. Co., Ltd.

Inventor： ISHIHARA, Mitsuhiro 42-1-904, Miyaushiro Aza

IPC: G01B11/24

CPC classification number: G01B11/25 ,  G01B11/24 ,  G01J4/04

Abstract: A polarization bearing detection type two-dimensional light reception timing detecting device for implementing a fast surface shape measurement that can accommodate an animal body measurement, and a surface shape measuring device using it. In Fig.8, the polarization bearing of a detection light is turned in synchronization with slit light scanning, and the polarization bearing is two-dimensionally recorded by two sets of analyzers (5, 6) and storage type image detectors in a crossed Nicols arrangement, thereby it is possible to determine, with only one-time imaging, timing at which a slit light is beamed into respected pixels in the storage type image detectors (7,8).

Abstract translation: 偏振轴承的检测光与狭缝光扫描同步，以便使用正交尼科尔布置的一对分析器（5,6）和存储型图像检测器（7,8）二维地记录偏振轴承。 还包括表面形状测量装置的独立权利要求。

公开(公告)号：EP1397651A1

公开(公告)日：2004-03-17

申请号：EP02744424.9

申请日：2002-06-17

Applicant: HINDS INSTRUMENTS, INC.

Inventor： WANG, Baoliang ,  OAKBERG, Theodore, C.

IPC: G01J4/00

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/70966

Abstract: Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.

公开(公告)号：EP1225431A1

公开(公告)日：2002-07-24

申请号：EP01305493.7

申请日：2001-06-25

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Moeller, Lothar B. ,  Westbrook, Paul Stephen,

IPC: G01J4/00 ,  H04B10/18

CPC classification number: H04B10/2569 ,  G01J3/447 ,  G01J4/04

Abstract: A method and apparatus for polarization measurements. A polarization state of an optical signal can be determined using a polarization analyzer comprising a polarization controller, a polarizer, a wavelength dispersive element and a photo-detector. The method and apparatus can be applied to polarization and polarization mode dispersion measurements in wavelength division multiplexed communication systems.

公开(公告)号：EP1218707A1

公开(公告)日：2002-07-03

申请号：EP00950757.5

申请日：2000-07-27

Applicant: COLORADO SCHOOL OF MINES

Inventor： FURTAK, Thomas, E.

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211

Abstract: The parallel detecting spectroscopic ellipsometer/polarimeter sensor (10) has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample (22) within a processing chamber. It includes a multi-spectral source of radiation (12) for producing a collimated beam of radiation (14) directed towards the surface of the sample through a polarizer (16). The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample (22), thereby changing its polarization state due to the intrinsic material properties of the sample (22). The light reflected from the sample (22) is separated into four separate polarized filtered beams (36, 38, 58, 62), each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.

公开(公告)号：EP1213578A1

公开(公告)日：2002-06-12

申请号：EP00126888.7

申请日：2000-12-07

Applicant: Semiconductor300 GmbH & Co KG

Inventor： Kuerner, Wolfgang, Dr.

IPC: G01N21/47 ,  G01J4/04

CPC classification number: G01N21/23 ,  G01J4/04

Abstract: The present invention relates to an apparatus and a method for detecting an amount of depolarization of a linearly polarized beam transmitted by a birefringent medium in the direction of the optical axis thereof. The apparatus comprises a first beam splitter (7) for separating an on-axis portion (2) of said linearly polarized beam into the orthogonal components (3,4), two photodetectors (8,9) for detecting each component (3,4), a second beam splitter (12) for separating an off-axis portion (11) of said linearly polarized beam into the orthogonal components (15,16), wherein said second beam splitter (12) is disposed off-axis of the incident linearly polarized beam (1), a second set of photodetectors for detecting the components (15,16) separated by said second beam splitter (12), and a subtracting device (17) for substracting the signals received by said second set of photodetectors (13,14) from the respective signals received by the first two photodetectors (8,9).

Abstract translation: 本发明涉及一种用于检测由双折射介质在其光轴方向上透射的线偏振光束的去极化量的装置和方法。 该装置包括用于将所述线偏振光束的轴上部分（2）分离为正交分量（3,4）的第一分束器（7），用于检测每个分量（3,4）的两个光电探测器（8,9） ），用于将所述线偏振光束的离轴部分（11）分离成正交分量（15,16）的第二分束器（12），其中所述第二分束器（12）设置在事件的离轴 线偏振光束（1），用于检测由所述第二分束器（12）分离的部件（15,16）的第二组光电检测器，以及用于将由所述第二组光电探测器（12）接收的信号 13,14）从由前两个光电检测器（8,9）接收的相应信号中。

公开(公告)号：EP0901615A1

公开(公告)日：1999-03-17

申请号：EP97925721.0

申请日：1997-05-27

Applicant: Tellium, Inc.

Inventor： TOMILSON, W., John, III ,  WAGNER, Richard, E.

IPC: G02F1 ,  G01J4 ,  H04B10

CPC classification number: G02F1/31 ,  G01J4/04

Abstract: A liquid crystal (LC) polarization modulator segment (216, 218) includes a monitoring device (220). The monitoring device (220) includes a polarized reference light source (222), located at an LC polarization monitor input, and polarized light detector (224), located at an LC polarization monitor output. If the reference light having the correct polarization is received at the detector (224), an indication of the switch state is provided. Alternatively, if the polarized detector (224) includes orthogonal polarizers (230A, 230B) provided for two separate light detectors (232A, 232B) both the desired polarization, and the opposite polarization, may be monitored to determine whether a failure exists in the segment. If the reference light is detected having the opposite polarization (instead of or in addition to the correct polarization) or no light is detected, the segment (or the monitor) is not operating correctly.

公开(公告)号：EP0515360A4

公开(公告)日：1993-09-15

申请号：EP90903668

申请日：1990-02-14

Applicant: THE JOHNS HOPKINS UNIVERSITY

Inventor： NEWMAN, ARNOLD, L. ,  STANBRO, WILLIAM, D.

IPC: C12M1/34 ,  C12M1/00 ,  G01J4/04 ,  G01N21/21 ,  G01N21/75

CPC classification number: G01J4/04 ,  G01N21/21 ,  G01N2021/1751 ,  G01N2021/755

Abstract: A differential polarimeter is disclosed for detecting changes in optical rotation between a test cell (10) and reference cell (12). The test cell (10) contains a fluid sample exposed to an analyte specific enzyme; the reference cell (12) contains a fluid sample not exposed to the enzyme. To enhance the sensitivity of the system a phase sensitive differential polarimetric technique is taught. In this technique, the phase difference between two resulting sinewave voltages is a measure of analyte concentration.